Display device and driving method thereof

ABSTRACT

To provide a display device and a driving method thereof, where variations in the threshold voltage of transistors can be compensated and thus variations in luminance of light-emitting elements can be suppressed. In a first period, initialization is performed; in a second period, a voltage based on the threshold voltage of a first transistor is held in first and second storage capacitors; in a third period, a voltage based on a video signal voltage and the threshold voltage of the first transistor is held in the first and second storage capacitors; and in a fourth period, voltages held in the first and second storage capacitors are applied to a gate terminal of the first transistor to supply a current to a light-emitting element, so that the light-emitting element emits light. Through the operation process, a current obtained by compensating variations in the threshold voltage of the first transistor can be supplied to the light-emitting element, thereby variations in luminance can be suppressed.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a structure of a display device havingtransistors. In particular, the invention relates to a structure of anactive matrix display device having thin film transistors manufacturedover an insulator such as glass or plastic. Further, the inventionrelates to an electronic device using such a display device as a displayportion.

2. Description of the Related Art

In recent years, a so-called self-luminous display device having pixelseach of which includes a light-emitting element such as a light-emittingdiode (LED) has been drawing attention. As a light-emitting element usedfor such a self-luminous display device, an organic light-emitting diode(also called an OLED (Organic Light-Emitting Diode), an organic ELelement, an electroluminescence (Electro Luminescence: EL) element, andthe like) is drawing attention, which is becoming to be more frequentlyused for an EL display and the like. Since a light-emitting element suchas an OLED is a self-luminous type, an EL display has advantages thatvisibility of pixels is higher, no backlight is required, the responsespeed is higher, and the like, compared with a liquid crystal display.The luminance of a light-emitting element is controlled with the amountof current flowing thereto.

In addition, in recent years, an active matrix display device havingpixels each of which is provided with a light-emitting element and atransistor for controlling the light emission of the light-emittingelement has been developed. An active matrix display device is expectedto be put into practical use because it can realize high-resolutiondisplay on a large screen, which is difficult to be achieved with apassive matrix display device, and realize an operation with lower powerconsumption than that of a passive matrix display device, as well ashaving high reliability.

When driving methods of pixels of an active matrix display device areclassified according to the kind of input signals, a voltage programmingmethod and a current programming method can be given as examples. Theformer voltage programming method is a method of controlling theluminance of a light-emitting element with a driving element byinputting a video signal (voltage) which is to be delivered to a pixelto a gate electrode of the driving element. On the other hand, thelatter current programming method is a method of controlling theluminance of a light-emitting element by flowing a programmed signalcurrent into the light-emitting element.

An exemplary pixel configuration of a display device which employs avoltage programming method, and a driving method thereof will bedescribed, with reference to FIG. 64. Note that description will be madeby using an EL display device as a typical display device.

FIG. 64 is a diagram illustrating an exemplary pixel configuration of adisplay device which employs a voltage programming method (see Reference1: Japanese Published Patent Application No. 2001-147659). A pixel shownin FIG. 64 includes a driving transistor 6401, a switching transistor6402, a storage capacitor 6403, a signal line 6404, a scan line 6405, afirst power supply line 6406, a second power supply line 6407, and alight-emitting element 6408.

Note that in this specification, the description that “a transistor ison” means a state that a gate-source voltage of a transistor is higherthan the threshold voltage thereof, and thus a current flows between asource and a drain, while the description that “a transistor is off”means a state that a gate-source voltage of a transistor is less than orequal to the threshold voltage thereof, and thus no current flowsbetween a source and a drain.

When the switching transistor 6402 is turned on in response to apotential change of the scan line 6405, a video signal which is input tothe signal line 6404 is delivered to a gate of the driving transistor6401. A gate-source voltage of the driving transistor 6401 is determinedby a potential of the video signal input, and a current flowing betweena source and a drain of the driving transistor 6401 is determinedaccordingly. This current is supplied to the light-emitting element6408, and thus the light-emitting element 6408 emits light.

In this manner, the voltage programming method is a method of settingthe gate-source voltage of the driving transistor 6401 with a potentialof a video signal, and thus setting a current flowing between the sourceand the drain of the driving transistor 6401, so that the light-emittingelement 6408 emits light at a luminance corresponding to the current.

As a semiconductor element for driving a light-emitting element, apolysilicon (p-Si) transistor is used. However, a polysilicon transistorcan easily have variations in electrical properties such as thethreshold voltage, on-current, and mobility, resulting from defects incrystal grain boundaries. Referring to the pixel shown in FIG. 64, whenthe properties of the driving transistor 6401 vary between each pixel,the drain current thereof also varies even when the same video signal isinput. Accordingly, the luminance of the light-emitting element 6408varies.

In addition, in the conventional pixel circuit (FIG. 64), a storagecapacitor is connected between the gate and the source of the drivingtransistor. Given that this storage capacitor is formed from a MOStransistor, a channel region of the MOS transistor cannot be inducedwhen a gate-source voltage of the MOS transistor becomes substantiallyequal to the threshold voltage thereof Therefore, the MOS transitorcannot function as a storage capacitor. As a result, video signalscannot be accurately held therein.

In this manner, in the conventional voltage programming method,luminance of light-emitting elements varies due to variations in theelectrical properties of transistors.

SUMMARY OF THE INVENTION

In view of the foregoing problems, it is an object of the invention toprovide a display device and a driving method thereof, where variationsin the threshold voltage of transistors can be compensated, and thusvariations in luminance of light-emitting elements can be reduced.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a storage capacitor, a power supply line, and a capacitiveline. A gate terminal of the first transistor is connected to a firstelectrode of the storage capacitor; and a first terminal of the firsttransistor is connected to the power supply line. A second electrode ofthe storage capacitor is connected to the capacitive line. The firsttransistor has a function of supplying a current to the light-emittingelement, while the second transistor has a function of a switch forsetting the first transistor to a diode-connection state. The firsttransistor is set to a diode-connection state by turning on the secondtransistor, so that a voltage based on the threshold voltage of thefirst transistor is held in the storage capacitor.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a storage capacitor, a first power supply line, a secondpower supply line, a scan line, and a capacitive line. A gate terminalof the first transistor is connected to a first terminal of the secondtransistor and a first electrode of the storage capacitor; a firstterminal of the first transistor is connected to the first power supplyline; and a second terminal of the first transistor is connected to asecond terminal of the second transistor and a first electrode of thelight-emitting element. A gate terminal of the second transistor isconnected to the scan line; a second electrode of the storage capacitoris connected to the capacitive line; and a second electrode of thelight-emitting element is connected to the second power supply line. Thefirst transistor has a function of supplying a current to thelight-emitting element, while the second transistor has a function of aswitch for setting the first transistor to a diode-connection state. Thefirst transistor is set to a diode-connection state by turning on thesecond transistor, so that a voltage based on the threshold voltage ofthe first transistor is held in the storage capacitor.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a third transistor, a fourth transistor, a fifth transistor,a first storage capacitor, a second storage capacitor, a first powersupply line, a second power supply line, a signal line, and a capacitiveline. A gate terminal of the first transistor is connected to a firstelectrode of the first storage capacitor and a first electrode of thesecond storage capacitor; and a first terminal of the first transistoris connected to the first power supply line. A second electrode of thesecond storage capacitor is connected to the capacitive line; and asecond electrode of the light-emitting element is connected to thesecond power supply line. The first transistor has a function ofsupplying a current to the light-emitting element; the second transistorhas a function of a switch for connecting a second electrode of thefirst storage capacitor to the signal line; the third transistor has afunction of a switch for connecting the second electrode of the firststorage capacitor to the capacitive line; the fourth transistor has afunction of a switch for setting the first transistor to adiode-connection state; and the fifth transistor has a function of aswitch for controlling a supply of a current to the light-emittingelement. The first transistor is set to a diode-connection state byturning on the fourth transistor, so that a voltage based on thethreshold voltage of the first transistor is held in the first storagecapacitor and the second storage capacitor.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a third transistor, a fourth transistor, a fifth transistor,a first storage capacitor, a second storage capacitor, a first powersupply line, a second power supply line, a first scan line, a secondscan line, a third scan line, a fourth scan line, a signal line, and acapacitive line. A gate terminal of the first transistor is connected toa second terminal of the fourth transistor, a first electrode of thefirst storage capacitor, and a first electrode of the second storagecapacitor; a first terminal of the first transistor is connected to thefirst power supply line; and a second terminal of the first transistoris connected to a first terminal of the fourth transistor and a firstterminal of the fifth transistor. A gate terminal of the secondtransistor is connected to the first scan line; a first terminal of thesecond transistors is connected to a second electrode of the firststorage capacitor, and a first terminal of the third transistor; and asecond terminal of the second transistor is connected to the signalline. A gate terminal of the third transistor is connected to the secondscan line; and a second terminal of the third transistor is connected tothe capacitive line. A gate terminal of the fourth transistor isconnected to the third scan line. A gate terminal of the fifthtransistor is connected to the fourth scan line; and a second terminalof the fifth transistor is connected to a first electrode of thelight-emitting element. A second electrode of the second storagecapacitor is connected to the capacitive line; and a second electrode ofthe light-emitting element is connected to the second power supply line.The first transistor has a function of supplying a current to thelight-emitting element; the second transistor has a function of a switchfor connecting the second electrode of the first storage capacitor tothe signal line; the third transistor has a function of a switch forconnecting the second electrode of the first storage capacitor to thecapacitive line; the fourth transistor has a function of a switch forsetting the first transistor to a diode-connection state; and the fifthtransistor has a function of a switch for controlling a supply of acurrent to the light-emitting element. The first transistor is set to adiode-connection state by turning on the fourth transistor, so that avoltage based on the threshold voltage of the first transistor is heldin the first storage capacitor and the second storage capacitor.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a third transistor, a fourth transistor, a first storagecapacitor, a second storage capacitor, a first power supply line, asecond power supply line, a signal line, and a capacitive line. A gateterminal of the first transistor is connected to a first electrode ofthe first storage capacitor and a second electrode of the second storagecapacitor; a first terminal of the first transistor is connected to thefirst power supply line; and a second terminal of the first transistoris connected to a first electrode of the light-emitting element. Asecond electrode of the second storage capacitor is connected to thecapacitive line; and a second electrode of the light-emitting element isconnected to the second power supply line. The first transistor has afunction of supplying a current to the light-emitting element; thesecond transistor has a function of a switch for connecting the secondelectrode of the first storage capacitor to the signal line; the thirdtransistor has a function of a switch for connecting the secondelectrode of the first storage capacitor to the capacitive line; and thefourth transistor has a function of a switch for setting the firsttransistor to a diode-connection state. The first transistor is set to adiode-connection state by turning on the fourth transistor, so that avoltage based on the threshold voltage of the first transistor is heldin the first storage capacitor and the second storage capacitor. Avoltage applied to the second power supply line changes over time.

One feature of the invention is a display device which includes a pixelhaving a light-emitting element, a first transistor, a secondtransistor, a third transistor, a fourth transistor, a first storagecapacitor, a second storage capacitor, a first power supply line, asecond power supply line, a first scan line, a second scan line, asignal line, and a capacitive line. A gate terminal of the firsttransistor is connected to a second terminal of the fourth transistor, afirst electrode of the first storage capacitor, and a first electrode ofthe second storage capacitor; a first terminal of the first transistoris connected to the first power supply line; and a second terminal ofthe first transistor is connected to a first terminal of the fourthtransistor and a first electrode of the light-emitting element. A gateterminal of the second transistor is connected to the first scan line; afirst terminal of the second transistor is connected to a secondelectrode of the first storage capacitor and a first terminal of thethird transistor; and a second terminal of the second transistor isconnected to the signal line. A gate terminal of the third transistor isconnected to the second scan line; and a second terminal of the thirdtransistor is connected to the capacitive line. A gate terminal of thefourth transistor is connected to the third scan line; a secondelectrode of the second storage capacitor is connected to the capacitiveline; and a second electrode of the light-emitting element is connectedto the second power supply line. The first transistor has a function ofsupplying a current to the light-emitting element; the second transistorhas a function of a switch for connecting the second electrode of thefirst storage capacitor to the signal line; the third transistor has afunction of a switch for connecting the second electrode of the firststorage capacitor to the capacitive line; and the fourth transistor hasa function of a switch for setting the first transistor to adiode-connection state. The first transistor is set to adiode-connection state by turning on the fourth transistor, so that avoltage based on the threshold voltage of the first transistor is heldin the first storage capacitor and the second storage capacitor. Avoltage applied to the second power supply line changes over time.

Note that the display device in accordance with the invention mayfurther include a sixth transistor, in which case the sixth transistormay have a function of a switch for applying an initial potential to thesecond terminal of the first transistor. In addition, the secondterminal of the sixth transistor may be connected to a wire included inthe pixel. Further, the display device may further include aninitialization line so that the second terminal of the sixth transistoris connected to the initialization line and a potential which is appliedto the initialization line as an initialization potential is applied tothe second terminal of the first transistor.

In addition, a gate terminal of the sixth transistor may be connected toa fifth scan line; a first terminal of the sixth transistor may beconnected to the second terminal of the first transistor, the firstterminal of the fourth transistor, and the first terminal of the fifthtransistor; and a second terminal of the sixth transistor may beconnected to the second terminal of the second transistor, the firstterminal of the third transistor, and the second electrode of the firststorage capacitor.

Alternatively, a gate terminal of the sixth transistor may be connectedto a fifth scan line; a first terminal of the sixth transistor may beconnected to the gate terminal of the first transistor, the secondterminal of the fourth transistor, the first electrode of the firststorage capacitor, the first terminal of the fourth transistor, and thesecond electrode of the second storage capacitor; and a second terminalof the sixth transistor may be connected to the second terminal of thesecond transistor, the first terminal of the third transistor, and thesecond electrode of the first storage capacitor.

Alternatively, a gate terminal of the sixth transistor may be connectedto a fifth scan line; a first terminal of the sixth transistor may beconnected to the second terminal of the first transistor, the firstterminal of the fourth transistor, and the first terminal of the fifthtransistor; and a second terminal of the sixth transistor may beconnected to the capacitive line.

Alternatively, a gate terminal of the sixth transistor may be connectedto a fifth scan line; a first terminal of the sixth transistor may beconnected to the second terminal of the first transistor, the firstterminal of the fourth transistor, and the first terminal of the fifthtransistor; and a second terminal of the sixth transistor may beconnected to the second scan line or the third scan line.

Note that the display device in accordance with the invention mayfurther include a reference line, and the reference line may beconnected to the second terminal of the third transistor.

Note also that in the display device in accordance with the invention,the capacitive line may be replaced by another wire.

In the display device in accordance with the invention, the firsttransistor is formed to have the largest value of W/L (ratio of achannel width W to a channel length L) among all of the transistors.

In the display device in accordance with the invention, the thirdtransistor and the fourth transistor may have the same conductivitytype.

In the display device in accordance with the invention, the fourthtransistor may be an n-channel transistor.

The display device in accordance with the invention may include aplurality of scan lines, and the gate electrodes of the respectivetransistors may be connected to different scan lines from each other.Alternatively, gate electrodes of at least two transistors among all ofthe transistors may be connected to the same scan line.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: supplying a current to the light-emitting element to set avoltage between opposite electrodes of a storage capacitor at an initialvoltage in a first period; turning on a second transistor to set a firsttransistor to a diode-connection state so that a voltage between theopposite electrodes of the storage capacitor is set at a voltage basedon the threshold voltage of the first transistor in a second period;applying a video signal-voltage to a signal line so that a voltagebetween the opposite electrodes of the storage capacitor is set at avoltage based on the video signal voltage applied to the signal line andthe threshold voltage of the first transistor in a third period; andapplying a voltage held in the storage capacitor to a gate terminal ofthe first transistor to supply a current to the light-emitting elementthrough the first transistor in a fourth period, so that thelight-emitting element emits light in a fourth period.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: supplying a current to the light-emitting element to set avoltage between opposite electrodes of a storage capacitor at an initialvoltage in a first period; turning on a second transistor to set a firsttransistor to a diode-connection state so that a voltage between theopposite electrodes of the storage capacitor is set at a voltage basedon the threshold voltage of the first transistor in a second period;applying a video signal voltage to a signal line so that a voltagebetween the opposite electrodes of the storage capacitor is set at avoltage based on the video signal voltage applied to the signal line andthe threshold voltage of the first transistor in a third period; andapplying a voltage held in the storage capacitor to a gate terminal ofthe first transistor to supply a current to the light-emitting elementthrough the first transistor, so that the light-emitting element emitslight in a fourth period.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: turning on a third transistor to apply an initialpotential to a second terminal of a first transistor in a first period;turning on a fourth transistor to set the first transistor to adiode-connection state so that voltages between opposite electrodes offirst and second storage capacitors are set at a voltage based on thethreshold voltage of the first transistor in a second period; applying avideo signal voltage to a signal line so that voltages between theopposite electrodes of the first and second storage capacitors are setat a voltage based on the video signal voltage applied to the signalline and the threshold voltage of the first transistor in a thirdperiod; and applying voltages held in the first and second storagecapacitors to a gate terminal of the first transistor to supply acurrent to the light-emitting element through the first transistor, sothat the light-emitting element emits light in a fourth period.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: turning on a third transistor to apply an initialpotential to a second terminal of a first transistor in a first period;turning on a fourth transistor to set the first transistor to adiode-connection state so that voltages between opposite electrodes offirst and second storage capacitors are set at a voltage based on thethreshold voltage of the first transistor in a second period; applying avideo signal voltage to a signal line so that voltages between theopposite electrodes of the first and second storage capacitors are setat a voltage based on the video signal voltage applied to the signalline and the threshold voltage of the first transistor in a thirdperiod; and applying voltages held in the first and second storagecapacitors to a gate terminal of the first transistor to supply acurrent to the light-emitting element through the first transistor, sothat the light-emitting element emits light in a fourth period.

Note that in the driving method of a display device in accordance withthe invention, voltages applied to the second power supply line in thefirst and fourth periods may differ from voltages applied to the secondpower supply line in the second and third periods.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: turning on a third transistor to apply an initialpotential to a second terminal of a first transistor in a first period;turning on a fourth transistor to set the first transistor to adiode-connection state so that voltages between opposite electrodes offirst and second storage capacitors are set at a voltage based on thethreshold voltage of the first transistor in a second period; applying avideo signal voltage to a signal line so that voltages between theopposite electrodes of the first and second storage capacitors are setat a voltage based on the video signal voltage applied to the signalline and the threshold voltage of the first transistor in a thirdperiod; and applying voltages held in the first and second storagecapacitors to a gate terminal of the first transistor to supply acurrent to the light-emitting element through the first transistor, sothat the light-emitting element emits light in a fourth period. Inaddition, voltages applied to the second power supply line in the firstand fourth periods differ from voltages applied to the second powersupply line in the second and third periods.

One feature of the invention is a driving method of a display devicewhich includes a pixel having a light-emitting element, which includesthe steps of: turning on a third transistor to apply an initialpotential to a second terminal of a first transistor in a first period;turning on a second transistor to set the first transistor to adiode-connection state so that voltages between opposite electrodes offirst and second storage capacitors are set at a voltage based on thethreshold voltage of the first transistor in a second period; applying avideo signal voltage to a signal line so that voltages between theopposite electrodes of the first and second storage capacitors are setat a voltage based on the video signal voltage applied to the signalline and the threshold voltage of the first transistor in a thirdperiod; and applying voltages held in the first and second storagecapacitors to a gate terminal of the first transistor to supply acurrent to the light-emitting element through the first transistor, sothat the light-emitting element emits light in a fourth period. Inaddition, voltages applied to the second power supply line in the firstand fourth periods differ from voltages applied to the second powersupply line in the second and third periods.

Note that in the driving method of a display device in accordance withthe invention, the pixel may further include an initialization line, andthe second terminal of the third transistor may be connected to theinitialization line so that a potential which is applied to theinitialization line as an initialization potential is applied to thesecond terminal of the first transistor in the first period.

Note also that it is difficult to distinguish a source and a drain of atransistor from each other due to its structure. Further, potentiallevels thereof may be switched depending on the operation of a circuit.Therefore, in this specification, a source and a drain are notspecified, and described as a first terminal and a second terminal. Forexample, when a first terminal is a source, a second terminal refers toa drain, and vice versa, when a first terminal is a drain, a secondterminal refers to a source.

In the invention, a pixel means one color element. Thus, in the case ofa color display device having color elements of R (Red), G (Green), andB (Blue), a minimum unit of an image is composed of three pixels of an Rpixel, a G pixel, and a B pixel. Note that the color elements are notlimited to three colors, and color elements with more than three colorsmay be employed, or color elements with colors other than the RGB may beemployed. For example, RGBW may be used by adding white (W) to RGB. Inaddition, one or more colors selected from among yellow, cyan, magenta,and the like may be added to RGB, for example.

Further, another color which is similar to at least one of R, G. and Bmay be added. For example, four color elements of R, G, B1, and B2 maybe formed. Although B1 and B2 are both blue colors, they have differentwavelengths from each other. By using such color elements, display canbe performed with closer colors to the real image, as well as the powerconsumption can be reduced. Note that each color element may becontrolled in brightness by using a plurality of regions. In such acase, one color element is used as one pixel, and each region whosebrightness is controlled within the pixel is used as a subpixel.Accordingly, in the case of performing display using an area gray scalemethod, for example, one color element has a plurality of regions whosebrightness is controlled, so that the whole regions are used forexpressing gray scales. In this case, each region whose brightness iscontrolled corresponds to a subpixel. Accordingly, in such a case, onecolor element is composed of a plurality of subpixels. Further, theremay be a case where each subpixel has a region with a different areadimension which contributes to display. In addition, viewing angles maybe widened by supplying slightly different signals to a plurality ofregions whose brightness is controlled in one color element, that is, aplurality of subpixels which constitute one color element.

In the invention, pixels may be provided (arranged) in matrix. Herein,the description that “pixels are provided (arranged) in matrix” includesa case where pixels are provided linearly or not linearly in thelongitudinal direction or the lateral direction. For example, in thecase of performing full color display with three color elements (e.g.,RGB), there may be a case where dots of the three color elements arearranged in stripes or in delta pattern. Further, there may be a casewhere dots of the three color elements are provided in the Bayerarrangement.

Note that various types of transistors can be used as a transistor ofthe invention. Therefore, types of transistors which can be used are notlimited to a certain type. For example, a thin film transistor (TFT)including a non-single crystalline semiconductor film typified byamorphous silicon or polycrystalline silicon can be used. Accordingly,various advantages can be provided that such transistors can bemanufactured at a low temperature, can be manufactured at low cost, canbe formed over a large substrate as well as a transparent substrate, andfurther, such transistors can transmit light. In addition, thetransistors can be formed by using a semiconductor substrate or an SOIsubstrate. In addition, a MOS transistor, a junction transistor, abipolar transistor, or the like can be used as a transistor in thisspecification. Accordingly, transistors with few variations, transistorswith a high current supply capacity, and transistors with a small sizecan be manufactured, and thus a circuit with low power consumption canbe constructed by using such transistors.

Further, a transistor including a compound semiconductor such as ZnO,a-InGaZnO, SiGe, or GaAs, or a thin film transistor obtained by thinningsuch a compound semiconductor can be employed. Accordingly, suchtransistors can be manufactured at a low temperature, can bemanufactured at a room temperature, and can be formed directly over alow heat-resistant substrate such as a plastic substrate or a filmsubstrate. In addition, a transistor or the like formed by ink-jetmethod or a printing method may also be employed. Accordingly, suchtransistors can be manufactured at a room temperature, can bemanufactured at a low vacuum, and can be manufactured over a largesubstrate. In addition, since such transistors can be manufacturedwithout using a mask (reticle), the layout of the transistors can beeasily changed. A transistor including an organic semiconductor or acarbon nanotube, or other transistors can be used as well. Accordingly,the transistors can be formed over a substrate which can be bent.

Note that a non-single crystalline semiconductor film may containhydrogen or halogen. In addition, various types of substrates can beused as a substrate over which transistors are formed without limitingto a certain type. Accordingly, transistors may be formed over, forexample, a single crystalline substrate, an SOI substrate, a glasssubstrate, a quartz substrate, a plastic substrate, a paper substrate, acellophane substrate, a stone substrate, a stainless steel substrate, asubstrate made of a stainless steel foil, or the like. In addition,after forming transistors over a substrate, the transistors may betransposed to another substrate. By using such substrates, transistorswith excellent properties and with low power consumption can be formed,and thus, a device with high durability and high heat resistance can beformed.

Note also that various types of elements can be used as a switch shownin this specification. An electrical switch, a mechanical switch, andthe like are given as examples. That is, anything that can control acurrent flow can be used, and thus, various types of elements can beused without limiting to a certain element. For example, it may be atransistor, a diode (e.g., a PN junction diode, a PIN diode, a Schottkydiode, a diode-connected transistor, or the like), a thyristor, or alogic circuit combining such elements. Therefore, in the case of using atransistor as a switch, the polarity (conductivity type) of thetransistor is not particularly limited to a certain type since itoperates just as a switch. However, when off-current is preferred to besmall, a transistor of a polarity with small off-current is desirablyemployed. As a transistor with small off-current, there is a transistorprovided with an LDD region, a transistor with a multi-gate structure,or the like.

In addition, it is desirable to employ an n-channel transistor when apotential of a source terminal of a transistor being operated as aswitch is closer to the low-potential-side power supply (e.g., Vss, GND,0 V, or the like), while a p-channel transistor is desirably employedwhen the potential of the source terminal is closer to thehigh-potential-side power supply (e.g., Vdd or the like). This helps theswitch operate efficiently since the absolute value of the gate-sourcevoltage of the transistor can be increased. A CMOS switch may also beused by using both n-channel and p-channel transistors. By employing aCMOS switch, the switch can efficiently operate as a switch since acurrent can flow therethrough when either one of the p-channeltransistor or the n-channel transistor is turned on. For example, avoltage can be appropriately output regardless of whether a voltage ofan input signal of the switch is high or low. Further, since a voltageamplitude of a signal for turning on or off the switch can besuppressed, power consumption can be reduced.

In the invention, the description that an object is formed “on” orformed “above” another object does not necessarily mean the object is indirect contact with another object. The description includes a casewhere two objects are not in direct contact with each other, that is, acase where another object is sandwiched therebetween. Accordingly, whenit is described that a layer B is formed on (above) a layer A, it meanseither a case where the layer B is formed in direct contact with thelayer A, or a case where another layer (e.g., a layer C, a layer D, orthe like) is formed in direct contact with the layer A, and then thelayer B is formed in direct contact with the layer C or D. In addition,the description that an object is formed “over” another object, it doesnot necessarily mean that the object is in direct contact with anotherobject, and another object may be sandwiched therebetween. Accordingly,for example, when it is described that a layer B is formed over a layerA, it means either a case where the layer B is formed in direct contactwith the layer A, or a case where another layer (e.g., a layer C, alayer D, or the like) is formed in direct contact with the layer A, andthen the layer B is formed in direct contact with the layer C or D.Similarly, when it is described that an object is formed below or underanother object, it means either a case where the objects are in directcontact with each other or a case where the objects are not in contactwith each other.

The display device of the invention may be various modes or may includevarious display elements. For example, a display medium whose contrastchanges by an electromagnetic action can be used, such as an EL element(e.g., an organic EL element, an inorganic EL element, or an EL elementcontaining both organic and inorganic materials); an electron-emissiveelement; a liquid crystal element; electronic ink; a grating light valve(GLV); a plasma display (PDP); a digital micromirror device (DMD); apiezoelectric ceramic element; or a carbon nanotube. In addition, adisplay device using an EL element includes an EL display; a displaydevice using an electron-emissive element includes a field emissiondisplay (FED), an SED-type flat panel display (SED: Surface-conductionElectron-emitter Display), or the like; a display device using a liquidcrystal element includes a liquid crystal display, a transmissive liquidcrystal display, a semi-transmissive liquid crystal display, and areflective liquid crystal display; and a display device using electronicink includes electronic paper.

Note that a light-emitting element in the invention means an elementwhose brightness can be controlled with the amount of current flowinginto the element. Typically, an EL element can be used. In addition toan EL element, a light-emitting element such as an element used for afield emission display (FED), and SED (Surface-conductionElectron-emitter Display) which is one of the FEDs can be used.

In the invention, a connection means an electrical connection.Therefore, elements that enable an electrical connection (e.g., otherelements, switches, and the like) may be added to a predeterminedconnection relation which is disclosed in the structure of theinvention.

In the display device of the invention, a current which flows into alight-emitting element is determined independently of the thresholdvoltage of a transistor. Therefore, variations in the threshold voltageof transistors can be compensated, and thus variations in luminance oflight-emitting elements can be reduced, which leads to improved imagequality.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings,

FIG. 1 illustrates an exemplary basic configuration of a pixel in thedisplay device of the invention;

FIG. 2 illustrates an exemplary basic configuration of a pixel in thedisplay device of the invention;

FIG. 3 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 4 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 5 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 6 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 7 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 8 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 9 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 10 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 11 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 12 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 13 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 14 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 15 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 16 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 17 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 18 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 19 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 20 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 21 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 22 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 23 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 24 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 25 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 26 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 27 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 28 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 29 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 30 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 31 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 32 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 33 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 34 illustrates the operation of a pixel circuit in the displaydevice of the invention;

FIG. 35 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 36 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 37 illustrates an exemplary layout of a pixel configuration of thedisplay device of the invention;

FIG. 38 illustrates an exemplary configuration of the display device ofthe invention;

FIGS. 39A and 39B illustrate exemplary configurations of a signal linedriver circuit in the display device of the invention;

FIG. 40 illustrates an exemplary configuration of a scan line drivercircuit in the display device of the invention;

FIG. 41 illustrates an exemplary configuration of the display device ofthe invention;

FIG. 42 illustrates an exemplary configuration of the display device ofthe invention;

FIGS. 43A and 43B illustrate exemplary structures of the display deviceof the invention;

FIGS. 44A and 44B illustrate exemplary structures of the display deviceof the invention;

FIGS. 45A and 45B illustrate exemplary structures of the display deviceof the invention;

FIGS. 46A to 46C illustrate structures of a transistor used in thedisplay device of the invention;

FIGS. 47A to 47D illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIGS. 48A to 48C illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIGS. 49A to 49D illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIGS. 50A to 50D illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIGS. 51A to 51D illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIGS. 52A to 52B illustrate a manufacturing method of a transistor usedin the display device of the invention;

FIG. 53 illustrates a cross-sectional structure of a transistor used inthe display device of the invention;

FIGS. 54A to 54E are top views of a transistor used in the displaydevice of the invention;

FIGS. 55A and 55B illustrate exemplary mask patterns of a transistorused in the display device of the invention;

FIGS. 56A and 56B illustrate exemplary mask patterns of a transistorused in the display device of the invention;

FIGS. 57A and 57B illustrate exemplary mask patterns of a transistorused in the display device of the invention;

FIG. 58 illustrates exemplary hardware for controlling the drivingmethod of the invention;

FIG. 59 illustrates an exemplary EL module using the driving method ofthe invention;

FIG. 60 illustrates an exemplary configuration of a display panel usingthe driving method of the invention;

FIG. 61 illustrates an exemplary configuration of a display panel usingthe driving method of the invention;

FIG. 62 illustrates an exemplary EL television receiver using thedriving method of the invention;

FIGS. 63A to 63H illustrate exemplary electronic devices to which thedriving method of the invention is applied;

FIG. 64 illustrates a conventional pixel configuration;

FIG. 65 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIG. 66 illustrates an exemplary pixel configuration of the displaydevice of the invention;

FIGS. 67A and 67B illustrate exemplary structures of a display panelused for the display device of the invention;

FIG. 68 illustrates an exemplary structure of a light-emitting elementused for the display device of the invention;

FIGS. 69A to 69C illustrate exemplary structures of the display deviceof the invention;

FIG. 70 illustrates an exemplary structure of the display device of theinvention;

FIGS. 71A and 71B illustrate exemplary structures of the display deviceof the invention;

FIGS. 72A and 72B illustrate exemplary structures of the display deviceof the invention; and

FIGS. 73A and 73B illustrate exemplary structures of the display deviceof the invention.

DETAILED DESCRIPTION OF THE INVENTION

Although the invention will be fully described by way of embodimentmodes with reference to the accompanying drawings, it is to beunderstood that various changes and modifications will be apparent tothose skilled in the art. Therefore, unless such changes andmodifications depart from the scope of the invention, they should beconstrued as being included therein. Thus, the invention is not limitedto the description in the following embodiment modes.

Embodiment Mode [1]

First, a basic configuration of a pixel circuit in the display device ofthe invention will be described with reference to FIG. 1. Note thatdescription will be made by using an EL element as an exemplarylight-emitting element.

FIG. 1 is a diagram showing a minimum circuit configuration foracquiring the threshold voltage of a transistor in the pixelconfigurations of this embodiment mode. FIG. 1 includes a firsttransistor 101, a second transistor 102, a storage capacitor 103, a scanline 104, a first power supply line 105, a second power supply line 106,a capacitive line 107, and a light-emitting element 108.

Note that in FIG. 1, the first transistor 101 and the second transistor102 are p-channel transistors.

A gate terminal of the first transistor 101 is connected to a secondterminal of the second transistor 102 and a first electrode of thestorage capacitor 103; a first terminal of the first transistor 101 isconnected to the first power supply line 105; and a second terminal ofthe first transistor 101 is connected to a first terminal of the secondtransistor 102. A gate terminal of the second transistor 102 isconnected to the scan line 104. A second electrode of the storagecapacitor 103 is connected to the capacitive line 107. A secondelectrode of the light-emitting element 108 is connected to the secondpower supply line 106.

The first power supply line 105 is applied with a power supply potentialVDD, the second power supply line 106 is applied with a power supplypotential VSS, and the capacitive line 107 is applied with a potentialV_(CL). Note that the potential relationship is VDD>VSS and VDD>V_(CL).

The first transistor 101 herein has a function of supplying a current tothe light-emitting element 108. The second transistor 102 has a functionof a switch for setting the first transistor 101 to a diode-connectionstate.

Note that in this specification, a “diode connection” means a state thata gate terminal of a transistor is connected to either a first or secondterminal thereof.

In the pixel circuit shown in FIG. 1, the first transistor 101 isbrought into a diode-connection state by turning on the secondtransistor 102, so that a current flows into the storage capacitor 103,and thus the storage capacitor 103 is charged. The charging of thestorage capacitor 103 continues until a voltage held in the storagecapacitor 103 reaches VDD−|V_(th)|−V_(CL) (a potential obtained bysubtracting the threshold voltage |V_(th)| of the first transistor 101and the potential V_(CL) of the capacitive line 107 from the powersupply potential VDD). When the voltage held in the storage capacitor103 reaches VDD−|V_(th)|−V_(CL), the first transistor 101 is turned off,and a current stops flowing into the storage capacitor 103.

Through the aforementioned operation, a voltage based on the thresholdvoltage |V_(th)| of the first transistor 101 can be held in the storagecapacitor 103.

FIG. 2 shows a minimum circuit configuration for acquiring the thresholdvoltage of the first transistor, in the case where the first transistoris an n-channel transistor.

FIG. 2 includes a first transistor 201, a second transistor 202, astorage capacitor 203, a scan line 204, a first power supply line 205, asecond power supply line 206, a capacitive line 207, and alight-emitting element 208.

Note that in FIG. 2, the second transistor 202 is an n-channeltransistor.

The first power supply line 205 is applied with a power supply potentialVSS, the second power supply line 206 is applied with a power supplypotential VDD, and the capacitive line 207 is applied with a potentialV_(CL). Note that the potential relationship is VDD>VSS and V_(CL)>VSS.

In the pixel circuit shown in FIG. 2, the first transistor 201 isbrought into a diode-connection state by turning on the secondtransistor 202, so that a current flows into the storage capacitor 203,and thus the storage capacitor 203 is charged. The charging of thestorage capacitor 203 continues until a voltage held in the storagecapacitor 203 reaches V_(CL)−VSS−|V_(th)| (a potential obtained bysubtracting the power supply potential VSS and the threshold voltage|V_(th)| of the first transistor 201 from the potential V_(CL) of thecapacitive line 207). When the voltage held in the storage capacitor 203has reached V_(CL)−VSS−|V_(th)|, the first transistor 201 is turned off,and a current stops flowing into the storage capacitor 203.

Through the aforementioned operation, a voltage based on the thresholdvoltage |V_(th)| of the first transistor 201 can be held in the storagecapacitor 203.

Next, a pixel configuration of this embodiment which has the basiccircuit configuration shown in FIG. 1 or FIG. 2 will be described, withreference to FIG. 3. Note that description will be made by using an ELelement as an exemplary light-emitting element.

FIG. 3 is a diagram showing a pixel circuit of this embodiment mode. Thepixel circuit of this embodiment mode includes a first transistor 301 toa fifth transistor 305, a first storage capacitor 306, a second storagecapacitor 307, a signal line 308, a first scan line 309 to a fourth scanline 312, a first power supply line 313, a second power supply line 314,a capacitive line 315, and a light-emitting element 316.

The first transistor 301 herein is used as a transistor for supplying acurrent to the light-emitting element 316, while each of the secondtransistor 302 to the fifth transistor 305 is used as a switch forselecting a connection of wires.

A gate terminal of the first transistor 301 is connected to a secondterminal of the fourth transistor 304, a first electrode of the storagecapacitor 306, and a first electrode of the second capacitor 307; afirst terminal of the first transistor 301 is connected to the firstpower supply line 313; and a second terminal of the first transistor 301is connected to a first terminal of the fourth transistor 304 and afirst terminal of the fifth transistor 305. A gate terminal of thesecond transistor 302 is connected to the first scan line 309; a firstterminal of the second transistor 302 is connected to the signal line308; and a second terminal of the second transistor 302 is connected toa first terminal of the third transistor 303 and a second electrode ofthe first storage capacitor 306. A gate terminal of the third transistor303 is connected to the second scan line 310, and a second terminal ofthe third transistor 303 is connected to the capacitive line 315. A gateterminal of the fourth transistor 304 is connected to the third scanline 311. A gate terminal of the fifth transistor 305 is connected tothe fourth scan line 312, and a second terminal of the fifth transistor305 is connected to a first electrode of the light-emitting element 316.A second electrode of the second storage capacitor 307 is connected tothe capacitive line 315. A second electrode of the light-emittingelement 316 is connected to the second power supply line 314.

The first power supply line 313 is applied with a power supply potentialVDD, the second power supply line 314 is applied with a power supplypotential VSS, and the capacitive line 315 is applied with a potentialV_(CL). Note that the potential relationship is VDD>VSS and VDD>V_(CL).

Note that in the pixel circuit shown in FIG. 3, all of the firsttransistor 301 to the fifth transistor 305 are p-channel transistors.

Note also that the fourth transistor 304 in FIG. 3 corresponds to thesecond transistor 102 in FIG. 1, and the second storage capacitor 307 inFIG. 3 corresponds to the storage capacitor 103 in FIG. 1.

Next, operation of the pixel circuit in this embodiment mode will bedescribed with reference to FIG. 4 to FIG. 8.

FIG. 4 shows a timing chart of video signal voltages and pulses that areinput to the signal line 308 and the first scan line 309 to the fourthscan line 312. The whole period is divided into fourth periods includinga first period T1 to a fourth period T4 in accordance with eachoperation of the pixel circuits shown in FIG. 5 to 8.

FIGS. 5 to 8 show connection states of the pixel circuit in thisembodiment in each period. In FIGS. 5 to 8, portions shown by solidlines are electrically connected, while portions shown by dashed linesare not electrically connected.

First, operation of the pixel circuit in the first period T1 will bedescribed with reference to FIG. 5. FIG. 5 is a diagram showing aconnection state of the pixel circuit in the first period T1. In thefirst period T1, the second scan line 310 to the fourth scan line 312are at L level, and the third transistor 303 to the fifth transistor 305are on. Meanwhile, the first scan line 309 is at H level and the secondtransistor 302 is off. Accordingly, the first transistor 301 has adiode-connection state, and thus a current flows into the light-emittingelement 316. As a result, potentials of the second terminal of the firsttransistor 301, the first electrode of the first storage capacitor 306,and the first electrode of the second storage capacitor 307 drop,thereby an initialization voltage is held in the first storage capacitor306 and the second storage capacitor 307.

Through the aforementioned operation, an initialization voltage is heldin the first storage capacitor 306 and the second storage capacitor 307in the first period T1. In this specification, this operation is calledinitialization.

Next, operation of the pixel circuit in the second period T2 will bedescribed with reference to FIG. 6. FIG. 6 is a diagram showing aconnection state of the pixel circuit in the second period T2. In thesecond period T2, the second scan line 310 and the third scan line 311are at L level, and the third transistor 303 and the fourth transistor304 are on. Meanwhile, the first scan line 309 and the fourth scan line312 are at H level, and the second transistor 302 and the fifthtransistor 305 are off. Accordingly, the first transistor 301 has adiode-connection state, so that a current flows into the first storagecapacitor 306 and the second storage capacitor 307 which are connectedin parallel, and thus the first storage capacitor 306 and the secondstorage capacitor 307 are charged. The charging of the first storagecapacitor 306 and the second storage capacitor 307 continues until avoltage held in the first storage capacitor 306 and the second storagecapacitor 307 reaches VDD −|V_(th)|−V_(CL) (a potential obtained bysubtracting the threshold voltage |V_(th)| of the first transistor 301and the potential V_(CL) of the capacitive line 315 from the powersupply potential VDD). When the voltage held in the first storagecapacitor 306 and the second storage capacitor 307 reachesVDD−|V_(th)|−V_(CL), the first transistor 301 is turned off, and acurrent stops flowing into the first storage capacitor 306 and thesecond storage capacitor 307.

Through the aforementioned operation, a voltage based on the thresholdvoltage |V_(th)| of the first transistor 301 is held in the firststorage capacitor 306 and the second storage capacitor 307 in the secondperiod T2.

Note that in order to hold a voltage based on the threshold voltage|V_(th)| of the first transistor 301 in the first storage capacitor 306and the second storage capacitor 307 in the second period T2, the secondterminal of the first transistor 301 is required to be set at apotential lower than VDD−|V_(th)| (the difference between the powersupply potential VDD and the threshold voltage |V_(th)| of the firsttransistor 301). Accordingly, by flowing a current into thelight-emitting element 316 in the first period T1, the second terminalof the first transistor 301 can be surely set at a potential lower thanVDD−|V_(th)|, and thus the threshold voltage can be surely acquired.

Next, operation of the pixel circuit in the third period T3 will bedescribed with reference to FIG. 7. FIG. 7 is a diagram showing aconnection state of the pixel circuit in the third period T3. In thethird period T3, the first scan line 309 is at L level and the secondtransistor 302 is on. Meanwhile, the second scan line 310 to the fourthscan line 312 are at H level and the third transistor 303 to the fifthtransistor 305 are off. The signal line 308 is applied with a videosignal voltage V_(data). Accordingly, the first storage capacitor 306and the second storage capacitor 307 are connected in series, and thusvoltages are held in the first storage capacitor 306 and the secondstorage capacitor 307 in accordance with their capacitance ratio. Atthis time, given that the voltages held in the first storage capacitor306 and the second storage capacitor 307 are V_(c1)(T3) and V_(c2)(T3)respectively, V_(c1)(T3) and V_(c2)(T3) can be represented by thefollowing formulas (1) and (2) respectively. $\begin{matrix}{{{formula}\quad(1)\text{:}}{{V_{C\quad 1}\left( {T\quad 3} \right)} = {{VDD} - {V_{th}} - {\frac{C_{2}}{C_{1} + C_{2}}V_{data}} - {\frac{C_{1}}{C_{1} + C_{2}}V_{CL}}}}} & \quad\end{matrix}$ $\begin{matrix}{{{formula}\quad(2)\text{:}}{{V_{C\quad 2}\left( {T\quad 3} \right)} = {{VDD} - {V_{th}} + {\frac{C_{1}}{C_{1} + C_{2}}V_{data}} - {\frac{{2C_{1}} + C_{2}}{C_{1} + C_{2}}V_{CL}}}}} & \quad\end{matrix}$

Note that C₁ is a capacitance value of the first storage capacitor 306,while C₂ is a capacitance value of the second storage capacitor 307.

Through the aforementioned operation, a voltage based on the videosignal voltage V_(data) and the threshold voltage |V_(th)| of the firsttransistor 301 is held in the first storage capacitor 306 and the secondstorage capacitor 307 in the third period T3.

Next, operation of the pixel circuit in the fourth period T4 will bedescribed with reference to FIG. 8. FIG. 8 is a diagram showing aconnection state of the pixel circuit in the fourth period T4. In thefourth period T4, the fourth scan line 312 is at L level and the fifthtransistor 305 is on. Meanwhile, the first scan line 309 to the thirdscan line 311 are at H level and the second transistor 302 to the fourthtransistor 304 are off. Accordingly, the gate terminal of the firsttransistor 301 is applied with V_(C2)(T3)+V_(CL) (a sum of the voltageV_(C2)(T3) held in the second storage capacitor 307 and the potentialV_(CL) of the capacitive line 315). Thus, given that the gate-sourcevoltage of the first transistor 301 in the fourth period T4 isV_(gs)(T4), V_(gs)(T4) can be represented by the following formula (3).$\begin{matrix}{{{formula}\quad(3)\text{:}}\begin{matrix}{{{V_{gs}\left( {T\quad 4} \right)}} = {{VDD} - {V_{C\quad 2}\left( {T\quad 3} \right)} - V_{CL}}} \\{= {{V_{th}} - {\frac{C_{1}}{C_{1} + C_{2}}\left( {V_{data} - V_{CL}} \right)}}}\end{matrix}} & \quad\end{matrix}$

Accordingly, a current I_(OLED) which flows between the drain and thesource of the first transistor 301 can be represented by the followingformula (4), and this current flows into the light-emitting element 316through the fifth transistor 305, so that the light-emitting element 316emits light. $\begin{matrix}{{{formula}\quad(4)\text{:}}\begin{matrix}{I_{OLED} = {\frac{\beta}{2}\left( {{{V_{gs}\left( {T\quad 4} \right)}} - {V_{th}}} \right)^{2}}} \\{= {\frac{\beta}{2}\left( \frac{C_{1}}{C_{1} + C_{2}} \right)^{2}\left( {V_{data} - V_{CL}} \right)^{2}}}\end{matrix}} & \quad\end{matrix}$

Note that β is a constant that is determined by the mobility or size ofa transistor, capacitance of an oxide film, and the like.

Through the aforementioned operation, the current I_(OLED) which isdependent on the video signal voltage V_(data) flows into thelight-emitting element 316 in the fourth period T4, so that thelight-emitting element 316 emits light.

Now, functions of the first transistor 301 to the fifth transistor 305are described in detail, in the operation process of the pixel circuitshown in FIG. 3.

The first transistor 301 has a function of supplying a current to thelight-emitting element 316 in the third period T4.

The second transistor 302 functions as a switch for connecting thesecond electrode of the first storage capacitor 306 to the signal line308 in order to input a video signal voltage V_(data) into the pixel inthe third period T3.

The third transistor 303 functions as a switch for connecting the secondelectrode of the first storage capacitor 306 to the capacitive line 315in order to hold a voltage based on the threshold voltage |V_(th)| ofthe first transistor 301 in the first storage capacitor 306 in thesecond period T2.

The fourth transistor 304 functions as a switch for setting the firsttransistor 301 to a diode-connection state in order to hold a voltagebased on the threshold voltage |V_(th)| of the first transistor 301 inthe first storage capacitor 306 and the second storage capacitor 307 inthe second period T2.

The fifth transistor 305 functions as a switch for controlling a currentnot to flow into the light-emitting element 316 in the second period T2and the third period T3, and controlling a current to flow into thelight-emitting element 316 in the first period T1 and the fourth periodT4. That is, the fifth transistor 305 functions as a switch forcontrolling a current supply to the light-emitting element 316.

Through the aforementioned operation process, the current IoUD issupplied to the light-emitting element 316 so that the light-emittingelement 316 can emit light at a luminance corresponding to the currentI_(OLED). At this time, the current IOLED which flows into thelight-emitting element 316 is independent of the threshold voltage|V_(th)| of the first transistor 301 as can be seen in formula (4).Therefore, variations in the threshold voltage of the transistor can becompensated.

Note that the video signal voltage V_(data) is set lower than or equalto the potential V_(CL) of the capacitive line 315 in order to turn onthe first transistor 301 in the fourth period T4.

Note also that the potential V_(CL) of the capacitive line 315 has onlyto be lower than VDD−|V_(th)| (the difference between the power supplyline VDD and the threshold voltage |V_(th)| of the first transistor301). Note also that the voltage V_(CL) of the capacitive line 315 isdesirably as low as possible in order that a voltage based on thethreshold voltage |V_(th)| of the first transistor 301, the video signalvoltage V_(data), and the like can be surely held in the first storagecapacitor 306 and the second storage capacitor 307. However, since thevideo signal voltage V_(data) is set lower than or equal to thepotential V_(CL) of the capacitive line 315, given that the potentialV_(CL) of the capacitive line 315 is set too low, the video signalvoltage V_(data) is required to be further decreased. Accordingly, it ismore desirable to set the potential V_(CL) of the capacitive line 315within an optimal range. For example, the range of the potential V_(CL)of the capacitive line 315 may be set such that−(VDD+VSS)/2≦V_(CL)≦(VDD+VSS)/2.

Although the first transistor 301 in the pixel circuit shown in FIG. 3is a p-channel transistor, the first transistor 301 may be an n-channeltransistor. FIG. 9 shows a pixel configuration in the case where thefirst transistor is an n-channel transistor.

The pixel circuit in FIG. 9 includes a first transistor 901 to a fifthtransistor 905, a first storage capacitor 906, a second storagecapacitor 907, a signal line 908, a first scan line 909 to a fourth scanline 912, a first power supply line 913, a second power supply line 914,a capacitive line 915, and a light-emitting element 916.

Note that in the pixel circuit in FIG. 9, all of the second transistor902 to the fifth transistor 905 are n-channel transistors.

The first transistor 901 herein is used as a transistor for supplying acurrent to the light-emitting element 916, while each of the secondtransistor 902 to the fifth transistor 905 is used as a switch forselecting a connection of wires.

A gate terminal of the first transistor 901 is connected to a secondterminal of the fourth transistor 904, a first electrode of the firststorage capacitor 906, and a first electrode of the second storagecapacitor 907; a first terminal of the first transistor 901 is connectedto the first power supply line 913; and a second terminal of the firsttransistor 901 is connected to a first terminal of the fourth transistor904 and a first terminal of the fifth transistor 905. A gate terminal ofthe second transistor 902 is connected to the first scan line 909; afirst terminal of the second transistor 902 is connected to the signalline 908; and a second terminal of the second transistor 902 isconnected to a first terminal of the third transistor 903 and a secondelectrode of the storage capacitor 906. A gate terminal of the thirdtransistor 903 is connected to the second scan line 910, and a secondterminal of the third transistor 903 is connected to the capacitive line915. A gate terminal of the fourth transistor 904 is connected to thethird scan line 911. A gate terminal of the fifth transistor 905 isconnected to the fourth scan line 912, and a second terminal of thefifth transistor 905 is connected to a second electrode of thelight-emitting element 916. A second electrode of the second storagecapacitor 907 is connected to the capacitive line 915. A first electrodeof the light-emitting element 916 is connected to the second powersupply line 914.

The first power supply line 913 is applied with a power supply potentialVSS, the second power supply line 914 is applied with a power supplypotential VDD, and the capacitive line 915 is applied with a potentialV_(CL). Note that the potential relationship is VDD>VSS and V_(CL)>VSS.

Note that the fourth transistor 904 in FIG. 9 corresponds to the secondtransistor 202 in FIG. 2, and the second storage capacitor 907 in FIG. 9corresponds to the storage capacitor 203 in FIG. 2.

Next, operation of the pixel circuit in this embodiment mode will bedescribed with reference to FIG. 10.

FIG. 10 shows a timing chart of video signal voltages and pulses thatare input to the first scan line 909 to the fourth scan line 912. Sinceall of the first to fifth transistors are n-channel transistors, theinput timing of pulses (H level/L level) into the first scan line 909 tothe fourth scan line 912 is inverted from the one in the case where allof the transistors are p-channel transistors (FIG. 4). In addition, thewhole period is divided into fourth periods including a first period T1to a fourth period T4 in accordance with each operation of the pixelcircuit.

The operation of the pixel circuit in FIG. 9 in the first period T1 tothe fourth period T4 is the same as the operation of the pixel circuitshown in FIG. 3. That is, an initial voltage is held in the firststorage capacitor 906 and the second storage capacitor 907 in the firstperiod T1. That is, initialization is performed. Next, in the secondperiod T2, a voltage based on the threshold voltage |V_(th)| of thefirst transistor 901 is held in the first storage capacitor 906 and thesecond storage capacitor 907. Then, in the third period, a voltage basedon the video signal voltage V_(data) and the threshold voltage |V_(th)|of the first transistor 901 is held in the first storage capacitor 906and the second storage capacitor 907. Finally, in the fourth period T4,a current I_(OLED) which is dependent on the video signal voltageV_(data) flows into the light-emitting element 916, so that thelight-emitting element 916 emits light. Note that the current I_(OLED)which flows into the light-emitting element 916 can be represented byformula (4) like the pixel circuit in FIG. 3.

Note also that in order to hold a voltage based on the threshold voltage|V_(th)| of the first transistor 901 in the first storage capacitor 906and the second storage capacitor 907 in the second period T2, the secondterminal of the first transistor 901 is required to be set at apotential higher than VSS+|V_(th)| (the sum of the power supplypotential VSS and the threshold voltage |V_(th)| of the first transistor901) in advance. Accordingly, the second terminal of the firsttransistor 901 can be surely set at a potential higher than VSS+|V_(th)|by flowing a current into the light-emitting element 916 in the firstperiod T1, and thus the threshold voltage can be surely acquired andcompensated.

Note also that in the operation process of the pixel circuit shown inFIG. 9, functions of the first transistor 901 to the fifth transistor905 are the same as the functions of the first transistor 301 to thefifth transistor 305 in the pixel circuit shown in FIG. 3.

Through the aforementioned operation process, the current I_(OLED) issupplied to the light-emitting element 916 SO that the light-emittingelement 916 can emit light at a luminance corresponding to the currentI_(OLED). At this time, the current I_(OLED) which flows into thelight-emitting element 916 is independent of the threshold voltage|V_(th)| of the first transistor 901 as can be seen in formula (4).Therefore, variations in the threshold voltage of the transistor can becompensated.

Note that the video signal voltage V_(data) is set higher than or equalto the potential V_(CL) of the capacitive line 915 in order to turn onthe first transistor 901 in the fourth period T4.

Note also that the potential V_(CL) of the capacitive line 915 has onlyto be higher than VSS+|V_(th)| (the sum of the power supply potentialVSS and the threshold voltage |V_(th)| of the first transistor 901).Note also that the voltage V_(CL) of the capacitive line 915 isdesirably as high as possible in order that a voltage based on thethreshold voltage |V_(th)| of the first transistor 901, the video signalvoltage V_(data), and the like can be surely held in the first storagecapacitor 906 and the second storage capacitor 907. However, since thevideo signal voltage V_(data) is set higher than or equal to thepotential V_(CL) of the capacitive line 915, given that the potentialV_(CL) of the capacitive line 315 is set too high, the video signalvoltage V_(data) is required to be further increased. Accordingly, it ismore desirable to set the potential V_(CL) of the capacitive line 915within an optimal range. For example, the range of the potential V_(CL)of the capacitive line 915 may be set such that(VDD+VSS)/2≦V_(CL)≦3×(VDD+VSS)/2.

As described above, the pixel configuration in this embodiment mode cancompensate variations in the threshold voltage of transistors, therebyvariations in luminance of light-emitting elements can be reduced.Therefore, image quality can be improved.

In addition, in the pixel circuit in this embodiment mode, the currentl_(OLED) which flows into the light-emitting element depends on thecapacitance ratio of the first storage capacitor to the second storagecapacitor as represented by formula (4). Therefore, the I_(OLED) isconstant as long as the capacitance ratio is constant. The first storagecapacitor and the second storage capacitor are typically formed throughthe same process. Therefore, even if mask patterns are misaligned in themanufacturing process, errors in capacitance between the first storagecapacitor and the second storage capacitor can be substantially an equalamount. Thus, even when a manufacturing error occurs, the value of[C₁/(C₁+C₂)] can be maintained at a substantially constant value, andaccordingly, I_(OLED) can be maintained at a substantially constantvalue.

When many pixels emit light at the same time, the level of the powersupply potential VDD which is applied to the power supply line variesbetween pixels in different positions, due to effects of a voltage dropat the power supply line to which the power supply potential VDD isapplied. However, in the pixel circuit in this embodiment mode, thecurrent I_(OLED) which flows into the light-emitting element isindependent of the power supply potential VDD as can be seen in formula(4). Therefore, effects of variations in the power supply potential VDDdue to a voltage drop at the power supply line can be eliminated.

Note that in this embodiment mode, each of the first storage capacitorand the second storage capacitor may be formed from either metal or aMOS transistor.

For example, FIG. 11 and FIG. 12 illustrate the case where each of thefirst storage capacitor and the second storage capacitor is formed froma MOS transistor in the pixel circuit shown in FIG. 3.

FIG. 11 shows the case where the first storage capacitor 306 and thesecond storage capacitor 307 are formed from p-channel transistors. Inthe case of forming a storage capacitor from a p-channel transistor, agate terminal of the p-channel transistor is required to be set at apotential lower than first and second terminals thereof in order toinduce a channel region in the p-channel transistor for holding charges.In the case of the pixel circuit shown in FIG. 3, the first electrode ofthe first storage capacitor 306 has a higher potential than the secondelectrode thereof, and also the first electrode of the second storagecapacitor 307 has a higher potential than the second electrodes thereof.Therefore, in order to make the p-channel transistors function asstorage capacitors, first terminals and second terminals of thep-channel transistors are connected as the first electrodes of the firststorage capacitor 306 and the second storage capacitor 307 respectively,while gate terminals of the p-channel transistors are connected as thesecond electrodes of the first storage capacitor 306 and the secondstorage capacitor 307 respectively.

FIG. 12 shows the case where the first storage capacitor 306 and thesecond storage capacitor 307 are formed from n-channel transistors. Inthe case of forming a storage capacitor from an n-channel transistor, agate terminal of the n-channel transistor is required to be set at apotential higher than first and second terminals thereof in order toinduce a channel region in the n-channel transistor for holding charges.Therefore, in order to make the n-channel transistors function asstorage capacitors, gate terminals of the n-channel transistors areconnected as the first electrodes of the first storage capacitor 306 andthe second storage capacitor 307 respectively, while first terminals andsecond terminals of the n-channel transistors are connected as thesecond electrodes of the first storage capacitor 306 and the secondstorage capacitor 307 respectively.

As another example, FIG. 13 and FIG. 14 show the case where the firstand second storage capacitors in the pixel circuit in FIG. 9 are formedfrom MOS transistors.

FIG. 13 shows the case where the first storage capacitor 906 and thesecond storage capacitor 907 are formed from n-channel transistors. Inthe case of the pixel circuit in FIG. 9, the second electrode of thefirst storage capacitor 306 has a higher potential than the firstelectrode thereof, and also the second electrode of the second storagecapacitor 307 has a higher potential than the first electrode thereof.Therefore, in order to make the n-channel transistors function asstorage capacitors, first and second terminals of the n-channeltransistors are connected as the first electrodes of the first storagecapacitor 906 and the second storage capacitor 907 respectively, whilegate terminals of the n-channel transistors are connected as the secondelectrodes of the first storage capacitor 306 and the second storagecapacitor 907 respectively.

FIG. 14 shows the case where the first storage capacitor 906 and thesecond storage capacitor 907 are formed from p-channel transistors. Inorder to make the p-channel transistors function as storage capacitors,gate terminals of the p-channel transistors are connected as the firstelectrodes of the first storage capacitor 906 and the second storagecapacitor 907 respectively, while first and second terminals of thep-channel transistors are connected as the second electrodes of thefirst storage capacitor 906 and the second storage capacitor 907respectively.

Note that although the first and second storage capacitors are formedfrom transistors with the same conductivity type in FIG. 11 to FIG. 14,the invention is not limited to this, and transistors with differentconductivity types may be used as well.

By connecting the first and second storage capacitors between the gateterminal of the first transistor and the capacitive line as in thisembodiment mode, given that each of the first and second storagecapacitors is formed from a MOS transistor, a voltage higher than thethreshold voltage of the MOS transistor is constantly applied between agate and a source of the MOS transistor. Therefore, a channel region canbe constantly induced in the MOS transistor so that it can constantlyfunction as a storage capacitor. Thus, a desired voltage can beaccurately held in the storage capacitors in the operation process ofthe pixel circuit.

In addition, in the pixel configuration of this embodiment mode, whenthe first transistor is formed to have the largest value of W/L (ratioof the channel width W to the channel length L) among the first to fifthtransistors, a current flowing between the drain and the source of thefirst transistor can be further increased. Accordingly, the operation ofacquiring a voltage based on the threshold voltage |V_(th)| of the firsttransistor in the first period T1 can be performed with a largercurrent, which leads to a faster operation. Further, the currentI_(OLED) which flows into the light-emitting element in the fourthperiod T4 can be further increased, which leads to higher luminance.

Note that in this embodiment mode, the timing at which pulses are inputinto the second scan line and the third scan line is the same;therefore, the third transistor and the fourth transistor may becontrolled with either one of the second scan line or the third scanline.

For example, FIG. 15 shows an example where the third transistor 303 andthe fourth transistor 304 in the pixel circuit shown in FIG. 3 arecontrolled with the second scan line 310. Note that in FIG. 15, the gateterminals of the third transistor 303 and the fourth transistor 304 areconnected to the second scan line 310.

In addition, FIG. 16 shows another example where the third transistor903 and the fourth transistor 904 in the pixel circuit shown in FIG. 9are controlled with the second scan line 910. Note that in FIG. 16, thegate terminals of the third transistor 903 and the fourth transistor 904are connected to the second scan line 910.

In this manner, by controlling the third transistor and the fourthtransistor with the same scan line, the number of scan lines can bereduced, thereby the aperture ratio of pixels can be increased.

Note that although this embodiment mode has illustrated examples whereall of the second to fifth transistors are transistors with the sameconductivity type such as either p-channel transistors or n-channeltransistors, the invention is not limited to these. The circuits may beconstructed by using both p-channel transistors and n-channeltransistors.

For example, in FIG. 3, the fourth transistor 304 may be an n-channeltransistor, while the transistors other than the fourth transistor 304may be p-channel transistors. FIG. 17 shows a pixel circuit of thiscase. In addition, FIG. 18 shows a timing chart of video signal voltagesand pulses that are input to the signal line 308 and the first scan line309 to the fourth scan line 312.

In this manner, when an n-channel transistor is used for the fourthtransistor 304, leak current of the fourth transistor 304 can bedecreased than the case of using a p-channel transistor. Therefore,leaks of charges held in the first storage capacitor 306 and the secondstorage capacitor 307 are decreased, which leads to smaller fluctuationsof voltages held in the first storage capacitor 306 and the secondstorage capacitor 307. Accordingly, a constant voltage is continuouslyapplied to the gate terminal of the first transistor 301, in particular,in the light-emitting period (T4). Thus, the light-emitting element 316can be supplied with a constant current. As a result, the light-emittingelement 316 can emit light at a constant luminance, thereby luminanceunevenness can be reduced.

Note that the conductivity types of the second transistor to the fifthtransistor are not limited to the above description.

[Embodiment Mode 2]

Although a capacitive line is separately provided in Embodiment Mode 1,it may be replaced by another wire which is already provided in thepixel. For example, the capacitive line can be omitted by using any oneof the first to fourth scan lines. This embodiment mode describes a casewhere one of the first to fourth scan lines is used as a substitute forthe capacitive line. Note that description will be made by using an ELelement as an exemplary light-emitting element.

For example, FIG. 19 shows an exemplary pixel circuit in the case wherethe capacitive line in FIG. 3 is replaced by a first scan line in thepreceding row. In FIG. 19, a first scan line 1909 of a Pixel (i−1) in an(i−1)-th row is used as a capacitive line of a Pixel (i) in an i-th row,and a second terminal of a third transistor 1923 and a second electrodeof a second storage capacitor 1927 in the Pixel (i) in the i-th row areconnected to the first scan line 1909 of the Pixel (i−1) in the (i−1)-throw.

FIG. 20 shows a timing chart of video signal voltages and pulses thatare input to the signal line 1908, the first scan line 1909 to a fourthscan line 1912 of the Pixel (i−1) in the (i−1)-th row, and a first scanline 1929 to a fourth scan line 1932 of the Pixel (i) in the i-th row.Note that the periods T1 to T4 in FIG. 20 correspond to the operation ofthe Pixel (i) in the i-th row.

When the pixel configuration as shown in FIG. 19 is employed, apotential which is applied to the first scan line 1909 of the Pixel(i−1) in the (i−1)-th row is applied to the second terminal of the thirdtransistor 1923 and the second electrode of the second storage capacitor1927 in the Pixel (i) in the i-th row. Thus, in the second period T2, anL-level potential is applied to the second terminal of the thirdtransistor 1923 and the second electrode of the second storage capacitor1927 in the Pixel (i) in the i-th row, while in the first period T1, thethird period T3, and the fourth period T4, an H-level potential isapplied thereto. Accordingly, a constant potential can be applied to thesecond terminal of the third transistor 1923 and the second electrode ofthe second storage capacitor 1927 in the Pixel (i) in the i-th row ineach period, and thus the operation of the pixel circuit as described inEmbodiment Mode 1 can be performed. Note that the Pixel (i−1) in the(i−1)-th row of FIG. 19 includes a first transistor 1901 to a fifthtransistor 1905, a first storage capacitor 1906, a second storagecapacitor 1907, the first scan line 1909 to the fourth scan line 1912, afirst power supply line 1913, a second power supply line 1914, and alight-emitting element 1916. And, the Pixel (i) in the i-th row of FIG.19 includes a first transistor 1921 to a fifth transistor 1925, a firststorage capacitor 1926, the second storage capacitor 1927, the firstpower supply line 1913, the second power supply line 1914, the firstscan line 1929 to the fourth scan line 1932, and a light-emittingelement 1936.

As another example, FIG. 21 shows the case where the capacitive line inFIG. 9 is replaced by the first scan line in the preceding row. In FIG.21, a first scan line 2109 of a Pixel (i−1) in an (i−1)-th row is usedas a capacitive line of a Pixel (i) in an i-th row, and a secondterminal of a third transistor 2123 and a second electrode of a secondstorage capacitor 2127 of a Pixel (i) in an i-th row are connected tothe first scan line 2109 of the Pixel (i−1) in the (i−1)-th row.

FIG. 22 shows a timing chart of video signal voltages and pulses thatare input to the signal line 2108, the first scan line 2109 to a fourthscan line 2112 of the Pixel (i−1) in the (i−1)-th row, and a first scanline 2129 to a fourth scan line 2132 of the Pixel (i) in the i-th row.Note that the periods T1 to T4 in FIG. 22 correspond to the operation ofthe Pixel (i) in the i-th row.

When the pixel configuration as shown in FIG. 21 is employed, apotential which is applied to the first scan line 2109 of the Pixel(i−1) in the (i−1)-th row is applied to the second terminal of the thirdtransistor 2123 and the second electrode of the second storage capacitor2127 in the Pixel (i) in the i-th row. Thus, in the second period T2, anH-level potential is applied to the second terminal of the thirdtransistor 2123 and the second electrode of the second storage capacitor2127 in the Pixel (i) in the i-th row, while in the first period T1, thethird period T3, and the fourth period T4, an L-level potential isapplied thereto. Accordingly, a constant potential can be applied to thesecond terminal of the third transistor 2123 and the second electrode ofthe second storage capacitor 2127 in the Pixel (i) in the i-th row ineach period, and thus the operation of the pixel circuit as described inEmbodiment Mode 1 can be performed. Note that the Pixel (i−1) in the(i−1)-th row of FIG. 21 includes a first transistor 2101 to a fifthtransistor 2105, a first storage capacitor 2106, a second storagecapacitor 2107, the first scan line 2109 to the fourth scan line 2112, afirst power supply line 2113, a second power supply line 2114, and alight-emitting element 2116. And, the Pixel (i) in the i-th row of FIG.21 includes a first transistor 2121 to a fifth transistor 2125, a firststorage capacitor 2126, the second storage capacitor 2127, the firstpower supply line 2113, the second power supply line 2114, the firstscan line 2129 to the fourth scan line 2132, and a light-emittingelement 2136.

In this manner, by using the first scan line as a substitute for thecapacitive line, no additional capacitive line is required. Therefore,the number of wires can be reduced and thus the aperture ratio of pixelscan be increased. Further, since there is no need to generate a voltageto be applied to a capacitive line, a circuit for generating the voltagecan be omitted, which leads to a reduction in power consumption.

Note that a scan line used as a substitute for the capacitive line isnot limited to the first scan line. Any one of the second to fourth scanlines in the preceding row may be used as the substitute for thecapacitive line. Alternatively, any one of the second to fourth scanlines in the subsequent row may be used as the substitute for thecapacitive line. Note also that a constant potential is applied to thefirst scan line in the preceding row and the fourth scan line in thepreceding row during the light-emitting period (T4) of the pixel in thepresent row; therefore, a current flowing into the light-emittingelement during the light-emitting period of the pixel in the present rowcan be maintained at a constant value, and thus the light-emittingelement can emit light at a constant luminance. Thus, it is desirable touse either the first scan line in the preceding row or the fourth scanline in the preceding row as a substitute for the capacitive line.

Note that this embodiment mode can be freely combined with EmbodimentMode 1.

[Embodiment Mode 3]

Although a current is supplied to a light-emitting element forperforming initialization in Embodiment Mode 1 and Embodiment Mode 2,initialization can be performed by adding an initialization transistorin the pixel circuit which is shown heretofore. In this embodiment mode,description will be made of a method of initialization using aninitialization transistor. Note that description will be made by usingan EL element as an exemplary light-emitting element.

In order to perform initialization, a second terminal of a firsttransistor is required to be set at an initialization potential. At thistime, by connecting the second terminal of the first transistor to anelectrode of another element or another wire through an initializationtransistor, and then turning on the initialization transistor, thesecond terminal of the first transistor can be set at a potential of theelectrode of the another element or the another wire.

That is, the initialization transistor functions as a switch forconnecting the second terminal of the first transistor to an electrodeof another element or another wire in order to set the second terminalof the first transistor at an initialization potential.

For example, in the case of the pixel circuit shown in FIG. 3, in orderto hold a voltage based on the threshold voltage |V_(th)| of the firsttransistor 301 in the first storage capacitor 306 and the second storagecapacitor 307, the second terminal of the first transistor 301 isrequired to be set at a potential lower than VDD−|V_(th)| (thedifference between the power supply potential VDD and the thresholdvoltage |V_(th)| of the first transistor 301). Thus, the second terminalof the first transistor 301 can be set at an initialization potentialthat is lower than VDD−|V_(th)| by connecting the second terminal of thefirst transistor 301 to an electrode of another element or another wirethrough an initialization transistor in the first period T1.

FIG. 23 shows an example of providing an initialization transistor inthe pixel circuit shown in FIG. 3. In FIG. 23, a sixth transistor 2317that is an initialization transistor and a fifth scan line 2318 areadditionally provided in the pixel circuit shown in FIG. 3. Note that agate terminal of the sixth transistor 2317 is connected to the fifthscan line 2318; a first terminal of the sixth transistor 2317 isconnected to the second terminal of the first transistor 301, the firstterminal of the fourth transistor 304, and the first terminal of thefifth transistor 305; and a second terminal of the sixth transistor 2317is connected to the second terminal of the second transistor 302, thefirst terminal of the third transistor 303, and the second electrode ofthe first storage capacitor 306.

The operation of the pixel circuit shown in FIG. 23 will be describedwith reference to FIG. 24 and FIG. 25.

FIG. 24 shows a timing chart of video signal voltages and pulses thatare input to the signal line 308 and the first scan line 309 to thefifth scan line 2318. In addition, the whole period is divided intofourth periods including a first period T1 to a fourth period T4 inaccordance with each operation of the pixel circuit.

The operation of the pixel circuit in the first period T1 will bedescribed with reference to FIG. 25. In the first period T1, the secondscan line 310, the third scan line 311, and the fifth scan line 2318 areat L level, and the third transistor 303, the fourth transistor 304, andthe sixth transistor 2317 are on. Meanwhile, the first scan line 309 andthe fourth scan line 312 are at H level, and the second transistor 302and the fifth transistor 305 are off. Accordingly, the second terminalof the first transistor 301 is connected to the capacitive line 315, andthus the second terminal of the first transistor 301, the firstelectrode of the first storage capacitor 306, and the first electrode ofthe second storage capacitor 307 have the same potential as thepotential V_(CL) of he capacitive line 315.

Through the aforementioned operation, the second terminal of the firsttransistor 301, the first electrode of the first storage capacitor 306,and the first electrode of the second storage capacitor 307 are set atthe potential V_(CL) of the capacitive line 315 as an initializationpotential in the first period T1.

In this manner, by setting the second terminal of the first transistor301 at the potential V_(CL) of the capacitive line 315 which is lowerthan VDD−|V_(th)| in the first period T1, the second terminal of thefirst transistor 301 can be surely set at a potential lower thanVDD−|V_(th)|, thereby the threshold voltage can be surely acquired.

Note that in the second period T2 to the fourth period T4, the fifthscan line 2318 is set at H level to turn off the sixth transistor 2317.Then, the same operation as that of the pixel circuit shown in FIG. 3 isperformed.

Note also that the sixth transistor 2317 has only to be connected sothat the second terminal of the first transistor 301 is set at apotential lower than VDD−|V_(th)| in the first period T1 for performinginitialization.

For example, as shown in FIG. 26, the first terminal of the sixthtransistor 2317 may be connected to the gate terminal of the firsttransistor 301, the second terminal of the fourth transistor 304, thefirst electrode of the first storage capacitor 306, and the firstelectrode of the second storage capacitor 307. Alternatively, the secondterminal of the sixth transistor 2317 may be connected to the capacitiveline 315 as shown in FIG. 27. As a further alternative, the secondterminal of the sixth transistor 2317 may be connected to the secondscan line 310 as shown in FIG. 65, or connected to the third scan line311 as shown in FIG. 66.

In addition, an initialization line (initialization power supply line)may be provided in order to set the second terminal of the firsttransistor 301 at an initialization potential.

For example, FIG. 28 shows an example where an initialization transistorand an initialization line are provided in the pixel circuit shown inFIG. 3. In FIG. 28, the sixth transistor 2317 which is an initializationtransistor, the fifth scan line 2318, and an initialization line 2819are additionally provided in the pixel circuit shown in FIG. 3. Notethat the gate terminal of the sixth transistor 2317 is connected to thefifth scan line 2318; the first terminal of the sixth transistor 2317 isconnected to the second terminal of the first transistor 301, the firstterminal of the fourth transistor 304, and the first terminal of thefifth transistor 305; and the second terminal of the sixth transistor2317 is connected to the initialization line 2819.

The initialization line 2819 is applied with an initialization potentialV_(ini). Note that the potential relationship is V_(ini)<VDD−|V_(th)|.

FIG. 29 shows the operation of the pixel circuit shown in FIG. 28 in thefirst period T1. In the first period T1, the first transistor 301 has adiode-connection state, and a current flows through the initializationline 2819. As a result, the second terminal of the first transistor 301,the first electrode of the first storage capacitor 306, and the firstelectrode of the second storage capacitor 307 have the same potential asthe initialization line 2819, and thus V_(ini)−V_(CL) (the differencebetween the initialization potential V_(ini) and the potential V_(CL) ofthe capacitive line 315) is held in the first storage capacitor 306 andthe second storage capacitor 307.

Through the aforementioned operation, a voltage corresponding to thedifference between the potential of the initialization line 2819 and thepotential of the capacitive line 315 is held as an initializationvoltage in the first storage capacitor 306 and the second storagecapacitor 307.

In this manner, by providing the initialization line 2819 to set thesecond terminal of the first transistor 301 at V_(ini)−V_(CL) (thedifference between the initialization potential V_(ini) and thepotential V_(CL) of the capacitive line 315) which is lower than VDD−|V_(th)|, the second terminal of the first transistor 301 can be surelyset at a potential lower than VDD−|V_(th)|, and thus the thresholdvoltage can be surely acquired.

Note that the sixth transistor 2317 has only to be connected so that thesecond terminal of the first transistor 301 is set at the initializationpotential V_(ini). For example, as shown in FIG. 30, the first terminalof the sixth transistor 2317 may be connected to the gate terminal ofthe first transistor 301, the second terminal of the fourth transistor304, the first electrode of the first storage capacitor 306, and thefirst electrode of the second storage capacitor 307.

In this manner, by performing initialization by additionally providingan initialization transistor and an initialization line, the thresholdvoltage of the first transistor can be acquired and compensated withmore accuracy.

In addition, unlike the method of initialization described in EmbodimentMode 1 where a current flows into a light-emitting element whileperforming initialization, so that the light-emitting element emitslight in the first period T1, the method described in this embodimentmode can suppress the light emission of a light-emitting element in theperiods other than the light-emitting period since no current flows intothe light-emitting element while performing initialization and thus thelight-emitting element does not emit light in the first period T1.

Note that although the sixth transistor as an initialization transistoris a p-channel transistor in this embodiment mode, the invention is notlimited to this, and thus the sixth transistor may be an n-channeltransistor.

Note also that although this embodiment mode has illustrated an examplewhere the first transistor is a p-channel transistor (FIG. 3), thisembodiment mode can be similarly applied to the case where the firsttransistor is an n-channel transistor as in the pixel circuit shown inFIG. 9.

In the case of additionally providing an initialization transistor inthe pixel circuit shown in FIG. 9, the initialization transistor isconnected so that the second terminal of the first transistor is set ata potential higher than VSS+|V_(th)| (the sum of the power supplypotential VSS and the threshold voltage |V_(th)| of the firsttransistor). Similarly, in the case of additionally providing aninitialization line, the potential V_(ini) applied to the initializationline is set at a potential higher than VSS+|V_(th)| (the sum of thepower supply potential VSS and the threshold voltage |V_(th)| of thefirst transistor).

Although the initialization line is separately provided in thisembodiment mode, another wire which is already provided in the pixel maybe used as the initialization line. For example, any one of the firstscan line to the fifth scan line may be used as the initialization line.Note that a wire that is used as the initialization line is not limitedto one of the wires provided in the pixel of the present row, and thusit may be any wire provided in a pixel of another row. Accordingly,there is no need to additionally provide an initialization line, therebythe number of wires can be reduced and the aperture ratio of pixels canbe increased.

This embodiment mode can be freely combined with Embodiment Mode 1 orEmbodiment Mode 2.

[Embodiment Mode 4]

Although the potential of the second power supply line is a fixedpotential in Embodiment Mode 1 to Embodiment Mode 3, the potential ofthe second power supply line may be changed in accordance with the firstperiod to the fourth period. In this embodiment mode, description willbe made of a case where the potential of the second power supply line ischanged in accordance with the first period to the fourth period. Notethat description will be made by using an EL element as an exemplarylight-emitting element.

For example, although the fifth transistor 305 in the pixel circuitshown in FIG. 3 is turned off to flow no current into the light-emittingelement 316 in the second period T2 and the third period T3, a currentsupply to the light-emitting element 316 can be stopped by, for example,removing the fifth transistor 305 and directly connecting the secondterminal of the first transistor 301 to the first electrode of thelight-emitting element 316, so that the potential of the second powersupply line 314 in the second period T2 and the third period T3 can behigher than the potential of the first electrode of the light-emittingelement 316. This is because a reverse bias is applied to thelight-emitting element 316 by setting the potential of the second powersupply line 314 to be higher than the potential of the first electrodeof the light-emitting element 316.

In FIG. 31, the second terminal of the first transistor 301 is connectedto the first electrode of the light-emitting element 316 unlike thepixel circuit shown in FIG. 3. In addition, FIG. 32 shows a timing chartof video signal voltages and pulses that are input to the signal line308, the first scan line 309 to the third scan line 311, and the secondpower supply line 314. Note that the timing at which pulses are input tothe first scan line 309 to the third scan line 311 is the same as thatof the pixel circuit shown in FIG. 3.

Note that in the second period T2 and the third period T3, a reversebias is applied to the light-emitting element 316 by setting thepotential of the second power supply line 314 to be higher than or equalto VDD−|V_(th)| (the difference between the power supply potential VDDand the threshold voltage |V_(th)| of the first transistor 301), so thata current supply to the light-emitting element 316 can be suspended inthe second period T2 and the third period T3.

Note also that as a method of initialization, the method ofinitialization using an initialization transistor described inEmbodiment Mode 3 may be used. In that case, initialization can beperformed without supplying a current to the light-emitting element 316by setting the potential of the second power supply line 314 to behigher than the potential of the second terminal of the first transistor301 in the first period T1.

In addition, as another method of initialization, the method ofinitialization using an initialization transistor and an initializationline described in Embodiment Mode 3 may be used. In that case,initialization can be performed without supplying a current to thelight-emitting element 316 by setting the potential of the second powersupply line 314 to be higher than or equal to the initializationpotential V_(ini) in the first period T1.

FIG. 33 and FIG. 34 show examples where the potential of the secondpower supply line is changed in the pixel circuit shown in FIG. 9.

In FIG. 33, the second terminal of the first transistor 901 is connectedto the second electrode of the light-emitting element 916 in the pixelcircuit shown in FIG. 9. In addition, FIG. 34 shows a timing chart ofvideo signal voltages and pulses that are input to the signal line 908,the first scan line 909 to the third scan line 911, and the second powersupply line 914. Note that the timing at which pulses are input to thefirst scan line 909 to the third scan line 911 is the same as that ofthe pixel circuit shown in FIG. 9.

Note that in the second period T2 and the third period T3, a reversebias is applied to the light-emitting element 916 by setting thepotential of the second power supply line 914 to be lower than thesecond electrode of the light-emitting element 916, so that a currentsupply to the light-emitting element 916 can be suspended in the secondperiod T2 and the third period T3.

Note also that the aforementioned operation can be performed by settingthe potential of the second power supply line 914 to be lower than orequal to VSS+|V_(th)| (the sum of the power supply potential VSS and thethreshold voltage |V_(th)| of the first transistor 901) in the secondperiod T2 and the third period T3.

Note also that as a method of initialization, the method ofinitialization using an initialization transistor described inEmbodiment Mode 3 may be used. In that case, initialization can beperformed without supplying a current to the light-emitting element 916by setting the potential of the second power supply line 914 to be lowerthan the potential of the second terminal of the first transistor 901 inthe first period T1.

In addition, as another method of initialization, the method ofinitialization using an initialization transistor and an initializationline described in Embodiment Mode 3 may be used. In that case,initialization can be performed without supplying a current to thelight-emitting element 916 by setting the potential of the second powersupply line 914 to be lower than or equal to the initializationpotential V_(ini) in the first period T1.

In this manner, by changing the potential of the second power supplyline in each period, a current supply to the light-emitting element canbe suspended in the periods other than the light-emitting period (T4);therefore, light emission of the light-emitting element in the periodsother than the light-emitting element can be suppressed. Further, sincethere is no need to provide a fifth transistor and a fourth scan line,the aperture ratio of pixels can be increased and the number of scanline driver circuits can be reduced, thereby power consumption can bereduced.

This embodiment mode can be freely combined with any of Embodiment Modes1 to 3.

[Embodiment Mode 5]

Although the second terminal of the third transistor and the secondelectrode of the second storage capacitor are connected to a commoncapacitive line in Embodiment Mode 1 to Embodiment Mode 4, they may beconnected to different wires. In this embodiment mode, description willbe made of a case where a reference line is additionally provided sothat the second electrode of the second storage capacitor is connectedto the capacitive line while the second terminal of the third transistoris connected to the reference line. Note that description will be madeby using an EL element as an exemplary light-emitting element.

For example, FIG. 35 shows an example of the pixel circuit shown in FIG.3, where the second electrode of the second storage capacitor isconnected to the capacitive line, while the second terminal of the thirdtransistor is connected to the reference line. In FIG. 35, a referenceline 3517 is additionally provided in the pixel circuit shown in FIG. 3.Then, the second electrode of the second storage capacitor 307 isconnected to the capacitive line 315, and the second terminal of thethird transistor 303 is connected to the reference line 3517.

In addition, the reference line 3517 is applied with a referencepotential V_(ref).

The operation process of the pixel circuit shown in FIG. 35 is almostthe same as the operation process of the pixel circuit shown in FIG. 3.What is different from the operation process of the pixel circuit shownin FIG. 3 is the level of a voltage held in the first storage capacitor306 and the second storage capacitor 307, and the amount of currentI_(OLED) which flows into the light-emitting element 316.

First, initialization is performed in the first period T1.

Next, in the second period T2, a voltage based on the threshold voltage|V_(th)| of the first transistor 301 is held in the first storagecapacitor 306 and the second storage capacitor 307. At this time, thefirst storage capacitor 306 holds VDD−|V_(th)|−V_(ref) (a potentialobtained by subtracting the threshold voltage |V_(th)| of the firsttransistor 301 and the reference potential V_(ref) from the power supplypotential VDD). Meanwhile, the second storage capacitor 307 holdsVDD−|V_(th)|−V_(CL) (a potential obtained by subtracting the thresholdvoltage |V_(th)| of the first transistor 301 and the potential V_(CL) ofthe capacitive line 315 from the power supply potential VDD).

Next, in the third period T3, a voltage based on the video signalvoltage V_(data) and the threshold voltage |V_(th)| of the firsttransistor 301 is held in the first storage capacitor 306 and the secondstorage capacitor 307. At this time, given that the voltages held in thefirst storage capacitor 306 and the second storage capacitor 307 areV_(C1)(T3) and V_(C2)(T3) respectively, V_(C1)(T3) and V_(C2)(T3) can berepresented by the following formulas (5) and (6) respectively.$\begin{matrix}{{{formula}\quad(5)\text{:}}{{V_{C\quad 1}\left( {T\quad 3} \right)} = {{VDD} - {V_{th}} - {\frac{C_{2}}{C_{1} + C_{2}}V_{data}} - {\frac{C_{1}}{C_{1} + C_{2}}V_{ref}}}}} & \quad\end{matrix}$ $\begin{matrix}{{{formula}\quad(6)\text{:}}{{V_{C\quad 2}\left( {T\quad 3} \right)} = {{VDD} - {V_{th}} + {\frac{C_{1}}{C_{1} + C_{2}}\left( {V_{data} - V_{ref}} \right)} - V_{CL}}}} & \quad\end{matrix}$

Next, in the fourth period T4, the current I_(OLED) which is dependenton the video signal voltage V_(data) flows into the light-emittingelement 316, so that the light-emitting element 316 emits light. At thistime, given that the gate-source voltage of the first transistor 301 isV_(gs)(T4), V_(gs)(T4) can be represented by the following formula (7).Thus, a current I_(OLED) which flows into the light-emitting element 316can be represented by the following formula (8), $\begin{matrix}{{{formula}\quad(7)\text{:}}\begin{matrix}{{{V_{gs}\left( {T\quad 4} \right)}} = {{VDD} - {V_{C\quad 2}\left( {T\quad 3} \right)} - V_{CL}}} \\{= {{V_{th}} - {\frac{C_{1}}{C_{1} + C_{2}}\left( {V_{data} - V_{ref}} \right)}}}\end{matrix}} & \quad\end{matrix}$ $\begin{matrix}{{{formula}\quad(8)\text{:}}\begin{matrix}{I_{OLED} = {\frac{\beta}{2}\left( {{{V_{gs}\left( {T\quad 4} \right)}} - {V_{{th}}}} \right)^{2}}} \\{= {\frac{\beta}{2}\left( \frac{C_{1}}{C_{1} + C_{2}} \right)^{2}\left( {V_{data} - V_{ref}} \right)^{2}}}\end{matrix}} & \quad\end{matrix}$

Note that in order to turn on the first transistor 301 in the fourthperiod T4, the video signal voltage V_(data) is set lower than or equalto the reference potential V_(ref).

In addition, as another example, FIG. 36 shows an example of the pixelcircuit shown in FIG. 9, where the second electrode of the secondstorage capacitor is connected to the capacitive line, while the secondterminal of the third transistor is connected to the reference line. InFIG. 36, a reference line 3617 is additionally provided in the pixelcircuit shown in FIG. 9. Then, the second electrode of the secondstorage capacitor 907 is connected to the capacitive line 915 and thesecond terminal of the third transistor 903 is connected to thereference line 3617.

In addition, the reference line 3617 is applied with a referencepotential V_(ref).

The operation process of the pixel circuit shown in FIG. 36 is almostthe same as the operation process of the pixel circuit shown in FIG. 9.What is different from the operation process of the pixel circuit shownin FIG. 9 is the level of a voltage held in the first storage capacitor906 and the second storage capacitor 907, and the amount of currentI_(OLED) which flows into the light-emitting element 916 in thelight-emitting period T4. The amount of current I_(OLED) which flowsinto the light-emitting element 916 in the light-emitting period T4 canbe represented by formula (8) similarly to the pixel circuit shown inFIG. 35.

Next, in the fourth period T4, the video signal voltage V_(data) is sethigher than or equal to the reference potential V_(ref) in order to turnon the first transistor 901.

In this manner, in the pixel circuits shown in FIG. 35 and FIG. 36, thecurrent I_(OLED) which flows into the light-emitting element depends onthe difference between the video signal voltage V_(data) and thereference potential V_(ref) as can be seen in formula (8).

Note that in the pixel circuits shown in FIG. 35 and 36, the potentialrange of the reference potential V_(ref) is not particularly limited.

In this manner, by separately providing a capacitive line and areference line, potentials of the capacitive line and the reference linecan be separately controlled. In addition, although the potential rangeof the video signal voltage V_(data) depends on the potential V_(CL) ofthe capacitive line in the pixel configuration shown in Embodiment Mode1 to Embodiment Mode 4, the potential range of the video signal voltageV_(data) depends on the reference potential V_(ref) in the pixelconfiguration of this embodiment mode. Therefore, the potential of thevideo signal voltage V_(data) can be set within the optimal range byfixing the potential V_(CL) of the capacitive line at an appropriatelevel and setting the reference potential V_(ref) within an optimalrange.

Note that although a reference line is separately provided in thisembodiment mode, the reference line may be replaced by another wirewhich is already provided in the pixel. For example, any one of thefirst to fifth scan lines may be used as the reference line. Note alsothat a wire that is used as the reference line is not limited to one ofthe wires provided in the pixel of the present row, and thus it may beany wire provided in a pixel of another row. Accordingly, there is noneed to additionally provide an initialization line, thereby the numberof wires can be reduced and the aperture ratio of pixels can beincreased.

This embodiment mode can be freely combined with any of Embodiment Modes1 to 4.

[Embodiment Mode 6]

In this embodiment mode, a pixel layout of the display device of theinvention will be described. For example, FIG. 37 shows a layout of thepixel circuit shown in FIG. 3. Note that common portions to FIG. 37 andFIG. 3 are denoted by common reference numerals. Note also that thelayout is not limited to FIG. 37.

The pixel circuit shown in FIG. 3 includes the first transistor 301 tothe fifth transistor 305, the first storage capacitor 306, the secondstorage capacitor 307, the signal line 308, the first scan line 309 tothe fourth scan line 312, the first power supply line 313, the secondpower supply line 314, the capacitive line 315, and the light-emittingelement 316.

The first scan line 319 to the forth scan line 312 are formed from afirst wire, while the signal line 308, the first power supply line 313,the second power supply line 314, and the capacitive line 315 are formedfrom a second wire.

In the case of a top-gate structure, films are stacked in order from asubstrate, a semiconductor layer, a gate insulating film, a first wire,an interlayer insulating film, and a second wire. On the other hand, inthe case of a bottom-gate structure, films are stacked in order from asubstrate, a first wire, a gate insulating film, a semiconductor layer,an interlayer insulating film, and a second wire.

Note that in the pixel configuration of this embodiment mode, when thefirst transistor 301 is formed to have the largest value of W/L (ratioof the channel width W to the channel length L) among the firsttransistor 301 to the fifth transistor 305, a current flowing betweenthe drain and the source of the first transistor 301 can be furtherincreased. Accordingly, the operation of acquiring a voltage based onthe video signal voltage V_(data) and the threshold voltage |V_(th)| ofthe first transistor 301 can be performed with a larger current in thethird period T3, which leads to a faster operation. Further, the currentI_(OLED) which flows into the light-emitting element in the fourthperiod T4 can be further increased, which leads to higher luminance. Inorder to obtain the first transistor 301 having the largest value of W/Lamong all the transistors, the first transistor 301 is formed to havethe largest channel width W among the first transistor 301 to the fifthtransistor 305 in FIG. 37.

Note also that although this embodiment mode has illustrated the firsttransistor 301 to the fifth transistor 305 having a single-gatestructure, the invention is not limited to this. The structure of thefirst transistor 301 to the fifth transistor 305 may be various modes.For example, a multi-gate structure having two or more gate electrodesmay be employed. When a multi-gate structure is employed, a structurewhere channel regions are connected in series is provided; therefore, astructure where a plurality of transistors are connected in series isprovided. By employing a multi-gate structure, off-current can bereduced as well as the withstand voltage can be increased to improve thereliability of the transistor, and even if a drain-source voltagefluctuates when the transistor operates in the saturation region, flatcharacteristics can be provided without causing fluctuations of adrain-source current very much. In addition, a structure where gateelectrodes are formed above and below a channel may be employed. Byusing a structure where gate electrodes are formed above and below achannel, the channel region is enlarged to increase the amount ofcurrent flowing therethrough, and a depletion layer can be easily formedto improve the S value. When gate electrodes are formed above and belowa channel, a structure where a plurality of transistors are connected inparallel is provided.

In addition, any of the following structures may be employed: astructure where a gate electrode is formed above a channel; a structurewhere a gate electrode is formed below a channel; a staggered structure;an inversely staggered structure; and a structure where a channel regionis divided into a plurality of regions, and the divided regions areconnected in parallel or in series. In addition, a channel (or a part ofit) may overlap with a source electrode or a drain electrode. By forminga structure where a channel (or a part of it) overlaps with a sourceelectrode or a drain electrode, electric charges can be prevented fromgathering locally in a part of the channel, which would otherwise causean unstable operation. In addition, an LDD (Lightly Doped Drain) regionmay be provided. By providing an LDD region, off-current can be reducedas well as the withstand voltage can be increased to improve thereliability of the transistor, and even if a drain-source voltagefluctuates when the transistor operates in the saturation region, flatcharacteristics can be provided without causing fluctuations of adrain-source current very much.

Note that wires and electrodes are formed by using one or more elementsselected from among aluminum (Al), tantalum (Ta), titanium (Ti),molybdenum (Mo), tungsten (W), neodymium (Nd), chromium (Cr), nickel(Ni), platinum (Pt), gold (Au), silver (Ag), copper (Cu), magnesium(Mg), scandium (Sc), cobalt (Co), zinc (Zn), niobium (Nb), silicon (Si),phosphorus (P), boron (B), arsenic (As), gallium (Ga), indium (In), tin(Sn), and oxygen (O); a compound or an alloy containing one or more ofsuch elements (e.g., indium tin oxide (ITO), indium zinc oxide (IZO),indium tin oxide doped with silicon oxide (ITSO), zinc oxide (ZnO),aluminum neodymium (Al—Nd), magnesium silver (Mg—Ag), or the like); asubstance obtained by combining such compounds; or the like.Alternatively, a compound of silicon and the aforementioned material(silicide) (e.g., aluminum silicon, molybdenum silicon, nickel silicide,or the like) or a compound of nitride and the aforementioned material(e.g., titanium nitride, tantalum nitride, molybdenum nitride, or thelike) can be used.

Note also that silicon (Si) may contain n-type impurities (phosphorus orthe like) or p-type impurities (boron or the like) in large quantities.When silicon contains such impurities, conductivity is improved so thatthe silicon behaves in a similar manner to a normal conductor;therefore, it can be easily utilized as a wire or an electrode. Siliconmay have any of a single crystalline state, a polycrystalline state(polysilicon), or an amorphous state (amorphous silicon). By usingsingle crystalline silicon or polycrystalline silicon, resistance can bedecreased. On the other hand, by using amorphous silicon, wires orelectrodes can be manufactured through a simple process. Note that sincealuminum and silver have high conductivity, signal delay can bedecreased by using them. Further, since aluminum and silver can beeasily etched, they can be easily patterned to enable microfabrication.

Note also that copper has high conductivity; therefore, signal delay canbe decreased by using copper. It is also desirable to use molybdenumsince it can be manufactured without causing problems such as defects ofmaterials even when it contacts silicon or an oxide semiconductor suchas ITO or IZO, while at the same time it can be easily patterned andetched as well as having high heat resistance. It is also desirable touse titanium since it can be manufactured without causing problems suchas defects of materials even when it contacts silicon or an oxidesemiconductor such as ITO or IZO, while at the same time it can beeasily patterned and etched as well as having high heat resistance. Itis also desirable to use tungsten or neodymium since both of them havehigh heat resistance. In particular, when an alloy of neodymium andaluminum is employed, heat resistance is improved so that aluminumhardly has hillocks, which is desirable. Note also that indium tin oxide(ITO), indium zinc oxide (IZO), indium tin oxide doped with siliconoxide (ITSO), zinc oxide (ZnO), and silicon (Si) have light-transmittingproperties; therefore, they can be used for a portion to transmit light,which is desirable. For exarnple, such materials can be used as a pixelelectrode or a common electrode.

Note also that such materials can be formed either in a single layer orin stacked layers to form a wire or an electrode. When a single-layerstructure is employed, a manufacturing process can be simplified toreduce the manufacturing time, thereby cost can be reduced. On the otherhand, when a multi-layer structure is employed, advantages of eachmaterial can be effectively utilized while disadvantages of eachmaterial can be reduced, thereby a wire or an electrode with highperformance can be formed. For example, when a multi-layer structure isformed to contain a low resistance material (e.g., aluminum or thelike), resistance of a wire can be decreased. In addition, when amulti-layer structure is formed to contain a high heat-resistancematerial, such as a stacked structure where a low heat-resistancematerial which has disadvantages is sandwiched between highheat-resistance materials, heat resistance of a wire or an electrode asa whole can be increased.

For example, it is desirable to form a stacked structure where a layercontaining aluminum is sandwiched between layers containing molybdenumor titanium. In addition, in the case where a wire or an electrode has aportion having a direct contact with another wire or electrode which ismade of another material, or the like, they may adversely affect eachother. For example, there is a case where one material is mixed intoanother material, thereby the properties of the materials are changed,which in turn hinders the original object or causes problems duringmanufacture so that the normal manufacture cannot be achieved. In such acase, the problems can be solved by sandwiching a layer between otherlayers or covering a layer with another layer. For example, when indiumtin oxide (ITO) and aluminum are made in contact with each other, it isdesirable to sandwich titanium or molybdenum between them. In addition,when silicon and aluminum are made in contact with each other, it isdesirable to sandwich titanium or molybdenum between them.

In accordance with the pixel in this embodiment mode, given that ann-channel transistor is used for the fourth transistor 304 similarly tothe pixel circuit shown in FIG. 3, leak current of the fourth transistor304 can be decreased than the case of using a p-channel transistor.Therefore, leaks of charges held in the first storage capacitor 306 andthe second storage capacitor 307 can be reduced, which leads to smallerfluctuations of a voltage held in the first storage capacitor 306 andthe second storage capacitor 307. Accordingly, a constant voltage iscontinuously applied to the gate terminal of the first transistor 301,in particular, in the light-emitting period. Thus, the light-emittingelement can be supplied with a constant current. As a result, thelight-emitting element can emit light at a constant luminance, therebyluminance unevenness can be reduced.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 5.

[Embodiment Mode 7]

In this embodiment mode, description will be made of a configuration andoperation of a signal line driver circuit, a scan line driver circuit,and the like of a display device.

For example, a display device having a pixel circuit whose operation iscontrolled with a signal line and first to fourth scan lines as shown inFIG. 3 and FIG. 9 has a configuration as shown in FIG. 38. The displaydevice shown in FIG. 38 includes a pixel portion 3801, a first scan linedriver circuit 3802 to a fourth scan line driver circuit 3805, and asignal line driver circuit 3806.

Here, the first scan line driver circuits 3802 to the fourth scan linedriver circuit 3805 are driver circuits for sequentially outputtingselection signals to a first scan line 3807 to a fourth scan line 3810respectively.

First, description will be made of a signal line driver circuit. Thesignal line driver circuit 3806 sequentially outputs video signals tothe pixel portion 3801. In the pixel portion 3801, images are displayedby controlling the light-emitting state of pixels in response to videosignals.

FIGS. 39A and 39B show exemplary configurations of the signal linedriver circuit 3806. FIG. 39A shows an example of the signal line drivercircuit 3806 in the case where signals are supplied to pixels with aline sequential drive. The signal line driver circuit 3806 in this caseincludes a shift register 3901, a first latch circuit 3902, a secondlatch circuit 3903, and an amplifier circuit 3904 as the maincomponents. Note that the amplifier circuit 3904 may have a function ofconverting digital signals into analog signals or a function of gammacorrection.

Here, operation of the signal line driver circuit 3806 shown in FIG. 39Awill be briefly described. Clock signals (S-CLK), start pulses (S-SP),and inverted clock signals (S-CLKB) are input into the shift register3901, and sampling pulses are sequentially output in accordance with thetiming of these signals.

The sampling pulse output from the shift register 3901 are input to thefirst latch circuit 3902. The first latch circuit 3902 receives videosignals with a voltage V_(data) from a video signal line, and holds thevideo signals in respective stages of the first latch circuit 3902 inaccordance with the input timing of the sampling pulses.

When holding of video signals in the respective stages of the firstlatch circuit 3902 is completed, latch signals are input from a latchcontrol line in a horizontal flyback period, so that the video signalswhich have been held in the first latch circuit 3902 are transferred tothe second latch circuit 3903 all at once. After that, one row of thevideo signals held in the second latch circuit 3903 are concurrentlyinput to the amplifier circuit 3904. Then, the amplitude of the videosignal voltage V_(data) is amplified in the amplifier circuit 3904, andthe video signals are input to the pixel portion 3801 from respectivesignal lines.

While the video signals held in the second latch circuit 3903 are beinginput to the amplifier circuit 3904 and subsequently input to the pixelportion 3801, the shift register 3901 outputs sampling pulses again.That is, two operations are performed at the same time. Accordingly, aline sequential drive can be performed. Hereinafter, such operations arerepeated.

Note that there is a case where signals are supplied to pixels with adot sequential drive. FIG. 39B shows an example of the signal linedriver circuit 3806 in that case. The signal line driver circuit 3806 inthis case includes a shift register 3901 and a sampling circuit 3905.Sampling pulses are output from the shift register 3901 to the samplingcircuit 3905. In addition, the sampling circuit 3905 receives videosignals with a voltage V_(data) from a video signal line, andsequentially outputs the video signals to the pixel portion 3801 inresponse to the sampling pulses. Accordingly, dot sequential drive canbe performed.

Next, scan line driver circuits will be described. The first scan linedriver circuit 3802 to the fourth scan line driver circuit 3805sequentially output selection signals to the pixel portion 3801. FIG. 40shows an exemplary configuration of the first scan line driver circuit3802 to the fourth scan line driver circuit 3805. The scan line drivercircuit includes a shift register 4001, an amplifier circuit 4002, andthe like as the main components.

Next, operation of the first scan line driver circuit 3802 to the fourthscan line driver circuit 3805 shown in FIG. 40 will be brieflydescribed. Clock signals (G-CLK), start pulses (G-SP), and invertedclock signals (G-CLKB) are input into the shift register 4001, andsampling pulses are sequentially output in accordance with the timing ofthese signals. The output sampling pulses are amplified in the amplifiercircuit 4002 and then input to the pixel portion 3801 through respectivescan lines.

Note that the amplifier circuit 4002 may include a buffer circuit or alevel shifter circuit. In addition, the scan line driver circuit mayinclude a pulse width control circuit and the like in addition to theshift register 4001 and the amplifier circuit 4002.

By using the signal line driver circuit and the scan line drivercircuits as described above, the pixel circuit of the invention can bedriven.

Note that in the case where the third transistor and the fourthtransistor have different conductivity types as in the pixel circuitshown in FIG. 17, for example, selection signals that are inverted fromeach other are input to the second and third scan lines. Accordingly, aselection signal input to either one of the second or third scan linemay be controlled by using either one of the second scan line drivercircuit or the third scan line driver circuit, while the other scan linemay be input with an inverted signal thereof. FIG. 41 shows an exemplaryconfiguration of the display device in that case. In FIG. 41, selectionsignals input to the second scan line 3808 are controlled with thesecond scan line driver circuit 3803. In addition, signals obtained byinverting the selection signals input to the second scan line 3808 areproduced by using an inverter 3812, which is input to the third scanline 3809.

In addition, in the case where the third transistor and the fourthtransistor have the same conductivity type as in the pixel circuit shownin FIG. 3 and FIG. 9, for example, the same selection signals are inputto the second and third scan lines. Accordingly, the third and fourthtransistors may be controlled with the same scan line as in the pixelcircuits shown in FIG. 15 and FIG. 16. FIG. 42 shows an exemplaryconfiguration of the display device in that case. In FIG. 42, the thirdtransistor and the fourth transistor are controlled with the second scanline 3808, and the second scan line 3808 is controlled with the secondscan line driver circuit 3803.

Note that the configurations of the signal line driver circuit, the scanline driver circuits, and the like are not limited to those in FIG. 38to FIG. 42.

Note also that transistors in the invention may be any type oftransistors, and may be formed over any substrate. Accordingly, thewhole circuits shown in FIG. 38 to FIG. 42 may be formed over a glasssubstrate, a plastic substrate, a single crystalline substrate, an SOIsubstrate, or any other substrates. Alternatively, parts of the circuitsshown in FIG. 38 to FIG. 42 may be formed over a substrate, while theother parts of the circuits shown in FIG. 38 to FIG. 42 may be formedover another substrate. That is, not all of the circuits shown in FIG.38 to FIG. 42 are required to be formed over the same substrate. Forexample, in FIG. 38 to FIG. 42, the pixel portion and the scan linedriver circuits may be formed over a glass substrate, while the signalline driver circuit (or a part of it) may be formed over a singlecrystalline substrate so that the IC chip is connected to the glasssubstrate by COG (Chip on Glass) bonding. Alternatively, the IC chip maybe connected to the glass substrate by TAB (Tape Automated Bonding) orprinted board.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 6.

[Embodiment Mode 8]

In this embodiment mode, description will be made of a display panelused for the display device of the invention, with reference to FIG. 67and the like. Note that FIG. 67A shows top view of a display panel, andFIG. 67 B shows a cross section taken along a line A-A′ in FIG. 67A. Thedisplay panel includes a signal line driver circuit 6701, a pixelportion 6702, a first scan line driver circuit 6703, and a second scanline driver circuit 6706, which are shown by dashed lines. The displaypanel also includes a sealing substrate 6704 and a sealant 6705, and theinner side of the sealant 6705 is a space 6707.

Note that a wire 6708 is a wire for transmitting signals to be input tothe first scan line driver circuit 6703, the second scan line drivercircuit 6706, and the signal line driver circuit 6701, and for receivingvideo signals, clock signals, start signals, and the like from an FPC6709 (Flexible Printed Circuit) which serves as an external inputterminal. IC chips 6719 and 6720 (semiconductor chips incorporating amemory circuit, a buffer circuit, and the like) are mounted onconnecting portions between the respective FPCs 6709 and the displaypanel by COG (Chip On Glass) bonding or the like. Although only an FPCis shown in the drawing, a printed wiring board (PWB) may be attached tothe FPC.

Next, a cross-sectional structure is described with reference to FIG.67B. Although the pixel portion 6702 and its peripheral driver circuits(the first scan line driver circuit 6703, the second scan line drivercircuit 6706, and the signal line driver circuit 6701) are actuallyformed over the substrate 6710, only the signal line driver circuit 6701and the pixel portion 6702 are shown herein.

Note that the signal line driver circuit 6701 is constructed from anumber of transistors such as a transistor 6721 and a transistor 6722.In addition, although this embodiment mode shows a display panel where apixel portion and peripheral driver circuits are formed over the samesubstrate, the invention is not necessarily limited to this and a partor all of the peripheral driver circuits may be formed in an IC chip sothat it is mounted on the display panel by COG bonding or the like.

The pixel portion 6702 includes a plurality of circuits which constitutepixels each including a switching transistor 6711 and a drivingtransistor 6712. Note that a source electrode of the driving transistor6712 is connected to a first electrode 3713. In addition, an insulator6714 is formed covering the edge of the first electrode 6713. Here, theinsulator 6714 is formed by using a positive photosensitive acrylicresin film.

In order to obtain an excellent coverage, a top edge or a bottom edge ofthe insulator 6714 is formed to have a curved surface with a curvature.For example, in the case of using positive photosensitive acrylic as amaterial of the insulator 6714, it is preferable to form only the topedge of the insulator 6714 to have a curvature radius (0.2 to 3 μm).Alternatively, the insulator 6714 can be formed by using a negativephotoresist which becomes insoluble in etchant by light or a positivephotoresist which becomes soluble in etchant by light.

A layer 6716 containing an organic compound and a second electrode 6717are formed over the first electrode 6713. Here, as a material used forthe first electrode 6713 functioning as an anode, a material with a highwork function is desirably used. For example, the first electrode 6703can be formed with a single film such as an ITO (Indium T1n Oxide) film,an indium zinc oxide (IZO) film, a titanium nitride film, a chromiumfilm, a tungsten film, a Zn film, or a Pt film; stacked layers of atitanium nitride film and a film containing aluminum as its maincomponent; a three-layer structure of a titanium nitride film, a filmcontaining aluminum as its main component, and a titanium nitride film;or the like. When the first electrode 6703 is formed to have a stackedstructure, low resistance as a wire can be obtained, an excellent ohmiccontact can be formed, and further first electrode 6703 can function asan anode.

The layer 6716 containing an organic compound is formed by a vapordeposition method using a vapor-deposition mask or an ink-jet method. Apart of the layer 6716 containing an organic compound is formed by usinga metal complex of the Group 4 in the periodic table, which may becombined with either a low molecular material or a high molecularmaterial. In general, the material used for a layer containing anorganic compound is often an organic compound with a single layer orstacked layers; however, a structure where a film made of an organiccompound partially contains an inorganic compound may be used as well.Further, known triplet materials can be used.

As a material used for the second electrode 6717 functioning as acathode which is formed over the layer 6716 containing an organiccompound, a material with a low work function (e.g., Al, Ag, Li, or Ca;an alloy thereof such as MgAg, MgIn, AlLi, CaF₂, or calcium nitride) maybe used. Note that in the case where light generated in the layer 6716containing an organic compound is made travel through the secondelectrode 6717, the second electrode 6717 is preferably formed ofstacked layers of a thin metal film and a transparent conductive film(e.g., ITO (an alloy of indium oxide and tin oxide), an alloy of indiumoxide and zinc oxide (In₂O₃—ZnO), zinc oxide (ZnO), or the like).

Further, by attaching the sealing substrate 6704 to the substrate 6710with the sealant 6705, a structure where a light-emitting element 6718is provided in the space 6707 surrounded by the substrate 6710, thesealing substrate 6704, and the sealant 6705 is formed. Note that thespace 6707 may be filled with an inert gas (e.g., nitrogen, argon, orthe like) or filled with the sealant 6705.

Note also that the sealant 6705 is preferably formed with an epoxyresin. In addition, such a material desirably transmits as littlemoisture and oxygen as possible. As a material used for the sealingsubstrate 6704, a plastic substrate made of FRP (Fiberglass-ReinforcedPlastics), PVF (PolyVinyl Fluoride), mylar, polyester, acrylic, or thelike can be used in addition to a glass substrate or a quartz substrate.

In this manner, a display panel having the pixel configuration of theinvention can be obtained.

By forming the signal line driver circuit 6701, the pixel portion 6702,the first scan line driver circuit 6703, and the second scan line drivercircuit 6706 over the same substrate as shown in FIGS. 67A and 67 B,cost reduction of the display device can be achieved. In addition, inthis case, when the signal line driver circuit 6701, the pixel portion6702, the first scan line driver circuit 6703, and the second scan linedriver circuit 6706 are formed by using transistors of the sameconductivity type, the manufacturing process can be simplified, whichleads to a further cost reduction. Further, by using amorphous siliconfor semiconductor layers of the transistors which are used for thesignal line driver circuit 6701, the pixel portion 6702, the first scanline driver circuit 6703, and the second scan line driver circuit 6706,further cost reduction can be achieved.

Note that the structure of a display panel is not limited to thestructure where the signal line driver circuit 6701, the pixel portion6702, the first scan line driver circuit 6703, and the second scan linedriver circuit 6706 are formed over the same substrate as shown in FIG.67A, and a structure where the signal line driver circuit 6701 is formedin an IC chip so that it is mounted on the display panel by COG bondingor the like may be used.

That is, only a signal line driver circuit which is required to performa high-speed operation is formed in an IC chip using a CMOS or the likein order to achieve low power consumption. In addition, by forming an ICchip using a semiconductor chip such as a silicon wafer, a higher-speedoperation and lower power consumption can be achieved.

By forming the scan line driver circuits and the pixel portion over thesame substrate, cost reduction can be achieved. Note that when the scanline driver circuits and the pixel portion are formed by usingtransistors of the same conductivity type, further cost reduction can beachieved. As the configuration of pixels included in the pixel portion,the configuration shown in Embodiment Mode 3 can be used. In addition,by using amorphous silicon for semiconductor layers of the transistors,the manufacturing process can be simplified, which leads to a furthercost reduction.

In this manner, cost reduction of a high-definition display device canbe achieved. In addition, by mounting an IC chip which incorporates afunctional circuit (e.g., a memory or a buffer) on a connecting portionbetween the FPC 6709 and the substrate 6710, the substrate area can beeffectively utilized.

Alternatively, after forming the signal line driver circuit 6701, thefirst scan line driver circuit 6703, and the second scan line drivercircuit 6706 in FIG. 67A in IC chips, the IC chips may be mounted on thedisplay panel by COG bonding or the like. In this case, powerconsumption of the high-definition display device can be furtherreduced. Therefore, in order to obtain a display device with lower powerconsumption, polysilicon is desirably used for semiconductor layers ofthe transistors which are used in the pixel portion.

In addition, by using amorphous silicon for semiconductor layers of thetransistors in the pixel portion 6702, further cost reduction can beachieved. Further, a large display panel can be manufactured.

Note that the position of the scan line driver circuits is not limitedto the row direction of the pixels as well as the position of the signalline driver circuit is not limited to the column direction of thepixels.

FIG. 68 shows an example of a light-emitting element which can beapplied to the light-emitting element 6718.

A light-emitting element shown in FIG. 68 has an element structure wherea substrate 6801, an anode 6802, a hole injection layer 6803 made of ahole injection material, a hole transport layer 6804 made of a holetransporting material, a light-emitting layer 6805, an electrontransporting layer 6806 made of an electron transporting material, anelectron injection layer 6807 made of an electron injection material,and a cathode 6808 are stacked in this order. Here, the light-emittinglayer 6805 is sometimes formed from one kind of a light-emittingmaterial, but it may be formed from two or more kinds of light-emittingmaterials. In addition, the element structure of the invention is notlimited to this.

In addition to the stacked structure shown in FIG. 68 where eachfunctional layer is stacked, a wide variety of element structures can beemployed such as an element using a high molecular compound and ahigh-efficiency element which utilizes as a light-emitting layer atriplet light-emitting material which emits light in returning from atriplet excitation state. The light-emitting element of the inventioncan also be applied to a white light-emitting element which can beobtained by controlling a recombination region of carries using a holeblocking layer and dividing a light-emitting region into two regions.

Next, the manufacturing method of the element of the invention shown inFIG. 68 will be described. First, a hole injection material, a holetransporting material, and a light-emitting material are sequentiallydeposited over the substrate 6801 having the anode 6802 (ITO: Indium T1nOxide). Next, an electron transporting material and an electroninjection material are deposited, and finally the cathode 6808 is formedby vapor-deposition.

Next, materials suitable for the hole injection material, the holetransporting material, the electron transporting material, the electroninjection material, and the light-emitting material will be described.

As a hole injection material, an organic compound such as aporphyrin-based compound, phthalocyanine (abbreviation: H₂Pc), or copperphthalocyanine (abbreviation: CuPc) can be effectively used. Inaddition, a material having a lower ionization potential than the holetransporting material as well as having a hole transporting function canbe used as the hole injection material. There is also a conductive highmolecular compound doped with chemicals, such aspoly(3,4-ethylenedioxythiophene) (abbreviation: PEDOT) doped withpoly(styrenesulfonic acid) (abbreviation: PSS), or polyaniline. Inaddition, an insulating high molecular compound is also effective interms of planarization, and polyimide (abbreviation: PI) is often usedas such an material. Further, an inorganic compound can also be used,which includes a thin metal film of gold, silver, or the like, anultrathin film of an aluminum oxide (abbreviation: alumina), and thelike.

As a material which is most widely used as the hole transportingmaterial, there is an aromatic amine compound (a material having benzenering-nitrogen bonds). As a material which is widely used, there are4,4′-bis(diphenylamino)-biphenyl (abbreviation: TAD), derivativesthereof such as 4,4′-bis[N-(3-methylphenyl)-N-phenyl-amino]-biphenyl(abbreviation: TPD), and4,4′-bis[N-(1-naphthyl)-N-phenyl-amino]-biphenyl (abbreviation: a-NPD).Besides, a star burst aromatic amine compound can also be given as anexample, which includes 4,4′,4″-tris(N,N-diphenyl-amino)-triphenylamine(abbreviation: TDATA) or4,4′,4″-tris[N-(3-methylphenyl)-N-phenyl-amino]-triphenylamine(abbreviation: MTDATA).

As an electron transporting material, a metal complex is often used,which includes a metal complex having a quinoline skeleton or abenzoquinoline skeleton such as tris(8-quinolinolato)aluminum(abbreviation: Alq₃), BAlq, tris(4-methyl-8-quinolinolato)aluminum(abbreviation: Almq), or bis(10-hydroxybenzo[h]-quinolinato)beryllium(abbreviation: Bebq). Besides, a metal complex having an oxazole-basedor thiazole-based ligand such asbis[2-(2-hydroxyphenyl)-benzoxazolato]zinc (abbreviation: Zn(BOX)₂) orbis[2-(2-hydroxyphenyl)-benzothiazolato]zinc (abbreviation: Zn(BTZ)₂)can also be used. Further, other than the metal complex, the followingmaterials having an electron transporting property can be used:oxadiazole derivatives such as2-(4-biphenylyl)-5-(4-tert-butylphenyl)-1,3,4-oxadiazole (abbreviation:PBD) or OXD-7; triazole derivatives such as TAZ or3-(4-tert-butylphenyl)-4-(4-ethylphenyl)-5-(4-biphenylyl)-1,2,4-triazole(abbreviation: p-EtTAZ); and phenanthroline derivatives such asbathophenanthroline (abbreviation: BPhen) or BCP.

As an electron injection material, the aforementioned electrontransporting materials can be used. In addition, an ultrathin film of aninsulator such as metal halide of calcium fluoride, lithium fluoride, orcesium fluoride, is often used as well as alkali metal oxide such aslithium oxide. Further, an alkali metal complex such as lithium acetylacetonate (abbreviation: Li(acac)) or 8-quinolinolato-lithium(abbreviation: Liq) is also effective.

As a light-emitting material, various fluorescent pigments can beeffectively used in addition to the aforementioned metal complexes suchas Alq₃, Almq, BeBq, BAlq, Zn(BOX)₂, or Zn(BTZ)₂. As the fluorescentpigments, there are 4,4′-bis(2,2-diphenyl-vinyl)-biphenyl for blueemission,4-(dicyanomethylene)-2-methyl-6-(p-dimethylaminostyryl)-4H-pyran forred-orange emission, and the like. In addition, a triplet light-emittingmaterial can be also used, which is mainly a complex having platinum oriridium as a central metal. As a triplet light-emitting material, thefollowing materials are known: tris(2-phenylpyridine)iridium,bis(2-(4′-tryl)pyridinato-N,C^(2′))acetylacetonato iridium(abbreviation: acacIr(tpy)₂),2,3,7,8,12,13,17,18-octaethyl-21H,23H-porphyrin-platinum, and the like.

By combining the aforementioned materials having the respectivefunctions, a highly reliable light-emitting element can be manufactured.

In addition, a light-emitting element having layers stacked in reverseorder from the order shown in FIG. 68 can be used. That is a elementstructure where the substrate 6801, the cathode 6808, the electroninjection layer 6807 made of an electron injection material, theelectron transporting layer 6806 made of an electron transportingmaterial, the light-emitting layer 6805, the hole transporting layer6804 made of a hole transporting material, the hole injection layer 6803made of a hole injection material, and the anode 6802 are stacked inthis order.

In order to extract light emitted from the light-emitting element, atleast one of the anode and the cathode is required to be transparent. ATFT and the light-emitting element are formed over a substrate. As thestructure of a light-emitting element, there are a top-emissionstructure where light is extracted through the opposite side of thesubstrate, a bottom-emission structure where light is extracted throughthe substrate side, and a dual-emission structure where light isextracted through both sides of the substrate and the opposite sidethereof. The pixel layout of the invention can be applied to alight-emitting element having any of the aforementioned emissionstructures.

A light-emitting element with a top-emission structure will be describedwith reference to FIG. 69A.

A driving transistor 6901 is formed over a substrate 6900, and a firstelectrode 6902 is formed in contact with a source electrode of thedriving transistor 6901. A layer 6903 containing an organic compound anda second electrode 6904 are formed thereover.

Note that the first electrode 6902 is an anode of the light-emittingelement, while the second electrode 6904 is a cathode of thelight-emitting element. That is, the light-emitting element correspondsto a region where the layer 6903 containing an organic compound issandwiched between the first electrode 6902 and the second electrode6904.

As a material of the first electrode 6902 functioning as an anode, amaterial with a high work function is desirably used. For example, thefirst electrode 6902 can be formed by using a single-layered film suchas a titanium nitride film, a chromium film, a tungsten film, a Zn film,or a Pt film; stacked layers of a titanium nitride film and a filmcontaining aluminum as its main component; a three-layer structure of atitanium nitride film, a film containing aluminum as its main component,and a titanium nitride film; or the like. Note that when the firstelectrode 6902 is formed to have a stacked structure, low resistance asa wire can be obtained, an excellent ohmic contact can be formed, andfurther the first electrode 6902 can function as an anode. By using alight-reflective metal film, an anode which does not transmit light canbe formed.

As a material of the second electrode 6904 functioning as a cathode, itis preferable to use stacked layers of a thin metal film which is madeof a material with a low work function (Al, Ag, Li, or Ca, or an alloythereof such as MgAg, MgIn, AlLi, CaF₂, or calcium nitride) and atransparent conductive film (indium tin oxide (ITO), indium zinc oxide(IZO), zinc oxide (ZnO), or the like). By using the thin metal film andthe transparent conductive film in this manner, a cathode which cantransmit light can be formed.

Thus, light emitted from the light-emitting element can be extractedthrough the top surface as shown by the arrow in FIG. 69A. That is, inthe case of using such a light-emitting element for the display panelshown in FIGS. 67A and 67B, light is emitted to the side of the sealingsubstrate 6704. Therefore, when a light-emitting element with atop-emission structure is used for the display device, alight-transmissive substrate is used for the sealing substrate 6704.

In addition, in the case of providing an optical film, the optical filmmay be provided on the sealing substrate 6704.

Note that the first electrode 6902 may also be formed by using a metalfilm made of a material with a low work function such as MgAg, MgIn, orAlLi in order to function as a cathode. In this case, the secondelectrode 6904 may be formed by using a transparent conductive film suchas an indium tin oxide (ITO) film or an indium zinc oxide (IZO) film.Accordingly, this structure can increase the transmissivity of lightwhich can be emitted through the top surface.

Next, a light-emitting element with a bottom-emission structure will bedescribed with reference to FIG. 69B. Since the overall structure exceptthe emission structure is the same as that of FIG. 69A, the samereference numerals are used in FIG. 69A and FIG. 69B.

As a material of the first electrode 6902 functioning as an anode, amaterial with a high work function is desirably used. For example, thefirst electrode 6902 may be formed by using a transparent conductivefilm such as an indium tin oxide (ITO) film or an indium zinc oxide(IZO) film. By using a transparent conductive film having lighttransmissivity, an anode which can transmit light can be formed.

As a material of the second electrode 6904 functioning as a cathode, ametal film made of a material with a low work function (Al, Ag, Li, orCa, or an alloy thereof such as MgAg, MgIn, AlLi, CaF₂, or calciumnitride) can be used. By using a light-reflective metal film in thismanner, a cathode which does not transmit light can be formed.

Thus, light emitted from the light-emitting element can be extractedthrough the bottom surface as shown by the arrow in FIG. 69B. That is,in the case of using such a light-emitting element for the display panelshown in FIGS. 67A and 67B, light is emitted to the side of thesubstrate 6710. Thus, when a light-emitting element with abottom-emission structure is used for the display device, alight-transmissive substrate is used as the substrate 6710.

In addition, in the case of providing an optical film, the optical filmmay be provided on the substrate 6710.

Next, a light-emitting element with a dual-emission structure will bedescribed with reference to FIG. 69C. Since the overall structure exceptthe emission structure is the same as that of FIG. 69A, the samereference numerals are used in FIG. 69A and FIG. 69C.

As a material of the first electrode 6902 functioning as an anode, it isdesirable to use a material with a high work function. For example, thefirst electrode 6902 can be formed by using a transparent conductivefilm such as an indium ITO (Indium T1n Oxide) film or an indium zincoxide (IZO) film. By using a light-transmissive conductive film, ananode which can transmit light can be formed.

As a material of the second electrode 6904 functioning as a cathode, itis preferable to use stacked layers of a thin metal film which is madeof a material with a low work function (Al, Ag, Li, or Ca, or an alloythereof such as MgAg, MgIn, AlLi, CaF₂, or calcium nitride) and atransparent conductive film (ITO: Indium Tin Oxide), an alloy of indiumoxide and zinc oxide (In₂O₃—ZnO), zinc oxide (ZnO), or the like). Byusing the thin metal film and the transparent conductive film havinglight transmissivity in this manner, a cathode which can transmit lightcan be formed.

Thus, light emitted from the light-emitting element can be extractedthrough both surfaces as shown by the arrows in FIG. 69C. That is, inthe case of using such a light-emitting element for the display panelshown in FIGS. 67A and 67 B, light is emitted to both sides of thesubstrate 6710 and the sealing substrate 6704. Thus, when alight-emitting element with a dual-emission structure is used for thedisplay device, both of the substrate 6710 and the sealing substrate6704 are formed by using light-transmissive substrates.

In addition, in the case of providing an optical film, optical films maybe provided on the substrate 6710 and the sealing substrate 6704respectively.

Further, the invention can be applied to a display device which performsfull-color display by using white light-emitting elements and colorfilters.

As shown in FIG. 70, a base film 7002 is formed over a substrate 7000, adriving transistor 7001 is formed over the base film 7002, and a firstelectrode 7003 is formed in contact with a source electrode of thedriving transistor 7001. In addition, a layer 7004 containing an organiccompound and a second electrode 7005 are formed thereover.

Note that the first electrode 7003 is an anode of a light-emittingelement, while the second electrode 7005 is a cathode of thelight-emitting element. That is, the light-emitting element correspondsto a region where the layer 7004 containing an organic compound issandwiched between the first electrode 7003 and the second electrode7005. With the structure shown in FIG. 70, white light emission isobtained. A red color filter 7006R, a green color filter 7006G, and ablue color filter 7006B are provided above the light-emitting elements,thereby full-color display can be performed. In addition, a black matrix(also called a “BM”) 7007 is provided to separate these color filters.

The aforementioned structures of the light-emitting element can be usedin combination and can be appropriately applied to a display device ofthe invention. Note that the structures of the display panel and thelight-emitting element described above are only illustrative, and thusthe invention can be applied to a display device having otherstructures.

Next, a partial cross section of a pixel portion of a display panel willbe described.

First, description will be made of a case where a polysilicon (p-Si:H)film is used as a semiconductor layer of a transistor, with reference toFIGS. 71A, 71B, 72A, 72B, 73A, and 73B

Here, the semiconductor layer is obtained by, for example forming anamorphous silicon (a-Si) film over a substrate by a known filmdeposition method. Note that the semiconductor film is not limited tothe amorphous silicon film, and any semiconductor film having anamorphous structure (including a microcrystalline semiconductor film)may be used. Further, a compound semiconductor film having an amorphousstructure, such as an amorphous silicon germanium film may be used.

Then, the amorphous silicon film is crystallized by lasercrystallization, thermal crystallization using RTA or an annealingfurnace, thermal crystallization using metal elements which promotecrystallization, or the like. Needless to say, such crystallization maybe performed in combination.

As a result of the aforementioned crystallization, a crystallized regionis formed in a part of the amorphous semiconductor film.

Next, the crystalline semiconductor film having a partially increasedcrystallinity is patterned into a desired shape, and an island-shapedsemiconductor film is formed with the crystallized region. Thissemiconductor film is used as the semiconductor layer of the transistor.

As shown in FIG. 71A, a base film 7102 is formed over a substrate 7101,and a semiconductor layer is formed thereover. The semiconductor layerincludes a channel formation region 7103, an LDD region 7104, and animpurity region 7105 which serves as a source or drain region of adriving transistor 7118. The semiconductor layer also includes a channelformation region 7106, an LDD region 7107, and an impurity region 7108which jointly serve as a bottom electrode of a capacitor 7119. Note thatchannel doping may be performed to the channel formation region 7103 andthe channel formation region 7106.

As the substrate, a glass substrate, a quartz substrate, a ceramicsubstrate, or the like can be used. As the base film 7102, either of asingle layer of aluminum nitride (AIN), silicon oxide (SiO₂), siliconoxynitride (SiO_(x)N_(y)), or the like, or stacked layers thereof can beused.

A gate electrode 7110 and a top electrode 7111 of the capacitor 7119 areformed over the semiconductor layer with a gate insulating film 7109sandwiched therebetween.

An interlayer insulating film 7112 is formed to cover the drivingtransistor 7118 and the capacitor 7119. Then, a wire 7113 is formed overthe first interlayer insulating film 7112 so that the wire 7113 contactsthe impurity region 7105 through a contact hole. A pixel electrode 7114is formed in contact with the wire 7113, and an insulator 7115 is formedto cover the edge of the pixel electrode 7114 and the wire 7113. Here,the pixel electrode 7114 is formed with a positive photosensitiveacrylic resin film. Then, a layer 7116 containing an organic compoundand a counter electrode 7117 are formed over the pixel electrode 7114.Thus, a light-emitting element 7120 is formed in a region where thelayer 7116 containing an organic compound is sandwiched between thepixel electrode 7114 and the counter electrode 7117.

In addition, as shown in FIG. 71B, a region 7121 which overlaps with apart of the top electrode 7111 of the capacitor 7119 may be provided byextending the LDD region which forms a part of the bottom electrode ofthe capacitor 7119 to the inner side. Note that common portions to thosein FIG. 71A are denoted by the same reference numerals, and thus theirdescription is omitted.

In addition, as shown in FIG. 72A, a second top electrode 7122 may beprovided, which is formed in the same layer as the wire 7113 having acontact with the impurity region 7105 of the driving transistor 7118.Note that common portions to those in FIG. 71A are denoted by the samereference numerals, and thus their description is omitted. In addition,since the second top electrode 7122 has a contact with the impurityregion 7108, a first capacitor which has a structure where the gateinsulating film 7109 is sandwiched between the top electrode 7111 andthe channel formation region 7106, and the second capacitor which has astructure where the interlayer insulating film 7112 is sandwichedbetween the top electrode 7111 and the second top electrode 7122 areconnected in parallel, so that a capacitor 7123 having the firstcapacitor and the second capacitor is obtained. Since the capacitor 7123has a total capacity of the first capacitor and the second capacitor, acapacitor having a high capacity can be formed in a small area. That is,the aperture ratio can be further increased by using such a capacitor asthe capacitor in the pixel configuration of the invention.

Alternatively, a structure of a capacitor as shown in FIG. 72B may beadopted. A base film 7202 is formed over a substrate 7201, and asemiconductor layer is formed thereover. The semiconductor layerincludes a channel formation region 7203, an LDD region 7204, and animpurity region 7205 which serves as a source or drain region of adriving transistor 7218. Note that channel doping may be performed tothe channel formation region 7203.

As the substrate, a glass substrate, a quartz substrate, a ceramicsubstrate, or the like can be used. As the base film 7202, either asingle layer of aluminum nitride (AIN), silicon oxide (SiO₂), siliconoxynitride (SiO_(x)N_(y)), or the like or stacked layers thereof can beused.

A gate electrode 7207 and a first electrode 7208 are formed over thesemiconductor layer with a gate insulating film 7206 sandwichedtherebetween.

A first interlayer insulating film 7209 is formed to cover the drivingtransistor 7218 and the first electrode 7208. Then, a wire 7210 isformed over the first interlayer insulating film 7209 so that the wire7210 contacts the impurity region 7205 through a contact hole. Inaddition, a second electrode 7211 is formed in the same layer and withthe same material as the wire 7210.

Further, a second interlayer insulating film 7212 is formed to cover thewire 7210 and the second electrode 7211. Then, a pixel electrode 7213 isformed over the second interlayer insulating film 7212 so that the pixelelectrode 7213 contacts the wire 7210 through a contact hole. A thirdelectrode 7214 is formed in the same layer and with the same material asthe pixel electrode 7213. Accordingly, a capacitor 7219 is formed withthe first electrode 7208, the second electrode 7211, and the thirdelectrode 7214. Note that reference numeral 7215 is a third interlayerinsulating film.

A layer 7216 containing an organic compound and a counter electrode 7217are formed over the pixel electrode 7213. Thus, a light-emitting element7220 is formed in a region where the layer 7216 containing an organiccompound is sandwiched between the pixel electrode 7213 and the counterelectrode 7217.

As described above, each of the structures shown in FIGS. 71A, 71B, 72A,and 72B can be given as an exemplary structure of a transistor whichuses a crystalline semiconductor film as a semiconductor layer. Notethat the transistors having the structures shown in FIGS. 71A, 71B, 72A,and 72B are examples of a transistor with a top-gate structure. That is,the LDD region may be formed either to overlap with the gate electrodeor not overlap, and also a part of the LDD region may be formed tooverlap with the gate electrode. Further, the gate electrode may have atapered shape and an LDD region may be provided below the taperedportion of the gate electrode in a self-aligned manner. In addition, thenumber of gate electrodes is not limited to two, and a multi-gatestructure with three or more gate electrodes may be employed, or asingle-gate structure may also be employed.

By using a crystalline semiconductor film as a semiconductor layer(e.g., a channel formation region, a source region, a drain region, andthe like) of a transistor included in the pixel of the invention, itbecomes easier to form a scan driver circuit and a signal line drivercircuit over the same substrate as a pixel portion. In addition, astructure where a part of the signal line driver circuit is formed overthe same substrate as the pixel portion, while another part of thecircuit is formed in an IC chip to be mounted on the substrate by COGbonding or the like, may be employed as shown in the display panel ofFIGS. 67A and 67B. With this structure, the manufacturing cost can bereduced.

As a structure of a transistor which uses polysilicon (p-Si:H) as asemiconductor layer, a structure where a gate electrode is formedbetween a substrate and a semiconductor layer, that is a transistor witha bottom-gate structure where a gate electrode is located below asemiconductor layer may be employed as well. FIGS. 73A and 73B showpartial cross sections of a pixel portion of a display panel which usesa transistor with a bottom-gate structure.

As shown in FIG. 73A, a base film 7302 is formed over a substrate 7301.Then, a gate electrode 7303 is formed over the base film 7302. A firstelectrode 7304 is formed in the same layer and with the same material asthe gate electrode 7303. As a material of the gate electrode 7303,polycrystalline silicon doped with phosphorus can be used. Not onlypolycrystalline silicon, but silicide which is a compound of metal andsilicon can be used.

A gate insulating film 7305 is formed to cover the gate electrode 7303and the first electrode 7304. The gate insulating film 7305 is formed byusing a silicon oxide film, a silicon nitride film, or the like.

Over the gate insulating film 7305, a semiconductor layer is formed. Thesemiconductor layer includes a channel formation region 7306, an LDDregion 7307, and an impurity region 7308 which serves as a source ordrain region of a driving transistor 7322. The semiconductor layer alsoincludes a channel formation region 7309, an LDD region 7310, and animpurity region 7311 which jointly serve as a second electrode of acapacitor 7323. Note that channel doping may be performed to the channelformation region 7306 and the channel formation region 7309.

As the substrate, a glass substrate, a quartz substrate, a ceramicsubstrate, or the like can be used. As the base film 7302, either asingle layer of aluminum nitride (AIN), silicon oxide (SiO₂), siliconoxynitride (SiO_(x)N_(y)), or the like or stacked layers thereof can beused.

A first interlayer insulating film 7312 is formed to cover thesemiconductor layer. Then, a wire 7313 is formed over the firstinterlayer insulating film 7312 so that the wire 7313 contacts theimpurity region 7308 through a contact hole. A third electrode 7314 isformed in the same layer and with the same material as the wire 7313.The capacitor 7323 is formed with the first electrode 7304, the secondelectrode, and the third electrode 7314.

In addition, an opening 7315 is formed in the first interlayerinsulating film 7312. A second interlayer insulating film 7316 is formedto cover the driving transistor 7322, the capacitor 7323, and theopening 7315. Then, a pixel electrode 7317 is formed over the secondinterlayer insulating film 7316 so that the pixel electrode 7317 fills acontact hole. Then, an insulator 7318 is formed to cover the edge of thepixel electrode 7317. For example, a positive photosensitive acrylicresin film can be used as the insulator 7318. Subsequently, a layer 7319containing an organic compound and a counter electrode 7320 are formedover the pixel electrode 7317. Thus, a light-emitting element 7321 isformed in a region where the layer 7319 containing an organic compoundis sandwiched between the pixel electrode 7317 and the counter electrode7320. The opening 7315 is located below the light-emitting element 7321.That is, in the case where light emitted from the light-emitting element7321 is extracted from the substrate side, the light transmissivity canbe improved due to the provision of the opening 7315.

Further, a fourth electrode 7324 may be formed in the same layer andwith the same material as the pixel electrode 7317 in FIG. 73A so as toobtain a structure shown in FIG. 73B. In that case, a capacitor 7325 canbe formed with the first electrode 7304, the second electrode, the thirdelectrode 7314, and the fourth electrode 7324.

Next, description will be made of a case where an amorphous silicon(a-Si:H) film is used as a semiconductor layer of a transistor.Description will be made with reference to FIGS. 43A, 43B, 44A, 44B,45A, and 45B.

FIG. 43A shows a cross section of a top-gate transistor which usesamorphous silicon as a semiconductor layer. As shown in FIG. 43A, a basefilm 4302 is formed over a substrate 4301. Further, a pixel electrode4303 is formed over the base film 4302. In addition, a first electrode4304 is formed in the same layer and with the same material as the pixelelectrode 4303.

As the substrate, a glass substrate, a quartz substrate, a ceramicsubstrate, or the like can be used. As the base film 4302, either asingle layer of aluminum nitride (AIN), silicon oxide (SiO₂), siliconoxynitride (SiO_(x)N_(y)), or the like or stacked layers thereof can beused.

A wire 4305 and a wire 4306 are formed over the base film 4302, and theedge of the pixel electrode 4303 is covered with the wire 4305. N-typesemiconductor layers 4307 and 4308 having n-type conductivity are formedover the wires 4305 and 4306 respectively. In addition, a semiconductorlayer 4309 is formed over the base film 4302, between the wire 4305 andthe wire 4306, and a part of the semiconductor layer 4309 is extended tocover the n-type semiconductor layers 4307 and 4308. Note that thissemiconductor layer is formed with a non-crystalline semiconductor filmsuch as an amorphous silicon (a-Si:H) film or a microcrystallinesemiconductor (μ-Si:H) film. Then, a gate insulating film 4310 is formedover the semiconductor layer 4309, and an insulating film 4311 is formedin the same layer and with the same material as the gate insulating film4310, over the first electrode 4304. Note that the gate insulating film4310 is formed using a silicon oxide film, a silicon nitride film, orthe like.

Over the gate insulating film 4310, a gate electrode 4312 is formed. Inaddition, a second electrode 4313 is formed in the same layer and withthe same material as the gate electrode 4312, over the first electrode4304 with the insulating film 4311 sandwiched therebetween. A capacitor4319 is formed in a region where the insulating film 4311 is sandwichedbetween the first electrode 4304 and the second electrode 4313. Aninterlayer insulating film 4314 is formed to cover the edge of the pixelelectrode 4303, the driving transistor 4318, and the capacitor 4319.

Over the interlayer insulating film 4314 and the pixel electrode 4303located in an opening of the interlayer insulating film 4314, a layer4315 containing an organic compound and a counter electrode 4316 areformed. Thus, a light-emitting element 4317 is formed in a region wherethe layer 4315 containing an organic compound is sandwiched between thepixel electrode 4303 and the counter electrode 4316.

The first electrode 4304 shown in FIG. 43A may be formed like a firstelectrode 4320 as shown in FIG. 43B. The first electrode 4320 is formedin the same layer and with the same material as the wires 4305 and 4306.

FIGS. 44A and 44B show partial cross sections of a panel of a displaydevice having a bottom-gate transistor which uses amorphous silicon as asemiconductor layer.

A gate electrode 4403 is formed over a substrate 4401. In addition, afirst electrode 4404 is formed in the same layer and with the samematerial as the gate electrode 4403. As a material of the gate electrode4403, polycrystalline silicon doped with phosphorus can be used. Notonly polycrystalline silicon, but silicide which is a compound of metaland silicon can be used. As the substrate 4401, a glass substrate, aquartz substrate, a ceramic substrate, or the like can be used.

Then, a gate insulating film 4405 is formed to cover the gate electrode4403 and the first electrode 4404. The gate insulating film 4405 isformed by using a silicon oxide film, a silicon nitride film, or thelike.

A semiconductor layer 4406 is formed over the gate insulating film 4405.In addition, a semiconductor layer 4407 is formed in the same layer andwith the same material as the semiconductor layer 4406.

N-type semiconductor layers 4408 and 4409 having n-type conductivity areformed over the semiconductor layer 4406, and an n-type semiconductorlayer 4410 is formed over the semiconductor layer 4407.

Wires 4411 and 4412 are formed over the n-type semiconductor layers 4408and 4409 respectively, and a conductive layer 4413 is formed in the samelayer and with the same material as the wires 4411 and 4412, over then-type semiconductor layer 4410.

Thus, a second electrode is formed with the semiconductor layer 4407,the n-type semiconductor layer 4410, and the conductive layer 4413. Notethat a capacitor 4420 is formed to have a structure where the gateinsulating film 4405 is sandwiched between the second electrode and thefirst electrode 4404.

One of the edges of the wire 4411 is extended, and a pixel electrode4414 is formed to be in contact with the extended portion of the wire4411.

In addition, an insulator 4415 is formed to cover the edge of the pixelelectrode 4414, a driving transistor 4419, and the capacitor 4420.

Then, a layer 4416 containing an organic compound and a counterelectrode 4417 are formed over the pixel electrode 4414 and theinsulator 4415. Thus, a light-emitting element 4418 is formed in aregion where the layer 4416 containing an organic compound is sandwichedbetween the pixel electrode 4414 and the counter electrode 4417.

The semiconductor layer 4407 and the n-type semiconductor layer 4410which serve as a part of the second electrode of the capacitor are notnecessarily required. That is, the second electrode may formed with onlythe conductive layer 4413, so that the capacitor has a structure wherethe gate insulating film is sandwiched between the first electrode 4404and the conductive layer 4413.

Note that the pixel electrode 4414 may be formed before forming the wire4411 in FIG. 44A, so that a capacitor 4422 as shown in FIG. 44B can beobtained, which has a structure where the gate insulating film 4405 issandwiched between a second electrode 4421 formed of the pixel electrode4414 and the first electrode 4404.

Although FIGS. 44A and 44B show inversely staggered channel-etchedtransistors, a channel-protected transistor may be used as well.Description will be made below of channel-protected transistors withreference to 45A and 45B.

A channel-protected transistor shown in FIG. 45A differs from thechannel-etched driving transistor 4419 shown in FIG. 44A in that aninsulator 4501 serving as an etching mask is provided over the channelformation region in the semiconductor layer 4406. Common portions exceptthat point are denoted by the same reference numerals.

Similarly, a channel-protected transistor shown in FIG. 45B differs fromthe channel-etched driving transistor 4419 shown in FIG. 44B in that theinsulator 4501 serving as an etching mask is provided over the channelformation region in the semiconductor layer 4406. Common portions exceptthat point are denoted by the same reference numerals.

By using an amorphous semiconductor film as a semiconductor layer (e.g.,a channel formation region, a source region, a drain region, and thelike) of a transistor included in the pixel of the invention, themanufacturing cost can be reduced.

Note that structures of a transistor and a capacitor which can beapplied to the pixel configuration of the invention are not limited tothe aforementioned structures of the transistors and capacitors, andvarious structures of transistors and capacitors can be used.

Note also that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 7. That is, in the display device in accordancewith this embodiment mode, a current flowing into a light-emittingelement is determined independently of the threshold voltage of atransistor; therefore, variations in the threshold voltage of thetransistor can be compensated. Accordingly, variations in luminance ofthe light-emitting element can be reduced, which in turn can improve theimage quality.

[Embodiment Mode 9]

In this embodiment mode, description will be made of a method formanufacturing a display device using plasma treatment, as a method formanufacturing a display device including transistors, for example.

FIGS. 46A to 46C show exemplary structures of a display device includingtransistors. Note that FIG. 46B corresponds to a cross section takenalong a line a-b in FIG. 46A, and FIG. 46C corresponds to a crosssection taken along a line c-d in FIG. 46A.

The display shown in FIGS. 46A to 46C includes semiconductor films 4603a and 4603 b provided over a substrate 4601 with an insulating film 4602sandwiched therebetween, gate electrodes 4605 provided over thesemiconductor films 4603 a and 4603 b respectively with a gateinsulating layer 4604 sandwiched therebetween, insulating films 4606 and4607 provided to cover the gate electrodes 4605, and a conductive film4608 provided over the insulating film 4607 to be electrically connectedto a source region or a drain region of the semiconductor films 4603 aand 4603 b. Although FIGS. 46A to 46C show the case of providing ann-channel transistor 4610 a which uses a part of the semiconductor film4603 a as a channel region, and a p-channel transistor 4610 b which usesa part of the semiconductor film 4603 b as a channel region, theinvention is not limited to such a structure. For example, although then-channel transistor 4610 a is provided with LDD (Lightly Doped Drain)regions, while the p-channel transistor 4610 b is not provided with LDDregions in FIGS. 46A to 46C, a structure where both of the transistorsare provided with LDD regions or a structure where neither of thetransistors is provided with LDD regions may be employed.

In this embodiment mode, the display device shown in FIGS. 46A to 46C ismanufactured by oxidizing or nitriding a semiconductor film or aninsulating film, that is, by performing plasma oxidation or nitridationtreatment to at least one layer among the substrate 4601, the insulatingfilm 4602, the semiconductor films 4603 a and 4603 b, the gateinsulating film 4604, the insulating film 4606, and the insulating film4607. In this manner, by oxidizing or nitriding a semiconductor film oran insulating film by plasma treatment, the surface of the semiconductorfilm or the insulating film can be modified, thereby a denser insulatingfilm can be obtained, compared with an insulating film formed by CVD orsputtering. Therefore, defects such as pin holes can be suppressed, andthus the characteristics and the like of the display device can beimproved.

In this embodiment mode, description will be made of a method ofmanufacturing a display device by oxidizing or nitriding thesemiconductor films 4603 a and 4603 b or the gate insulating film 4604shown in FIGS. 46A to 46C by plasma treatment, with reference to thedrawings.

First, a case where an island-shaped semiconductor film provided over asubstrate is formed to have an edge with about 90 degrees is shown.

First, the semiconductor films 4603 a and 4603 b with island shapes areformed over the substrate 4601 (FIG. 47A). The island-shapedsemiconductor films 4603 a and 4603 b can be obtained by forming anamorphous semiconductor film by a known method (e.g., sputtering, LPCVD,plasma CVD, or the like) using a material containing silicon (Si) as amain component (e.g., Si_(x)Ge_(1-x) or the like) over the insulatingfilm 4602 which is formed in advance over the substrate 4601, and thencrystallizing the amorphous semiconductor film, and further etching thesemiconductor film selectively. Note that the crystallization of theamorphous semiconductor film can be performed by a known crystallizationmethod such as laser crystallization, thermal crystallization using RTAor an annealing furnace, or thermal crystallization using metal elementswhich promote crystallization, or a method combining them. Note that inFIG. 47, the island-shaped semiconductor films 4603 a and 4603 b areeach formed to have an edge with about 90 degrees (θ=85 to 100 degrees).

Next, the semiconductor films 4603 a and 4603 b are oxidized or nitridedby plasma treatment to form insulating films (oxide films or nitridefilms) 4621 a and 4621 b on the surfaces of the semiconductor films 4603a and 4603 b respectively (FIG. 47B). For example, when Si is used forthe semiconductor films 4603 a and 4603 b, silicon oxide (SiO_(x)) orsilicon nitride (SiN_(x)) is formed as the insulating films 4621 a and4621 b. Further, after being oxidized by plasma treatment, thesemiconductor films 4603 a and 4603 b may be subjected to plasmatreatment again to be nitrided. In that case, silicon oxide (SiO_(x)) isformed on the semiconductor films 4603 a and 4603 b first, and thensilicon nitride oxide (SiN_(x)O_(y)) (x>y) is formed on the surface ofthe silicon oxide. Note that in the case of oxidizing the semiconductorfilm by plasma treatment, the plasma treatment is performed under anoxygen atmosphere (e.g., an atmosphere containing oxygen (O₂) and a raregas (at least one of He, Ne, Ar, Kr, and Xe), an atmosphere containingoxygen, hydrogen (H₂), and a rare gas, or an atmosphere containingnitrous oxide and a rare gas). Meanwhile, in the case of nitriding thesemiconductor film by plasma treatment, the plasma treatment isperformed under a nitrogen atmosphere (e.g., an atmosphere containingnitrogen (N₂) and a rare gas (at least one of He, Ne, Ar, Kr, and Xe),an atmosphere containing nitrogen, hydrogen, and a rare gas, or anatmosphere containing NH₃ and a rare gas). As the rare gas, Ar can beused, for example. Alternatively, a mixed gas of Ar and Kr may be used.Therefore, the insulating films 4621 a and 4621 b contain the rare gas(at least one of He, Ne, Ar, Kr, and Xe) used in the plasma treatment,and in the case where Ar is used, the insulating films 4621 a and 4621 bcontain Ar.

The plasma treatment is performed in the atmosphere containing theaforementioned gas, with the conditions of a plasma electron density inthe range of 1×10¹¹ to 1×10¹³ cm⁻³, and a plasma electron temperature inthe range of 0.5 to 1.5 eV. Since the plasma electron density is highand the electron temperature in the vicinity of the treatment subject(here, the semiconductor films 4603 a and 4603 b) formed over thesubstrate 4601 is low, plasma damage to the treatment subject can beprevented. In addition, since the plasma electron density is as high as1×10¹¹ cm⁻³ or more, an oxide or nitride film which is formed byoxidizing or nitriding the treatment subject by plasma treatment isadvantageous in its uniform thickness or the like as well as beingdense, compared with a film formed by CVD, sputtering, or the like.Further, since the plasma electron temperature is as low as 1 eV,oxidation or nitridation treatment can be performed at a lowertemperature, compared with the conventional plasma treatment or thermaloxidation. For example, oxidation or nitridation treatment can beperformed sufficiently even when plasma treatment is performed at atemperature lower than the strain point of a glass substrate by 100degrees or more. Note that as a frequency for generating plasma, highfrequencies such as microwaves (2.45 GHz) can be used. Note also thatthe plasma treatment is to be performed with the aforementionedconditions unless otherwise specified.

Next, the gate insulating film 4604 is formed so as to cover theinsulating films 4621 a and 4621 b (FIG. 47C). The gate insulating film4604 can be formed by a known method (e.g., sputtering, LPCVD, plasmaCVD, or the like) to have either a single-layer structure or astacked-layer structure of an insulating film containing oxygen ornitrogen, such as silicon oxide (SiO_(x)), silicon nitride (SiN_(x)),silicon oxynitride (SiO_(x)N_(y)) (x>y), or silicon nitride oxide(SiN_(x)O_(y)) (x>y). For example, when Si is used for the semiconductorfilms 4603 a and 4603 b, and the Si is oxidized by plasma treatment toform silicon oxide as the insulating films 4621 a and 4621 b on thesurfaces of the semiconductor films 4603 a and 4603 b, silicon oxide(SiO_(x)) is formed as a gate insulating film on the insulating films4621 a and 4621 b. In addition, referring to FIG. 47B, if the insulatingfilms 4621 a and 4621 b formed by oxidizing or nitriding thesemiconductor films 4603 a and 4603 b by plasma treatment aresufficiently thick, the insulating films 4621 a and 4621 b can be usedas the gate insulating film.

Next, by forming the gate electrodes 4605 or the like over the gateinsulating film 4604, a semiconductor device having the n-channeltransistor 4610 a and the p-channel transistor 4610 b which use theisland-shaped semiconductor films 4603 a and 4603 b respectively aschannel regions can be manufactured (FIG. 47D).

In this manner, by oxidizing or nitriding the surfaces of thesemiconductor films 4603 a and 4603 b by plasma treatment beforeproviding the gate insulating film 4604 over the semiconductor films4603 a and 4603 b, short circuits or the like between the gateelectrodes and the semiconductor films can be prevented, which wouldotherwise be caused by coverage defects of the channel regions with thegate insulating film 4604 at edges 4651 a and 4651 b. That is, if eachof the island-shaped semiconductor films has an edge with an angle ofabout 90 degrees (θ=85 to 100 degrees), there is a concern that at thetime when a gate insulating film is formed so as to cover thesemiconductor films by CVD, sputtering, or the like, a coverage defectmight be caused, resulting from breaking of the gate insulating film atthe edges of the semiconductor films, or the like. However, such acoverage defect or the like can be prevented by oxidizing or nitridingthe surfaces of the semiconductor films by plasma treatment in advance.

Alternatively, referring to FIG. 47C, the gate insulating film 4604 maybe oxidized or nitrided by performing plasma treatment after forming thegate insulating film 4604. In that case, an insulating film (an oxide ornitride film) 4623 is formed on the surface of the gate insulating film4604 (FIG. 48A) by oxidizing or nitriding the gate insulating film 4604which is formed to cover the semiconductor films 4603 a and 4603 b byplasma treatment (FIG. 48B). The plasma treatment can be performed withsimilar conditions to those in FIG. 47B. In addition, the insulatingfilm 4623 contains a rare gas which is used in the plasma treatment, andfor example, it contains Ar if Ar is used for the plasma treatment.

Alternatively, referring to FIG. 48B, after oxidizing the gateinsulating film 4604 by performing plasma treatment under an oxygenatmosphere, the gate insulating film 4604 may be subjected to plasmatreatment again under a nitrogen atmosphere, so as to be nitrided. Inthat case, silicon oxide (SiO_(x)) or silicon oxynitride (SiO_(x)N_(y))(x>y) is formed on the semiconductor films 4603 a and 4603 b first, andthen silicon nitride oxide (SiN_(x)O_(y)) (x>y) is formed to be incontact with the gate electrodes 4605. After that, by forming the gateelectrodes 4605 or the like over the insulating film 4623, asemiconductor device having the n-channel transistor 4610 a and thep-channel transistor 4610 b which use the island-shaped semiconductorfilms 4603 a and 4603 b respectively has channel regions can bemanufactured (FIG. 48C). In this manner, by oxidizing or nitriding thesurface of the gate insulating film by plasma treatment, the surface ofthe gate insulating film can be modified to form a dense film. Theinsulating film obtained by plasma treatment is dense and has fewdefects such as pin holes, compared with an insulating film formed byCVD or sputtering. Therefore, the characteristics of the transistors canbe improved.

Although FIG. 48A shows the case where the surfaces of the semiconductorfilms 4603 a and 4603 b are oxidized or nitrided by performing plasmatreatment to the semiconductor films 4603 a and 4603 b in advance,another method may be employed such that plasma treatment is notperformed to the semiconductor films 4603 a and 4603 b, but plasmatreatment is performed after forming the gate insulating film 4604. Inthis manner, by performing plasma treatment before forming a gateelectrode, a semiconductor film can be oxidized or nitrided even if thesemiconductor film is exposed due to a coverage defect such as breakingof a gate insulating film at edges of the semiconductor film; therefore,short circuits or the like between the gate electrode and thesemiconductor film can be prevented, which would otherwise be caused bya coverage defect of the semiconductor film with the gate insulatingfilm at the edges.

In this manner, by oxidizing or nitriding the semiconductor films or thegate insulating film by plasma treatment, short circuits or the likebetween the gate electrodes and the semiconductor films can beprevented, which would otherwise be caused by a coverage defect of thesemiconductor films with the gate insulating film at the edges, even ifthe island-shaped semiconductor films are formed to have edges with anangle of about 90 degrees.

Next, a case is shown where the island-shaped semiconductor films formedover the substrate are provided with tapered edges (θ=30 to 85 degrees).

First, the island-shaped semiconductor films 4603 a and 4603 b areformed over the substrate 4601 (FIG. 49A). The island-shapedsemiconductor films 4603 a and 4603 b can be obtained by forming anamorphous semiconductor film over the insulating film 4602 which isformed over the substrate 4601 in advance, by sputtering, LPCVD, plasmaCVD, or the like using a material containing silicon (Si) as a maincomponent, and then crystallizing the amorphous semiconductor film by aknown crystallization method such as laser crystallization, thermalcrystallization using RTA or an annealing furnace, or thermalcrystallization using metal elements which promote crystallization, andfurther etching the semiconductor film selectively. Note that in FIG.49A, the island-shaped semiconductor films are formed to have taperededges (θ=30 to 85 degrees).

Next, the gate insulating film 4604 is formed so as to cover thesemiconductor films 4603 a and 4603 b (FIG. 49B). The gate insulatingfilm 4604 can be formed to have either a single-layer structure or astacked-layer structure of an insulating film containing oxygen ornitrogen, such as silicon oxide (SiO_(x)), silicon nitride (SiN_(x)),silicon oxynitride (SiO_(x)N_(y)) (x>y), or silicon nitride oxide(SiN_(x)O_(y)) (x>y) by a known method such as sputtering, LPCVD, orplasma CVD.

Next, an insulating film (an oxide or nitride film) 4624 is formed onthe surface of the gate insulating film 4604 by oxidizing or nitridingthe gate insulating film 4604 by plasma treatment (FIG. 49C). The plasmatreatment can be performed with the aforementioned conditions. Forexample, if silicon oxide (SiO_(x)) or silicon oxynitride (SiO_(x)N_(y))(x>y) is used as the gate insulating film 4604, the gate insulating film4604 is oxidized by performing plasma treatment under an oxygenatmosphere, thereby a dense film with few defects such as pin holes canbe formed on the surface of the gate insulating film, compared with agate insulating film formed by CVD, sputtering, or the like. On theother hand, if the gate insulating film 4604 is nitrided by plasmatreatment under a nitrogen atmosphere, a silicon nitride oxide film(SiN_(x)O_(y)) (x>y) can be provided as the insulating film 4624 on thesurface of the gate insulating film 4604. Alternatively, after oxidizingthe gate insulating film 4604 by performing plasma treatment under anoxygen atmosphere, the gate insulating film 4604 may be subjected toplasma treatment again under a nitrogen atmosphere, so as to benitrided. In addition, the insulating film 4624 contains a rare gaswhich is used in the plasma treatment, and for example, it contains Arif Ar is used in the plasma treatment.

Next, by forming the gate electrodes 4605 or the like over the gateinsulating film 4604, a semiconductor device having the n-channeltransistor 4610 a and the p-channel transistor 4610 b which use theisland-shaped semiconductor films 4603 a and 4603 b respectively aschannel regions can be manufactured (FIG. 49D).

In this manner, by performing plasma treatment to the gate insulatingfilm, an insulating film made of an oxide or nitride film can beprovided on the surface of the gate insulating film, and thus thesurface of the gate insulating film can be modified. Since theinsulating film obtained by oxidation or nitridation with plasmatreatment is dense and has few defects such as pin holes, compared witha gate insulating film formed by CVD or sputtering, the characteristicsof the transistors can be improved. In addition, whereas short circuitsor the like between the gate electrodes and the semiconductor films canbe prevented by forming the semiconductor films to have tapered edges,which would otherwise be caused by a coverage defect of thesemiconductor films with the gate insulating film at the edges, shortcircuits or the like between the gate electrodes and the semiconductorfilms can be prevented even more effectively by performing plasmatreatment after forming the gate insulating film.

Next, description will be made of a manufacturing method of asemiconductor device which differs from that in FIGS. 49A to 49D, withreference to the drawings. Specifically, a case is shown where plasmatreatment is selectively performed to tapered edges of semiconductorfilms.

First, the island-shaped semiconductor films 4603 a and 4603 b areformed over the substrate 4601 (FIG. 50A). The island-shapedsemiconductor films 4603 a and 4603 b can be obtained by forming anamorphous semiconductor film over the insulating film 4602 which isformed over the substrate 4601 in advance, by a known method (e.g.,sputtering, LPCVD, plasma CVD, or the like) using a material containingsilicon (Si) as a main component (e.g., Si_(x)Ge_(1-x) or the like), andcrystallizing the amorphous semiconductor film, and further etching thesemiconductor film selectively by using resists 4625 a and 4625 b asmasks. Note that the crystallization of the amorphous semiconductor filmcan be performed by a known crystallization method such as lasercrystallization, thermal crystallization using RTA or an annealingfurnace, or thermal crystallization using metal elements which promotecrystallization, or a method combining them.

Next, the edges of the island-shaped semiconductor films 4603 a and 4603b are selectively oxidized or nitrided by plasma treatment beforeremoving the resists 4625 a and 4625 b which are used for etching thesemiconductor films, thereby an insulating film (an oxide or nitridefilm) 4626 is formed on each edge of the semiconductor films 4603 a and4603 b (FIG. 50B). The plasma treatment is performed with theaforementioned conditions. In addition, the insulating film 4626contains a rare gas which is used in the plasma treatment.

Next, the gate insulating film 4604 is formed to cover the semiconductorfilms 4603 a and 4603 b (FIG. 50C). The gate insulating film 4604 can beformed in a similar manner to the aforementioned one.

Next, by forming the gate electrodes 4605 or the like over the gateinsulating film 4604, a semiconductor device having the n-channeltransistor 4610 a and the p-channel transistor 4610 b which use theisland-shaped semiconductor films 4603 a and 4603 b respectively aschannel regions can be manufactured (FIG. 50D).

If the semiconductor films 4603 a and 4603 b are provided with taperededges, edges 4652 a and 4652 b of the channel regions which are formedin parts of the semiconductor films 4603 a and 4603 b are also tapered,thereby the thickness of the semiconductor films and the gate insulatingfilm in that portion differs from that in the central portion, which mayadversely affect the characteristics of the transistors. Thus, theadverse effects on the transistors due to the edges of the channelregions can be reduced by forming insulating films on the edges of thesemiconductor films, namely, the edges of the channel regions, byselectively oxidizing or nitriding the edges of the channel regions byplasma treatment here.

Although FIGS. 50A to 50D show an example where only the edges of thesemiconductor films 4603 a and 4603 b are oxidized or nitrided by plasmatreatment, the gate insulating film 4604 can also be oxidized ornitrided by plasma treatment as shown in FIG. 49C (FIG. 52A).

Next, description will be made of a manufacturing method of asemiconductor device which differs from the aforementioned manufacturingmethod, with reference to the drawings. Specifically, a case ofperforming plasma treatment to semiconductor films with tapered shapesis shown.

First, the island-shaped semiconductor films 4603 a and 4603 b areformed over the substrate 4601 in a similar manner to the aforementionedone (FIG. 51A).

Next, the semiconductor films 4603 a and 4603 b are oxidized or nitridedby plasma treatment, thereby forming insulating films (oxide or nitridefilms) 4627 a and 4627 b on the surfaces of the semiconductor films 4603a and 4603 b (FIG. 50B). The plasma treatment can be performed with theaforementioned conditions. For example, when Si is used for thesemiconductor films 4603 a and 4603 b, silicon oxide (SiO_(x)) orsilicon nitride (SiN_(x)) is formed as the insulating films 4627 a and4627 b. In addition, after oxidizing the semiconductor films 4603 a and4603 b by plasma treatment, the semiconductor films 4603 a and 4603 bmay be subjected to plasma treatment again to be nitrided. In that case,silicon oxide (SiO_(x)) or silicon oxynitride (SiO_(x)N_(y)) (x>y) isformed on the semiconductor films 4603 a and 4603 b first, and thensilicon nitride oxide (SiN_(x)O_(y)) (x>y) is formed on the siliconoxide or the silicon oxynitride. Therefore, the insulating films 4627 aand 4627 b contain a rare gas which is used in the plasma treatment.Note that the edges of the semiconductor films 4603 a and 4603 b areconcurrently oxidized or nitrided by performing plasma treatment.

Next, the gate insulating film 4604 is formed to cover the insulatingfilms 4627 a and 4627 b (FIG. 51C). The gate insulating film 4604 can beformed to have either a single-layer structure or a stacked-layerstructure of an insulating film containing oxygen or nitrogen, such assilicon oxide (SiO_(x)), silicon nitride (SiN_(x)), silicon oxynitride(SiO_(x)N_(y)) (x>y), or silicon nitride oxide (SiN_(x)O_(y)) (x>y) by aknown method (e.g., sputtering, LPCVD, plasma CVD, or the like). Forexample, when Si is used for the semiconductor films 4603 a and 4603 b,and the surfaces of the semiconductor films 4603 a and 4603 b areoxidized by plasma treatment to form silicon oxide as the insulatingfilms 4627 and 4627 b, silicon oxide (SiO_(x)) is formed as a gateinsulating film over the insulating films 4627 a and 4627 b.

Next, by forming the gate electrodes 4605 or the like over the gateinsulating film 4604, a semiconductor device having the n-channeltransistor 4610 a and the p-channel transistor 4610 b which use theisland-shaped semiconductor films 4603 a and 4603 b respectively aschannel regions can be manufactured (FIG. 51D).

If the semiconductor films are provided with tapered edges, edges 4653 aand 4653 b of the channel regions which are formed in parts of thesemiconductor films are also tapered, which may adversely affect thecharacteristics of the semiconductor elements. Thus, the adverse effectson the semiconductor elements can be reduced by oxidizing or nitridingthe semiconductor films by plasma treatment, since the edges of thechannel regions can be also oxidized or nitrided accordingly.

Although FIGS. 51A to 51D show an example where only the semiconductorfilms 4603 a and 4603 b are oxidized or nitrided by plasma treatment,the gate insulating film 4604 may also be oxidized or nitrided by plasmatreatment as shown in FIG. 49C (FIG. 52B). In that case, after oxidizingthe gate insulating film 4604 by plasma treatment under an oxygenatmosphere, the gate insulating film 4604 may be subjected to plasmatreatment again to be nitrided. In such a case, silicon oxide (SiO_(x))or silicon oxynitride (SiO_(x)N_(y)) (x>y) is formed on thesemiconductor films 4603 a and 4603 b first, and then silicon nitrideoxide (SiN_(x)O_(y)) (x>y) is formed in contact with the gate electrodes4605.

In this manner, by modifying the surface of a semiconductor film or aninsulating film by oxidation or nitridation using plasma treatment, adense and high-quality insulating film can be formed. Accordingly,defects such as pin holes can be prevented even when the insulating filmis formed to be thin, thereby microfabrication and high performance ofsemiconductor elements such as transistors can be realized.

Although this embodiment mode has illustrated an example where plasmatreatment is performed to the semiconductor films 4603 a and 4603 b orthe gate insulating film 4604 in FIG. 46B so as to oxidize or nitridethe semiconductor films 4603 a and 4603 b or the gate insulating film4604, a layer to be subjected to the plasma treatment is not limited tothese. For example, plasma treatment may be performed to the substrate4601, the insulating film 4602, the insulating film 4606, or theinsulating film 4607.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 8. That is, in the display device manufactured bythe process in accordance with this embodiment mode, a transistor can bedriven with a low voltage, and thus variations in the threshold voltagecan be reduced. Further, since a current flowing into a light-emittingelement can be determined independently of the threshold voltage of atransistor, variations in luminance of the light-emitting element can bereduced, which in turn can improve the image quality.

[Embodiment Mode 10]

In this embodiment, description will be made of a halftone process as amethod for manufacturing a display device including transistors.

FIG. 53 shows a cross-sectional structure of a display device includingtransistors, a capacitor, and a resistor. FIG. 53 shows n-channeltransistors 5301 and 5302, a capacitor 5304, a resistor 5305, and ap-channel transistor 5303. Each transistor has a semiconductor layer5405, an insulating layer 5408, and a gate electrode 5409. The gateelectrode 5409 is formed to have a stacked structure of a firstconductive layer 5403 and a second conductive layer 5402. In addition,FIGS. 54A to 54E are top views of the transistors, the capacitor, andthe resistor shown in FIG. 53, which can be referred to in conjunctionwith FIG. 53.

Referring to FIG. 53, the n-channel transistor 5301 has impurity regions5407 (also called lightly doped drain: LDD regions) on opposite sides ofa channel region in the semiconductor layer 5405, which are doped withimpurities at a lower concentration than impurity regions 5406 whichform source and drain regions for making contact with wires 5404. Informing the n-channel transistor 5301, the impurity regions 5406 and5407 are doped with phosphorus as impurities which impart n-typeconductivity. The LDD regions are formed in order to suppresshot-electron degradation and a short-channel effect.

As shown in FIG. 54A, the first conductive layer 5403 is formed to bewider than the second conductive layer 5402 in the gate electrode 5409of the n-channel transistor 5301. In this case, the first conductivelayer 5403 is formed to be thinner than the second conductive layer5402. The first conductive layer 5403 is formed to have a thicknessenough for ion species which are accelerated with an electric field of10 to 100 kV to travel through. The impurity regions 5407 are formed tooverlap with the first conductive layer 5403 of the gate electrode 5409.That is, LDD regions which overlap with the gate electrode 5409 areformed. In this structure, the impurity regions 5407 are formed in aself-aligned manner by doping the semiconductor layer 5405 withimpurities having one conductivity type through the first conductivelayer 5403 of the gate electrode 5409, using the second conductive layer5402 as a mask. That is, the LDD regions which overlap with the gateelectrode are formed in a self-aligned manner

Referring again to FIG. 53, the n-channel transistor 5302 has theimpurity region 5407 only on one side of a channel region in thesemiconductor layer 5405, which is doped with impurities at a lowerconcentration than the impurity regions 5406. As shown in FIG. 54B, thefirst conductive layer 5403 is formed to be wider than one side of thesecond conductive layer 5402 in the gate electrode 5409 of the n-channeltransistor 5302. In this case also, an LDD region can be formed in aself-aligned manner by doping the semiconductor layer 5405 withimpurities having one conductivity type through the first conductivelayer 5403 using the second conductive layer 5402 as a mask.

A transistor having an LDD region on one side of a channel region may beused as a transistor where only a positive voltage or a negative voltageis applied between source and drain electrodes. Specifically, such atransistor may be applied to a transistor for constructing a logic gatesuch as an inverter circuit, a NAND circuit, a NOR circuit, or a latchcircuit, or a transistor for constructing an analog circuit such as asense amplifier, a constant voltage generation circuit, or a VCO.

Referring again to FIG. 53, the capacitor 5304 is formed by sandwichingthe insulating layer 5408 by the first conductive layer 5403 and thesemiconductor layer 5405. The semiconductor layer 5405 for forming thecapacitor 5304 includes impurity regions 5410 and 5411. The impurityregion 5411 is formed in the semiconductor layer 5405 in a positionoverlapping with the first conductive layer 5403. The impurity region5410 forms a contact with the wire 5404. The impurity region 5411 can beformed by doping the semiconductor layer 5405 with impurities having oneconductivity type through the first conductive layer 5403; therefore,the concentration of impurities having one conductivity type which arecontained in the impurity regions 5410 and 5411 can be controlled to beeither the same or different. In either case, since the semiconductorlayer 5405 in the capacitor 5304 functions as an electrode, theresistance of the semiconductor layer 5405 is preferably lowered byadding impurities with one conductivity type thereto. Further, the firstconductive layer 5403 can fully function as an electrode by utilizingthe second conductive layer 5402 as an auxiliary electrode as shown inFIG. 54C. In this manner, by forming a composite electrode structurewhere the first conductive layer 5403 and the second conductive layer5402 are combined, the capacitor 5304 can be formed in a self-alignedmanner.

Referring again to FIG. 53, the resistor 5305 is formed of the firstconductive layer 5403. The first conductive layer 5403 is formed to havea thickness of 30 to 150 nm; therefore, the resistor can be formed byappropriately setting the width or length of the first conductive layer5403.

The resistor may be formed with a semiconductor layer containingimpurity elements at a high concentration or a thin metal layer. A metallayer is preferable since the resistance value thereof is determined bythe thickness and quality of the film itself, and thus has smallvariations, while the resistance value of a semiconductor layer isdetermined by the thickness and quality of the film, the concentrationand activation rate of impurities, and the like. FIG. 54D shows a topview of the resistor 5405.

Referring again to FIG. 53, the semiconductor layer 5305 in thep-channel transistor 5303 has the impurity region 5412. This impurityregion 5412 forms a source or drain region for making contact with thewire 5404. The gate electrode 5409 has a structure where the firstconductive layer 5403 and the second conductive layer 5402 overlap witheach other. The p-channel transistor 5303 is a transistor with asingle-drain structure where no LDD region is provided. In forming thep-channel transistor 5303, the impurity region 5412 is doped with boronor the like as impurities which impart p-type conductivity. On the otherhand, an n-channel transistor with a single-drain structure can also beformed if the impurity region 5412 is doped with phosphorus. FIG. 54Eshows a top view of the p-channel transistor 5303.

One or both of the semiconductor layer 5405 and the gate insulatinglayer 5408 may be oxidized or nitrided by high-density plasma treatmentwith the conditions of microwave excitation, an electron temperature ofless than or equal to 2 eV, an ion energy of less than or equal to 5 eV,and an electron density in the range of 1×10¹¹ to 1 ×10^(13 cm) ⁻³. Atthis time, by treating the layer in an oxygen atmosphere (e.g., O₂, N₂O,or the like) or a nitrogen atmosphere (e.g., N₂, NH₃, or the like) withthe substrate temperature being set at 300 to 450° C., a defect level ofan interface between the semiconductor layer 5405 and the gateinsulating layer 5408 can be lowered. By performing such treatment tothe gate insulating layer 5408, the gate insulating layer 5408 can bedensified. That is, generation of defective charges can be suppressed,and thus fluctuations of the threshold voltage of the transistor can besuppressed. In addition, in the case of driving the transistor with avoltage of less than or equal to 3 V, an insulating layer oxidized ornitrided by the aforementioned plasma treatment can be used as the gateinsulating layer 5408. Meanwhile, in the case of driving the transistorwith a voltage of greater than or equal to 3 V, the gate insulatinglayer 5408 can be formed by combining an insulating layer formed on thesurface of the semiconductor layer 5405 by the aforementioned plasmatreatment with an insulating layer deposited by CVD (plasma CVD orthermal CVD). Similarly, such an insulating layer can be utilized as adielectric layer of the capacitor 5304 as well. In this case, theinsulating layer formed by the plasma treatment is a dense film with athickness of 1 to 10 nm; therefore, a capacitor with a high capacity canbe formed.

As has been described with reference to FIGS. 53 and 54A to 54E,elements with various structures can be formed by combining conductivelayers with various thickness. A region where only the first conductivelayer is formed and a region where both the first conductive layer andthe second conductive layer are formed can be formed by using aphotomask or a reticle having an auxiliary pattern which is formed of adiffraction grating pattern or a semi-transmissive film and has afunction of reducing the light intensity. That is, the thickness of theresist mask to be developed is varied by controlling the quantity oflight that the photomask can transmit, at the time of exposing thephotoresist to light in the photolithography process. In this case, aresist with the aforementioned complex shape may be formed by providingthe photomask or the reticle with slits with a resolution limit ornarrower than that. Further, the mask pattern formed of the photoresistmaterial may be transformed by baking at 200° C. after development.

By using a photomask or a reticle having an auxiliary pattern which isformed of a diffraction grating pattern or a semi-transmissive film andhas a function of reducing the light intensity, the region where onlythe first conductive layer is formed and the region where the firstconductive layer and the second conductive layer are stacked can becontinuously formed. As shown in FIG. 54A, the region where only thefirst conductive layer is formed can be selectively formed over thesemiconductor layer. Whereas such a region is effective over thesemiconductor layer, it is not required in other regions (wire regionswhich are connected to a gate electrode). With such a photomask orreticle, the region where only the first conductive layer is not formedin the wire portion; therefore, the density of the wire can besubstantially increased.

In FIGS. 53 and 54A to 54E, the first conductive layer is formed with athickness of 30 to 50 nm, using high-melting-point metals such astungsten (W), chromium (Cr), tantalum (Ta), tantalum nitride (TaN), ormolybdenum (Mo), or alloys or compounds containing such metals as a maincomponent, while the second conductive layer is formed with a thicknessof 300 to 600 nm, using high-melting-point metals such as tungsten (W),chromium (Cr), tantalum (Ta), tantalum nitride (TaN), or molybdenum(Mo), or alloys or compounds containing such metals as a main component.For example, the first conductive layer and the second conductive layerare formed with different conductive materials, so that the etching rateof each conductive layer can be varied in the etching process to beperformed later. For example, TaN can be used for the first conductivelayer, while a tungsten film can be used for the second conductivelayer.

This embodiment mode shows that transistors, a capacitor, and a resistoreach having a different electrode structure can be formed concurrentlythrough the same patterning process, using a photomask or a reticlehaving an auxiliary pattern which is formed of a diffraction gratingpattern or a semi-transmissive film and has a function of reducing thelight intensity. Accordingly, elements with different modes can beformed and integrated in accordance with the characteristics required ofa circuit, without increasing the number of manufacturing steps.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 9. That is, in the display device in accordancewith this embodiment mode, elements with different modes can be formedin accordance with the characteristics required of a circuit withoutincreasing the number of manufacturing steps. Further, since a currentflowing into a light-emitting element can be determined independently ofthe threshold voltage of a transistor, variations in luminance of thelight-emitting element can be reduced, which in turn can improve theimage quality.

[Embodiment Mode 11]

In this embodiment, description will be made of an exemplary maskpattern for manufacturing a display device including transistors, withreference to FIGS. 55A to 57B.

Semiconductor layers 5510 and 5511 shown in FIG. 55A are preferablyformed with silicon or a crystalline semiconductor containing silicon asa main component. For example, single crystalline silicon,polycrystalline silicon obtained by crystallizing a silicon film bylaser annealing, or the like can be employed. Alternatively, a metaloxide semiconductor, amorphous silicon, or an organic semiconductorwhich exhibits semiconductor characteristics can be employed.

In any case, a semiconductor layer to be formed first is provided overthe entire surface of a substrate having an insulating surface, or apart thereof (a region having a larger area than the area which isdefined as a semiconductor region of a transistor). Then, a mask patternis formed over the semiconductor layer by a photolithography technique.By etching the semiconductor layer using the mask pattern, thesemiconductor layers 5510 and 5511 each having a specific island shapeare formed, which include source and drain regions and a channelformation region of a transistor. The semiconductor layers 5510 and 5511are determined in accordance with the layout design.

The photomask for forming the semiconductor layers 5510 and 5511 whichare shown in FIG. 55A has a mask pattern 5530 shown in FIG. 55B. Theshape of this mask pattern 5530 differs depending on whether the resistused for the photolithography process is a positive type or a negativetype. In the case of using a positive resist, the mask pattern 5530shown in FIG. 55B is formed as a light-blocking portion. The maskpattern 5530 has a shape that a vertex A of a polygon is removed. Inaddition, a corner B has such a shape that a plurality of gradations areprovided so as not to form a right-angled corner.

The semiconductor layers 5510 and 5511 shown in FIG. 55A reflect theshape of the mask pattern 5530 shown in FIG. 55B. In thephotolithography process, the mask pattern 5530 may be transferred suchthat a pattern similar to the original mask pattern is formed, or atransferred pattern has more roundish corners than the original maskpattern. That is, the semiconductor layers 5510 and 5511 can be formedto have corner portions with an even rounder and smoother shape, thanthose of the mask pattern 5530.

An insulating layer which at least partially contains silicon oxide orsilicon nitride is formed over the semiconductor layers 5510 and 5511.One of the purposes of forming this insulating layer is to form a gateinsulating layer. Then, gate wires 5612, 5613, and 5614 are formed so asto partially overlap with the semiconductor layers as shown in FIG. 56A.The gate wire 5612 is formed corresponding to the semiconductor layer5510. The gate wire 5613 is formed corresponding to the semiconductorlayers 5510 and 5511. The gate wire 5614 is formed corresponding to thesemiconductor layers 5510 and 5511. The gate wires are formed bydepositing a metal layer or a highly conductive semiconductor layer overthe insulating layer and then printing a pattern onto the layer by aphotolithography technique.

The photomask for forming such gate wires has a mask pattern 5631 shownin FIG. 56B. This mask pattern 5631 is removed its corners in such amanner that each removed corner (right-angled triangle) has one side ofless than or equal to 10 μm, or has one side as long as 1/5 to 1/2 ofthe wire width. The gate wires 5612, 5613, and 5614 shown in FIG. 56Areflect the shape of the mask pattern 5631 shown in FIG. 56B. Althoughthe mask pattern 5631 may be transferred such that a pattern similar tothe original one is formed, the transferred pattern may be controlled tohave more roundish corners than those of the original one. That is,corner portions which have a more roundish and smoother shape than thoseof the mask pattern 5631 can be formed. Specifically, each of the gatewires 5612, 5613, and 5614 is formed to have roundish corners by beingremoved edges such that each removed corner (right-angled triangle) hasone side of less than or equal to 10 μm, or has one side as long as 1/5to 1/2 of the wire width. By forming a projecting portion to have aroundish corner, generation of particles due to overdischarge can besuppressed in dry etching with plasma. In addition, by forming adepressed portion to have a roundish corner, such an effect can beobtained that, even when particles are generated in washing, they can bewashed away without gathering in the corner. Thus, yields can besignificantly improved.

An interlayer insulating layer is a layer to be formed after forming thegate wires 5612, 5613, and 5614. The interlayer insulating layer isformed with an inorganic insulating material such as silicon oxide or anorganic insulating material such as polyimide or an acrylic resin.Another insulating layer such as silicon nitride or silicon nitrideoxide may be provided between the interlayer insulating layer and thegate wires 5612, 5613, and 5614. Further, an insulating layer such assilicon nitride or silicon nitride oxide may be provided over theinterlayer insulating layer as well. Such an insulating layer canprevent contamination of the semiconductor layer and the gate insulatinglayer with impurities such as extrinsic metal ions or moisture, whichwould otherwise adversely affect the transistor.

Openings are formed in predetermined positions of the interlayerinsulating layer. For example, the openings are provided incorresponding positions to the gate wires and the semiconductor layerslocated below the interlayer insulating layer. A wire layer which has asingle layer or a plurality of layers of metals or metal compounds isformed by photolithography with the use of a mask pattern, and thenetching into a desired pattern. Then, as shown in FIG. 57A, the wires5715 to 5720 are formed to partially overlap with the semiconductorlayers. A wire connects specific elements to each other, which means awire connects specific elements not linearly but nonlinearly (so as toinclude corners) due to the restriction of a layout. In addition, thewidth of the wire varies in between a contact portion and otherportions. As for the contact portion, if the width of a contact hole iswider than or equal to the wire width, the wire in the contact portionis formed to be wider than the width of the wire in other portions.

A photomask for forming the wires 5715 and 5720 has a mask pattern 5732shown in FIG. 57B. In this case also, each wire is formed to haveroundish corners by being removed edges such that each removed corner(right-angled triangle) has one side of less than or equal to 10 μm, orhas one side as long as 1/5 to 1/2 of the wire width. By forming aprojecting portion of such a wire to have a roundish corner, generationof particles due to overdischarge can be suppressed in dry etching withplasma. In addition, by forming a depressed portion to have a roundishcorner, such an effect can be obtained that, even when particles aregenerated in washing, they can be washed away without gathering in thecorner. Thus, yields can be significantly improved. Further, by formingwires to have roundish corners, an electric field can be prevented fromconcentrating on the corner, thereby the wire can be less easily broken.Further, when a plurality of wires are formed in parallel, dust can beeasily washed away.

In FIG. 57A, n-channel transistors 5721 to 5724 and p-channeltransistors 5725 and 5726 are formed. A pair of the n-channel transistor5723 and the p-channel transistor 5725, and a pair of the n-channeltransistor 5724 and the p-channel transistor 5726 constitute inverters5727 and 5728 respectively. Note that a circuit including the sixtransistors constitutes an SRAM. An insulating layer such as siliconnitride or silicon oxide may be formed over these transistors.

Note also that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 10. That is, in the display device in accordancewith this embodiment mode, dust which is produced during the formationof wires can be effectively removed, thereby defects of light-emittingelements which result from the residual foreign material such as ductcan be reduced. Further, since a current flowing into a light-emittingelement can be determined independently of the threshold voltage of atransistor, variations in luminance of the light-emitting element can bereduced, which in turn can improve the image quality.

[Embodiment Mode 12]

In this embodiment mode, description will be made of hardware forcontrolling the driving methods described in Embodiment Modes 1 to 7.

FIG. 58 shows a schematic diagram of a display device and hardware. Apixel portion 5804 is disposed over a substrate 5801. In addition, asignal line driver circuit 5806 and a scan line driver circuit 5805 areoften disposed over the same substrate. Besides, a power supply circuit,a precharge circuit, a timing generating circuit, and the like may bedisposed. There is also a case where the signal line driver circuit 5806or the scan line driver circuit 5805 is not disposed. In that case, acircuit which is not provided over the substrate 5801 is often formed inan IC. Such an IC is often mounted on the substrate 5801 by COG (Chip OnGlass) bonding. Alternatively, the IC may be mounted on a connectingsubstrate 5807 for connecting a peripheral circuit substrate 5802 to thesubstrate 5801.

A signal 5803 is inputted to the peripheral circuit substrate 5802, anda controller 5808 controls the signal to be stored in a memory 5809, amemory 5810, or the like. In the case where the signal 5803 is an analogsignal, it is often converted into a digital signal before being storedin the memory 5809, the memory 5810, or the like. The controller 5808outputs a signal to the substrate 5801 by using the signal stored in thememory 5809, the memory 5810, or the like.

In order to implement the driving methods described in Embodiment Modes1 to 7, the controller 5808 controls the arranging order of subframes orthe like, and outputs signals to the substrate 5801.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 11.

[Embodiment Mode 13]

In this embodiment, description will be made of an exemplaryconfiguration of an EL module and an EL television receiver using thedisplay device of the invention.

FIG. 59 shows an EL module combining a display panel 5901 and a circuitboard 5902. The display panel 5901 includes a pixel portion 5903, a scanline driver circuit 5904, and a signal line driver circuit 5905. Acontrol circuit 5906, a signal dividing circuit 5907, and the like areformed over the circuit board 5902, for example. The display panel 5901and the circuit board 5911 are connected with a connecting wire 5908.The connecting wire 5908 can be an FPC or the like.

The control circuit 5906 corresponds to the controller 5808 and thememories 5809 and 5810 in Embodiment Mode 12. The control circuit 5906mainly controls the arranging order of subframes or the like.

The display panel 5901 may be constructed such that a part of peripheraldriver circuits (e.g., a driver circuit having a low operating frequencyamong a plurality of driver circuits) is formed over the same substrateas a pixel portion by using TFTs, while another part of the peripheraldriver circuits (a driver circuit having a high operating frequencyamong the plurality of driver circuits) is formed in an IC chip, so thatthe IC chip is mounted on the display panel 5901 by COG (Chip On Glass)or the like. Alternatively, the IC chip may be mounted on the displaypanel 5901 by TAB (Tape Automated Bonding) or a printed wiring board.

In addition, when signals set on scan lines and signals lines areimpedance-converted with a buffer, the signal writing period into pixelsin each row can be shortened. Accordingly, a higher-definition displaydevice can be provided.

Further, in order to reduce power consumption, a pixel portion may beformed over a glass substrate with TFTs, while all of the peripheraldriver circuits may be formed in IC chips to be mounted on the displaypanel by COG (Chip On Glass) bonding or the like.

For example, the whole display panel may be divided into several regionsand IC chips incorporating a part or all of the peripheral drivercircuits (the signal line driver circuit, the scan line driver circuit,and the like) may be mounted on the respective regions of the displaypanel by COG (Chip On Glass) bonding. FIG. 60 shows a configuration of adisplay panel in that case.

FIG. 60 shows an example where the whole screen is divided into fourregions and driven with eight IC chips. The display panel includes asubstrate 6010, a pixel portion 6011, FPCs 6012 a to 6012 h, and ICchips 6013 a to 6013 h. Among the eight IC chips, the IC chips 6013 a to6013 d are formed with signal line driver circuits, and the IC chips6013 e to 6013 h are formed with scan line driver circuits. Then, bydriving an arbitrary IC chip, only an arbitrary display region can bedriven among the four display regions. For example, when only the ICchips 6013 a and 6013 e are driven, only an upper left region can bedriven. Accordingly, power consumption can be reduced.

FIG. 61 sows an exemplary display panel having another configuration. Inthe display panel in FIG. 61, a pixel portion 6121 where a plurality ofcolumns of pixels 6130 are arranged, a scan line driver circuit 6122 forcontrolling signals of scan lines 6133, and a signal line driver circuit6123 for controlling signals of signal lines 6131 are provided over asubstrate 6120. In addition, a monitoring circuit 6124 may be providedin order to compensate variations in luminance of light-emittingelements in the pixels 6130. The light-emitting elements in the pixels6130 have the same structure as the light-emitting elements in themonitoring circuit 6124. Each light-emitting element has a structurewhere a material which exhibits electroluminescence is sandwichedbetween a pair of electrodes.

On the outer edge of the substrate 6120, input terminals 6125 forinputting signals to the scan line driver circuit 6122 from an externalcircuit, input terminals 6126 for inputting signals to the signal linedriver circuit 6123 from an external circuit, and an input terminal 6129for inputting signals to the monitoring circuit 6124 are provided.

In order to make the light-emitting elements provided in the pixels 6130emit light, it is necessary to supply power from an external circuit. Apower supply line 6132 provided in the pixel portion 6121 is connectedat an input terminal 6127 to the external circuit. Since there arises aresistance loss in the power supply line 6132 depending on the lengththereof, it is preferable to provide a plurality of input terminals 6127at the periphery of the substrate 6120. The input terminals 6127 areprovided at both ends of the substrate 6120 so that luminance unevennessin the pixel portion 6121 becomes unnoticeable. That is, the phenomenonthat only one side of a display screen is bright while the other side isdark can be prevented. In addition, one of a pair of electrodes of eachlight-emitting element, which is not connected to the power supply line6132, is formed as a common electrode to be shared by the plurality ofpixels 6130, and this electrode also has a plurality of terminals 6128in order to reduce a resistance loss.

Power supply lines of such a display panel are formed from alow-resistance material such as Cu, which is effective particularly inthe case of increasing the size of the display screen. For example,while a display screen with a size of 13 inches has a diagonal line of340 mm, a display screen with a size of 60 inches has a diagonal line ofgreater than or equal to 1500 mm. In such a case, the wire resistancenecessarily has to be taken into consideration. Therefore, it ispreferable to use a low-resistance material such as Cu as a wire. Inaddition, considering a wire delay, signal lines and scan lines can beformed in a similar manner.

With an EL module having the aforementioned panel configuration, an ELtelevision receiver can be completed. FIG. 62 is a block diagram showingthe main configuration of an EL television receiver A tuner 6201receives video signals and audio signals. The video signals areprocessed by a video signal amplifier circuit 6202, a video signalprocessing circuit 6203 for converting a signal output from the videosignal amplifier circuit 6202 into a color signal corresponding to eachcolor of red, green, and blue, and a control circuit 5906 for convertingthe video signal to be input into a driver circuit. The control circuit5906 outputs signals to each of the scan line side and the signal lineside. In the case of performing digital drive, a signal dividing circuit5907 may be provided on the input side of the signal line driver circuit5905, so as to divide an input digital signal into m signals beforebeing supplied to a pixel portion.

Among the signals received at the tuner 6201, audio signals aretransmitted to an audio signal amplifier circuit 6204, and an outputthereof is supplied to a speaker 6206 through an audio signal processingcircuit 6205. A control circuit 6207 receives control data on areceiving station (reception frequency) or sound volume from an inputportion 6208 and transmits the signals to the tuner 6201 as well as theaudio signal processing circuit 6205.

By incorporating the EL module into a housing, a TV receiver can becompleted. A display portion of the TV receiver is formed with such anEL module. In addition, a speaker, a video input terminal, and the likeare provided as appropriate.

Needless to say, the invention is not limited to the TV receiver, andcan be applied as a display medium to various objects such as a monitorof a personal computer, an information display board at the trainstation, airport, or the like, or an advertisement display board on thestreet.

In this manner, by using the display device and the driving methodthereof in accordance with the invention, a current which flows into alight-emitting element is determined independently of the thresholdvoltage of a transistor. Accordingly, variations in the thresholdvoltage of transistors can be compensated, and thus variations inluminance of light-emitting elements can be reduced, which in turn canimprove the image quality.

Note that this embodiment mode can be freely combined with any ofEmbodiment Modes 1 to 12.

[Embodiment Mode 14]

An electronic device using the display device of the invention includesa camera (e.g., a video camera, a digital camera, and the like), agoggle display (head mounted display), a navigation system, an audioreproducing device (e.g., a car audio, an audio component set, and thelike), a personal computer, a game machine, a portable informationterminal (e.g., a mobile computer, a mobile phone, a portable gamemachine, an electronic book, and the like), an image reproducing deviceprovided with a storage medium (specifically, a device for reproducing astorage medium such as a digital versatile disc (DVD) and having adisplay for displaying the reproduced image). Specific examples of suchelectronic devices are shown in FIGS. 63A to 63H.

FIG. 63A shows a light-emitting device which includes a housing 6301, asupporting base 6302, a display portion 6303, speaker portions 6304, avideo input terminal 6304, and the like. The invention can be applied toa display device which forms the display portion 6303. In accordancewith the invention, clear images with reduced luminance variations canbe provided. Since a light-emitting device is a self-luminous type, nobacklight is required and a display portion which is thinner than aliquid crystal display can be provided. Note that a light-emittingdevice includes all display devices for information display such as apersonal computer, a TV broadcast reception, and advertisement display.

FIG. 63B shows a digital still camera which includes a main body 6306, adisplay portion 6307, an image receiving portion 6308, operating keys6309, an external connecting port 6310, a shutter 6311, and the like.The invention can be applied to a display device which forms the displayportion 6307. In accordance with the invention, clear images withreduced luminance variations can be provided.

FIG. 63C shows a laptop personal computer which includes a main body6312, a housing 6316, a display portion 6314, a keyboard 6315, anexternal connecting port 6316, a pointing device 6317, and the like. Theinvention can be applied to a display device which forms the displayportion 6314. In accordance with the invention, clear images withreduced luminance variations can be provided.

FIG. 63D shows a mobile computer which includes a main body 6318, adisplay portion 6319, a switch 6320, operating keys 6321, an infraredport 6322, and the like. The invention can be applied to a displaydevice which forms the display portion 6319. In accordance with theinvention, clear images with reduced luminance variations can beprovided.

FIG. 63E shows a portable image reproducing device having a storagemedium (specifically, a DVD player), which includes a. main body 6326, ahousing 6324, a display portion A6325, a display portion B6326, astorage medium (e.g., DVD or the like) reading portion 6327, operatingkeys 6328, a speaker portion 6329, and the like. The display portionA6325 mainly displays image data, while the display portion B6326displays text data. The invention can be applied to display deviceswhich form the display portions A6325 and B6326. In accordance with theinvention, clear images with reduced luminance variations can beprovided. Note that the image reproducing device having a storage mediumincludes a home-use game machine and the like.

FIG. 63F shows a goggle display (head mounted display) which includes amain body 6330, a display portion 6331, an arm portion 6332, and thelike. The invention can be applied to a display device which forms thedisplay portion 6331. In accordance with the invention, clear imageswith reduced luminance variations can be provided.

FIG. 63G is a video camera which includes a main body 6333, a displayportion 6334, a housing 6335, an external connecting port 6336, a remotecontrolling portion 6337, an image receiving portion 6338, a battery6339, an audio input portion 6340, operating keys 6341, and the like.The invention can be applied to a display device which forms the displayportion 6334. In accordance with the invention, clear images withreduced luminance variations can be provided.

FIG. 63H shows a portable phone which includes a main body 6342, ahousing 6343, a display portion 6334, an audio input portion 6345, anaudio output portion 6346, operating keys 6347, an external connectingport 6348, an antenna 6349, and the like. The invention can be appliedto a display device which forms the display portion 6344. Note thatpower consumption of the portable phone can be suppressed by displayingwhite text on a black background of the display portion 6334. Inaccordance with the invention, clear images with reduced luminancevariations can be provided.

Note that when a light-emitting material with high luminance is used,the display device can be applied to a front projector or a rearprojector by magnifying and projecting the light containing output imagedata with a lens or the like.

Nowadays, the aforementioned electronic devices are more often used fordisplaying data which has been distributed through telecommunicationspaths such as the Internet or CATV (cable television), and in particularfor displaying data on moving images. Since the response speed of alight-emitting material is quite high, it is preferable to use alight-emitting device for displaying moving images.

In addition, since a light-emitting device consumes power in itslight-emitting portion, it is desirable to display data by utilizing alight-emitting portion having as small an area as possible. Thus, when alight-emitting device is used for a display portion of a portableinformation terminal, which mainly displays text data, such as aportable phone and an audio reproducing device, it is desirable to drivethe device so that text data is formed by using a light-emitting portionwith a non-light-emitting portion on the background.

As described above, the applicable range of the invention is so widethat the invention can be applied to electronic devices in variousfields. In addition, an electronic device of this embodiment mode canemploy a display device with any of the configurations shown inEmbodiment Modes 1 to 13.

The present application is based on Japanese Priority application No.2005-303656 filed on Oct. 18, 2005 with the Japanese Patent Office, theentire contents of which are hereby incorporated by reference.

1. A display device comprising: a light-emitting element; a firsttransistor for supplying a current to the light-emitting element; asecond transistor for setting the first transistor to a diode-connectionstate; a storage capacitor; a power supply line; and a capacitive line,wherein a gate terminal of the first transistor is connected to a firstelectrode of the storage capacitor, wherein a first terminal of thefirst transistor is connected to the power supply line, wherein a secondelectrode of the storage capacitor is connected to the capacitive line,and wherein a voltage based on a threshold voltage of the firsttransistor is held in the storage capacitor by setting the firsttransistor to a diode-connection state.
 2. A display device comprising:a light-emitting element; a first transistor; a second transistor; astorage capacitor; a power supply line; a second power supply line; ascan line; and a capacitive line, wherein a gate terminal of the firsttransistor is connected to a first terminal of the second transistor anda first electrode of the storage capacitor, wherein a first terminal ofthe first transistor is connected to the first power supply line,wherein a second terminal of the first transistor is connected to asecond terminal of the second transistor and a first electrode of thelight-emitting element, wherein a gate terminal of the second transistoris connected to the scan line, wherein a second electrode of the storagecapacitor is connected to the capacitive line, wherein a secondelectrode of the light-emitting element is connected to the second powersupply line, and wherein a voltage based on a threshold voltage of thefirst transistor is held in the storage capacitor by setting the firsttransistor to a diode-connection state.
 3. A display device comprising:a light-emitting element; a first storage capacitor; a second storagecapacitor; a first power supply line; a second power supply line; asignal line; a capacitive line; a first transistor for supplying acurrent to the light-emitting element; a second transistor forconnecting a second electrode of the first storage capacitor to thesignal line line; a third transistor for connecting the second electrodeof the first storage capacitor to the capacitive line; a fourthtransistor for setting the first transistor to a diode-connection state;and a fifth transistor for controlling the supply of the current to thelight-emitting element, wherein a gate terminal of the first transistoris connected to a first electrode of the first storage capacitor and afirst electrode of the second storage capacitor, wherein a firstterminal of the first transistor is connected to the first power supplyline, wherein a second electrode of the second storage capacitor isconnected to the capacitive line, wherein a second electrode of thelight-emitting element is connected to the second power supply line. 4.A display device comprising: a light-emitting element; a first storagecapacitor; a second storage capacitor; a first power supply line; asecond power supply line; a signal line; a capacitive line; a first scanline, a second scan line, a third scan line and a fourth scan line; anda first transistor, a second transistor, a third transistor, a fourthtransistor and a fifth transistor, wherein a gate terminal of the firsttransistor is connected to a second terminal of the fourth transistor, afirst electrode of the first storage capacitor, and a first electrode ofthe second storage capacitor, wherein a first terminal of the firsttransistor is connected to the first power supply line, wherein a secondterminal of the first transistor is connected to a first terminal of thefourth transistor and a first terminal of the fifth transistor, whereina gate terminal of the second transistor is connected to the first scanline, wherein a first terminal of the second transistor is connected toa second electrode of the first storage capacitor and a first terminalof the third transistor, wherein a second terminal of the secondtransistor is connected to the signal line, wherein a gate terminal ofthe third transistor is connected to the second scan line, wherein asecond terminal of the third transistor is connected to the capacitiveline, wherein a gate terminal of the fourth transistor is connected tothe third scan line, wherein a gate terminal of the fifth transistor isconnected to the fourth scan line, wherein a second terminal of thefifth transistor is connected to a first electrode of the light-emittingelement, wherein a second electrode of the second storage capacitor isconnected to the capacitive line, and wherein a second electrode of thelight-emitting element is connected to the second power supply line. 5.A display device comprising: a light-emitting element; a first storagecapacitor; a second storage capacitor; a first power supply line; asecond power supply line; a signal line; a capacitive line; a firsttransistor for supplying a current to the light-emitting element; asecond transistor for connecting the second electrode of the firststorage capacitor to the signal line; a third transistor for connectingthe second electrode of the first storage capacitor to the capacitiveline; and a fourth transistor for setting the first transistor to adiode-connection state, wherein a gate terminal of the first transistoris connected to a first electrode of the first storage capacitor and asecond electrode of the second storage capacitor, wherein a firstterminal of the first transistor is connected to the first power supplyline, wherein a second terminal of the first transistor is connected toa first electrode of the light-emitting element, wherein a secondelectrode of the second storage capacitor is connected to the capacitiveline, and wherein a second electrode of the light-emitting element isconnected to the second power supply line.
 6. A display devicecomprising: a light-emitting element; a first transistor, a secondtransistor, a third transistor and a fourth transistor; a first storagecapacitor; a second storage capacitor; a first power supply line; asecond power supply line; a first scan line, a second scan line and athird scan line; a signal line; and a capacitive line, wherein a gateterminal of the first transistor is connected to a second terminal ofthe fourth transistor, a first electrode of the first storage capacitor,and a first electrode of the second storage capacitor, wherein a firstterminal of the first transistor is connected to the first power supplyline, wherein a second terminal of the first transistor is connected toa first terminal of the fourth transistor and a first electrode of thelight-emitting element, wherein a gate terminal of the second transistoris connected to the first scan line, wherein a first terminal of thesecond transistor is connected to a second electrode of the firststorage capacitor and a first terminal of the third transistor, whereina second terminal of the second transistor is connected to the signalline, wherein a gate terminal of the third transistor is connected tothe second scan line, wherein a second terminal of the third transistoris connected to the capacitive line, wherein a gate terminal of thefourth transistor is connected to the third scan line, wherein a secondelectrode of the second storage capacitor is connected to the capacitiveline, wherein a second electrode of the light-emitting element isconnected to the second power supply line.
 7. The display deviceaccording to claim 3, wherein a voltage based on a threshold voltage ofthe first transistor is held in the first storage capacitor and thesecond storage capacitor by setting the first transistor to thediode-connection state.
 8. The display device according to claim 4,wherein a voltage based on a threshold voltage of the first transistoris held in the first storage capacitor and the second storage capacitorby setting the first transistor to a diode-connection state.
 9. Thedisplay device according to claim 5, wherein a voltage based on athreshold voltage of the first transistor is held in the first storagecapacitor and the second storage capacitor by setting the firsttransistor to the diode-connection state.
 10. The display deviceaccording to claim 6, wherein a voltage based on a threshold voltage ofthe first transistor is held in the first storage capacitor and thesecond storage capacitor by setting the first transistor to adiode-connection state, and
 11. The display device according to claim 5,wherein a voltage applied to the second power supply line changes overtime
 12. The display device according to claim 6, wherein a voltageapplied to the second power supply line changes over time
 13. Thedisplay device according to claim 3, further comprising: a sixthtransistor for applying an initial potential to the second terminal ofthe first transistor.
 14. The display device according to claim 4,further comprising: a sixth transistor for applying an initial potentialto the second terminal of the first transistor.
 15. The display deviceaccording to claim 14, wherein a gate terminal of the sixth transistoris connected to a fifth scan line, wherein a first terminal of the sixthtransistor is connected to the second terminal of the first transistor,the first terminal of the fourth transistor, and the first terminal ofthe fifth transistor, and wherein a second terminal of the sixthtransistor is connected to the second terminal of the second transistor,the first terminal of the third transistor, and the second electrode ofthe first storage capacitor.
 16. The display device according to claim14, further comprising: an initialization line, wherein theinitialization line is connected to the second terminal of the sixthtransistor.
 17. The display device according to claim 3, furthercomprising: a reference line, wherein the reference line is connected toa second terminal of the third transistor.
 18. The display deviceaccording to claim 4, further comprising: a reference line, wherein thereference line is connected to the second terminal of the thirdtransistor.
 19. The display device according to claim 5, furthercomprising: a reference line, wherein the reference line is connected toa second terminal of the third transistor.
 20. The display deviceaccording to claim 6, further comprising: a reference line, wherein thereference line is connected to the second terminal of the thirdtransistor.
 21. The display device according to claim 3, wherein thethird transistor and the fourth transistor have the same conductivitytype.
 22. The display device according to claim 4, wherein the thirdtransistor and the fourth transistor have the same conductivity type.23. The display device according to claim 5, wherein the thirdtransistor and the fourth transistor have the same conductivity type.24. The display device according to claim 6, wherein the thirdtransistor and the fourth transistor have the same conductivity type.25. The display device according to claim 3, wherein the fourthtransistor is an n-channel transistor.
 26. The display device accordingto claim 4, wherein the fourth transistor is an n-channel transistor.27. The display device according to claim 5, wherein the fourthtransistor is an n-channel transistor.
 28. The display device accordingto claim 6, wherein the fourth transistor is an n-channel transistor.29. A driving method of a display device comprising the steps of:supplying a first current to a light-emitting element to set a voltagebetween opposite electrodes of a storage capacitor at a first voltage ina first period; turning on a second transistor to set a first transistorto a diode-connection state so that the voltage between the oppositeelectrodes of the storage capacitor is set at a second voltage based ona threshold voltage of the first transistor in a second period; applyinga video signal voltage to a signal line so that the voltage between theopposite electrodes of the storage capacitor is set at a third voltagebased on the video signal voltage and the threshold voltage of the firsttransistor in a third period; and applying the third voltage held in thestorage capacitor to a gate terminal of the first transistor to supply asecond current to the light-emitting element through the firsttransistor in a fourth period.
 30. A driving method of a display devicecomprising the steps of: turning on a third transistor to apply a firstvoltage to a second terminal of a first transistor in a first period;turning on a fourth transistor to set the first transistor to adiode-connection state so that voltage between opposite electrodes of afirst storage capacitor is set at a second voltage based on a thresholdvoltage of the first transistor and voltage between opposite electrodesof a second storage capacitor is set at a third voltage based on thethreshold voltage of the first transistor in a second period; applying avideo signal voltage to a signal line so that the voltage between theopposite electrodes of the first storage capacitor is set at a fourthvoltage based on the video signal voltage and the threshold voltage ofthe first transistor by turning on a second transistor and that thevoltage between the opposite electrodes of the second storage capacitoris set at a fifth voltage based on the video signal voltage and thethreshold voltage of the first transistor by turning on the secondtransistor in a third period; and applying the fourth voltage held inthe first storage capacitor and the fifth voltage held in the secondstorage capacitor to a gate terminal of the first transistor to supply acurrent to a light-emitting element through the first transistor in afourth period.
 31. A driving method of a display device comprising thesteps of: turning on a third transistor to apply a first voltage to asecond terminal of a first transistor in a first period; turning on afourth transistor to set the first transistor to a diode-connectionstate so that voltage between opposite electrodes of a first storagecapacitor is set at a second voltage based on a threshold voltage of thefirst transistor and voltage between opposite electrodes of a secondstorage capacitor is set at a third voltage based on the thresholdvoltage of the first transistor in a second period; applying a videosignal voltage to a signal line so that the voltage between the oppositeelectrodes of the first storage capacitor is set at a fourth voltagebased on the video signal voltage and the threshold voltage of the firsttransistor by turning on a second transistor and that the voltagebetween the opposite electrodes of the second storage capacitor is setat a fifth voltage based on the video signal voltage and the thresholdvoltage of the first transistor by turning on the second transistor in athird period; and applying the fourth voltage held in the first storagecapacitor and the fifth voltage held in the second storage capacitor toa gate terminal of the first transistor to supply a current to a firstelectode of a light-emitting element through the first transistor in afourth period, wherein potential applied to a second electode of thelight-emitting element in the first and fourth periods differ frompotential applied to the second electode of the light-emitting elementin the second and third periods.
 32. The driving method of a displaydevice according to claim 30, wherein the display device comprises aninitialization line connected to the second terminal of the thirdtransistor and applied to an initial potential.
 33. The driving methodof a display device according to claim 31, wherein the display devicecomprises an initialization line connected to the second terminal of thethird transistor and applied to an initial potential.
 34. An electronicdevice having the display device according to claim 1, wherein theelectronic device is one selected from the group consisting of a camerasuch as a video camera and a digital camera, a goggle display, anavigation system, an audio reproducing device such as a car audio andan audio component set, a personal computer, a game machine, a mobilecomputer, a mobile phone, a portable game machine, an electronic book,and an image reproducing device provided with a storage medium.
 35. Anelectronic device having the display device according to claim 2,wherein the electronic device is one selected from the group consistingof a camera such as a video camera and a digital camera, a goggledisplay, a navigation system, an audio reproducing device such as a caraudio and an audio component set, a personal computer, a game machine, amobile computer, a mobile phone, a portable game machine, an electronicbook, and an image reproducing device provided with a storage medium.36. An electronic device having the display device according to claim 3,wherein the electronic device is one selected from the group consistingof a camera such as a video camera and a digital camera, a goggledisplay, a navigation system, an audio reproducing device such as a caraudio and an audio component set, a personal computer, a game machine, amobile computer, a mobile phone, a portable game machine, an electronicbook, and an image reproducing device provided with a storage medium.37. An electronic device having the display device according to claim 4,wherein the electronic device is one selected from the group consistingof a camera such as a video camera and a digital camera, a goggledisplay, a navigation system, an audio reproducing device such as a caraudio and an audio component set, a personal computer, a game machine, amobile computer, a mobile phone, a portable game machine, an electronicbook, and an image reproducing device provided with a storage medium.38. An electronic device having the display device according to claim 5,wherein the electronic device is one selected from the group consistingof a camera such as a video camera and a digital camera, a goggledisplay, a navigation system, an audio reproducing device such as a caraudio and an audio component set, a personal computer, a game machine, amobile computer, a mobile phone, a portable game machine, an electronicbook, and an image reproducing device provided with a storage medium.39. An electronic device having the display device according to claim 6,wherein the electronic device is one selected from the group consistingof a camera such as a video camera and a digital camera, a goggledisplay, a navigation system, an audio reproducing device such as a caraudio and an audio component set, a personal computer, a game machine, amobile computer, a mobile phone, a portable game machine, an electronicbook, and an image reproducing device provided with a storage medium.